US Patent No. 10,143,074

FILTER AND TARGET SUPPLY APPARATUS


Patent No. 10,143,074
Issue Date November 27, 2018
Title Filter And Target Supply Apparatus
Inventorship Tomohide Ichinose, Oyama (JP)
Fumio Iwamoto, Oyama (JP)
Yutaka Shiraishi, Oyama (JP)
Tsukasa Hori, Oyama (JP)
Hideo Hoshino, Oyama (JP)
Assignee Gigaphoton Inc., Tochigi (JP)

Claim of US Patent No. 10,143,074

1. A filter comprising:a first member having a first surface provided with a plurality of grooves; and
a second member set with a second surface thereof covering the plurality of grooves,
the first member including a first passable portion that allows a fluid to pass between the first surface and a first space, which is defined beside a surface of the first member opposite to the first surface, through a first area of the plurality of grooves,
the second member including a second passable portion that allows the fluid to pass between the second surface and a second space, which is defined beside a surface of the second member opposite to the second surface, through a second area of the plurality of grooves distanced from the first area,
wherein the first member is made of a material selected from molybdenum, tungsten, aluminum oxide, silicon dioxide glass, silicon carbide, tungsten carbide, aluminum nitride, zirconium boride, and boron carbide, and
wherein the second member exposes a part of the plurality of grooves therethrough to the second space.