US Patent No. 10,015,887

TWO-STEP, DIRECT-WRITE LASER METALLIZATION


Patent No. 10,015,887
Issue Date July 03, 2018
Title Two-step, Direct-write Laser Metallization
Inventorship Michael Zenou, Hashmonaim (IL)
Marc Altman, Rehovot (IL)
Claudio Rottman, Modiin (IL)
Zvi Kotler, Tel Aviv (IL)
Assignee ORBOTECH LTD., Yavne (IL)

Claim of US Patent No. 10,015,887

11. A method for manufacturing, comprising:coating a substrate with a matrix comprising a sacrificial resin and containing nanoparticles to be patterned on the substrate;
irradiating the coated substrate with an energy beam so as to fix a pattern in the matrix by modifying a state of the sacrificial resin so as to cause cohesion between the nanoparticles without fully sintering the nanoparticles, such that a resistivity of the pattern remains at least ten times greater than a final resistivity that is to be achieved after full sintering;
removing the matrix remaining on the substrate outside the fixed pattern; and
after removing the matrix, sintering the nanoparticles in the pattern so as to achieve the final resistivity of the pattern.