US Pat. No. 9,451,689

CYCLOTRON

Sumitomo Heavy Industries...

1. A cyclotron, comprising:
a regenerator configured to move a beam of a charged particle on an orbit outward in a radial direction; and
a first magnetic channel configured to put the beam on an extraction orbit,
wherein the regenerator includes a pair of regenerator magnetic members facing each other with a median plane of the beam
interposed therebetween,

each of the regenerator magnetic members includes a first portion that extends from a radially inner end to a radially outer
end and includes an apex centered around a centerline perpendicular to the median plane,

between the radially inner end and the centerline, the first portion monotonically becomes nearer to the median plane as a
radial distance from a center of the cyclotron increases, and

the first portion satisfies the relationship d1>d2, where d1 is a radial distance between the centerline and a first reference position, d2 is a radial distance between the centerline and a second reference position, the first reference position is located on a
radially inner end side of the first portion, and the second reference position on a radially outer end side of the first
portion.

US Pat. No. 9,423,160

REGENERATIVE REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A regenerative refrigerator comprising:
an expander which includes a regenerator including a regenerative material and an expansion space for expanding a refrigerant
gas flowing in the regenerator,

the regenerator being configured such that a temperature profile at a predetermined temperature range in the regenerator is
selectively higher than a reference case in which lead is used as the regenerative material.

US Pat. No. 9,384,944

ION IMPLANTER AND ION IMPLANTATION METHOD

Sumitomo Heavy Industries...

1. An ion implanter comprising:
a beamline unit comprising:
a beam deflector capable of deflecting an ion beam in an x direction;
a beam scanner disposed downstream of the beam deflector and capable of deflecting the ion beam in the x direction in a reciprocating
manner to scan the ion beam; and

a beam collimator disposed downstream of the beam scanner and comprising a collimating lens that collimates the scanned ion
beam in a z direction, the collimating lens having a focus at a scan origin of the beam scanner,

wherein the beamline unit contains a reference trajectory of the ion beam, the z direction represents a direction along the
reference trajectory, and the x direction represents a direction perpendicular to the z direction; and

a controller that controls at least the beam deflector of the beamline unit,
wherein the controller corrects an x-direction deflection angle in the beam deflector so that an actual trajectory of the
ion beam deflected by the beam deflector intersects with the reference trajectory at the scan origin on an xz plane.

US Pat. No. 9,368,327

HIGH-ENERGY ION IMPLANTER

Sumitomo Heavy Industries...

1. A high-energy ion implanter that accelerates an ion beam extracted from an ion source, transports the ion beam to a wafer
along a beamline, and implants the ion beam into the wafer, the high-energy ion implanter comprising:
a beam generation unit that includes an ion source and a mass analyzer;
a high-energy multi-stage linear acceleration unit that accelerates the ion beam so as to generate a high-energy ion beam;
a high-energy beam deflection unit that changes the direction of the high-energy ion beam toward the wafer;
a beam transportation unit that transports the deflected high-energy ion beam to the wafer; and
a substrate processing/supplying unit that uniformly implants the transported high-energy ion beam into the wafer,
wherein the beam transportation unit includes a beam focusing/defocusing unit, an electrostatic beam scanner for high-energy
beam, an electrostatic beam collimator for high-energy beam, and an electrostatic final energy filter for high-energy beam,

wherein the high-energy ion beam emitted from the deflection unit is scanned and collimated by the electrostatic beam scanner
and the electrostatic beam collimator, mixed ions which are different in at least one of a mass, an ion charge state, and
energy are removed by the electrostatic final energy filter for high-energy beam, and the resultant ions are implanted into
the wafer, and

wherein the deflection unit is configured by a plurality of deflection electromagnets, and at least one horizontal focusing
element is inserted between the plurality of deflection electromagnets.

US Pat. No. 9,432,634

IMAGE GENERATION DEVICE AND OPERATION SUPPORT SYSTEM

SUMITOMO HEAVY INDUSTRIES...

1. An image generation device that generates an output image including a road image based on plural input images that are
captured by plural cameras mounted to a body to be operated, the image generation device comprising:
a control part that alternately arranges input image portions of two cameras of the plural cameras that correspond to an overlapping
area of image capturing ranges of the two cameras to form a lattice pattern on the output image; wherein

the lattice pattern includes as a unit pattern a region that is defined by two circles having a center at a position of a
first camera of the two cameras, and two circles having a center at a position of a second camera of the two cameras;

the lattice pattern includes as the unit pattern a lattice defined by a circle delineated by a peak of a first wave from a
first wave source located at the position of the first camera, a circle delineated by a trough of the first wave, a circle
delineated by a peak of a second wave from a second wave source located at the position of the second camera, and a circle
delineated by a trough of the second wave;

the control part associates coordinates on an output image plane corresponding to the unit pattern that intersects an antinodal
line formed by the first wave and the second wave with coordinates on a first input image plane of the first camera; and

the control part associates coordinates on the output image plane corresponding to the unit pattern that intersects a nodal
line formed by the first wave and the second wave with coordinates on a second input image plane of the second camera.

US Pat. No. 9,410,725

REFRIGERATOR INSTALLING STRUCTURE

SUMITOMO HEAVY INDUSTRIES...

1. A refrigerator installing structure that enables a refrigerator including a cylinder and a displacer to be installed in
a vacuum vessel in which an object to be cooled is accommodated, the displacer being removed from the cylinder during maintenance,
the cylinder being movable inside a sleeve between a position at which the cylinder thermally contacts the sleeve and another
position at which the cylinder does not thermally contact the sleeve, the refrigerator installing structure comprising:
a discharge mechanism configured to discharge a gas inside a space formed between the sleeve and the cylinder if a pressure
inside the space becomes greater than or equal to a predetermined pressure, and the discharge mechanism provided in a measurement
port which is provided in the refrigerator so as to cause the space to communicate with an outside space outside the refrigerator
installing structure, the discharge mechanism including

a first flange portion which is shaped like a disk, has a first sealing surface, and is rigidly fixed by welding to the measurement
port,

a second flange portion which is shaped like a disk having a same diameter as that of the first flange portion, has a second
sealing surface, and is movable relative to the first flange portion so as to close the measurement port by contacting the
first flange portion or open the measurement port by being separated from the first flange portion, the second flange portion
being guided by a bolt fixed to the second flange portion when the second flange portion moves relative to the first flange
portion, and

a spring which causes the second sealing surface of the second flange portion to contact the first sealing surface of the
first flange portion by an elastic force of the spring of pressing the second flange portion so as to close the measurement
port,

wherein the spring is configured to enable the second flange portion to be separated from the first flange portion when the
pressure inside the measurement port becomes the predetermined pressure.

US Pat. No. 9,449,791

BEAM IRRADIATION APPARATUS AND BEAM IRRADIATION METHOD

Sumitomo Heavy Industries...

1. A beam irradiation apparatus that is configured to irradiate a processed object with a charged particle beam, comprising:
a beam scanner that is configured such that the charged particle beam is reciprocatively scanned in a predetermined scanning
direction;

a measurement device that is capable of measuring an angular component of charged particles incident into a region of a measurement
target; and

a data processor that calculates an effective irradiation emittance of the charged particle beam using results measured by
the measurement device,

wherein the measurement device measures a time dependent value for angular distribution of the charged particle beam for a
period during which the charged particle beam to be reciprocatively scanned in the scanning direction passes over the region
of the measurement target and is incident into the measurement device,

the data processor transforms time information included in the time depending value for the angular distribution measured
by the measurement device to position information and thus calculates the effective irradiation emittance, and

the effective irradiation emittance represents an emittance of a virtual beam bundle in the scanning direction, the virtual
beam bundle being formed by summing portions of the charged particle beam which are incident into the region of the measurement
target with being scanned in the scanning direction.

US Pat. No. 9,659,755

PLASMA GENERATOR AND THERMAL ELECTRON EMITTER

SUMITOMO HEAVY INDUSTRIES...

1. A plasma generator, comprising:
an arc chamber having a plasma generation region in which plasma is generated in the inside thereof;
a magnetic field generator that applies a magnetic field to the plasma generation region; and
a cathode extending in an axial direction along an applying direction of the magnetic field applied to the plasma generation
region and provided with a cathode cap that emits thermal electrons at a front end thereof, wherein

the cathode cap protrudes toward the inside of the arc chamber in the axial direction and has a shape of which a width in
the radial direction perpendicular to the axial direction becomes smaller toward the inside of the arc chamber.

US Pat. No. 9,429,223

POWER TRANSMISSION DEVICE

Sumitomo Heavy Industries...

1. A power transmission device in which a motor and a reduction gear are connected through a fluid coupling, comprising:
a fan for reduction gear cooling provided at an input shaft of the reduction gear;
a fan hood configured to cover the fan; and
a protective cover configured to cover the fluid coupling,
wherein the protective cover includes a partition plate configured to partition a fan-side space which includes the fan from
a coupling-side space which includes the fluid coupling, and a first air intake which opens to the fan-side space,

wherein the partition plate is disposed at a position separated in an axial direction from the fan hood and includes a through-hole
for the passage of an input shaft of the reduction gear or an output shaft of the fluid coupling,

wherein the protective cover is provided with a second air intake and an air outlet which open to the coupling-side space,
and

wherein the protective cover is provided with a third air intake which opens to the coupling-side space at a position closer
to the partition plate than the second air intake.

US Pat. No. 9,422,689

SHOVEL AND METHOD FOR CONTROLLING SHOVEL

SUMITOMO HEAVY INDUSTRIES...

1. A shovel including a plurality of hydraulic actuators including a boom cylinder, comprising:
a hydraulic motor driven by hydraulic oil flowing out of the boom cylinder;
a regenerating oil passage configured to supply the hydraulic oil flowing out of the boom cylinder to the hydraulic motor;
a reusing oil passage configured to supply the hydraulic oil flowing out of the boom cylinder to another hydraulic actuator;
a reusing flow control valve configured to control a flow rate of hydraulic oil flowing in the reusing oil passage;
a boom cylinder pressure sensor configured to detect pressure of hydraulic oil in the boom cylinder; and
a hydraulic actuator pressure sensor configured to detect pressure of hydraulic oil in the other hydraulic actuator,
wherein the reusing flow control valve, which is a switching valve configured to switch between an opening and a closing of
the reusing oil passage, opens the reusing oil passage when the pressure of the hydraulic oil in the boom cylinder is greater
than the pressure of the hydraulic oil in the other hydraulic actuator.

US Pat. No. 9,062,753

CONNECTION STRUCTURE BETWEEN HOLLOW OUTPUT SHAFT AND DRIVEN SHAFT, AND SPEED REDUCER

SUMITOMO HEAVY INDUSTRIES...

5. A speed reducer comprising:
a hollow output shaft including a hollow portion and in which a driven shaft of a counterpart machine is inserted into the
hollow portion, and

a communication passage through which the hollow portion of the hollow output shaft communicates with an internal space of
the speed reducer,

wherein the hollow output shaft and the driven shaft are connected to each other so that power is transmitted by a key fitted
to a keyway formed on at least one shaft of the hollow output shaft and the driven shaft,

wherein the communication passage is opened to the bottom of the keyway, so that the hollow portion communicates, through
the communication passage, with the internal space of the speed reducer,

wherein an axial end face of the hollow output shaft and a stepped portion of the driven shaft come into contact with each
other, and

wherein a seal member is disposed between the axial end face of the hollow output shaft and the stepped portion of the driven
shaft.

US Pat. No. 9,431,214

ION IMPLANTATION APPARATUS

Sumitomo Heavy Industries...

1. An ion implantation apparatus including a scanning unit, the scanning unit comprising:
a scanning electrode device that allows a deflecting electric field to act on an ion beam incident along a reference trajectory
and scans the ion beam in a horizontal direction perpendicular to the reference trajectory; and

an upstream electrode device configured by a plurality of electrode bodies provided upstream of the scanning electrode device,
wherein the scanning electrode device includes
a pair of scanning electrodes provided to face each other in the horizontal direction with the reference trajectory interposed
therebetween, and

a pair of beam transport correction electrodes provided to face each other in a vertical direction perpendicular to the horizontal
direction with the reference trajectory interposed therebetween, and

wherein each of the pair of beam transport correction electrodes includes a beam transport correction inlet electrode body
protruding toward the reference trajectory in the vertical direction in the vicinity of an inlet of the scanning electrode
device.

US Pat. No. 9,343,263

ION IMPLANTER, BEAM ENERGY MEASURING DEVICE, AND METHOD OF MEASURING BEAM ENERGY

Sumitomo Heavy Industries...

1. An ion implanter comprising:
a beam collimator that has a focus on a beam reference trajectory and deflects a plurality of beam trajectories, directed
from the focus to the beam collimator at different respective incident angles on a plane containing the beam reference trajectory,
at different deflection angles in accordance with the respective incident angles so that each of the plurality of beam trajectories
is parallel to the beam reference trajectory under a target beam energy;

a parallelism measuring unit that measures a beam parallelism, representing an error of a beam angle in a direction in the
plane, the direction being perpendicular to the beam reference trajectory, of an ion beam passing through the beam collimator
at a downstream of the beam collimator; and

an energy calculating unit that calculates an energy deviation amount of the ion beam from the target beam energy based on
the beam parallelism.

US Pat. No. 9,488,390

REGENERATOR, GM TYPE REFRIGERATOR AND PULSE TUBE REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A helium-cooling type regenerator which accumulates the cold of working gas including helium, comprising:
at least first and second storage spaces along a temperature gradient direction in which the working gas flows, the first
and second storage spaces accommodating helium gas as a regenerator material, the first storage space being coupled to a high-pressure
side of a compressor via a first channel, the second storage space being coupled to a low-pressure side of the compressor
via a second channel, the high-pressure side of the compressor being coupled to one end of a first regenerator material flow
pipe, another end of the first regenerator material flow pipe being coupled to the first storage space, the low-pressure side
of the compressor being coupled to one end of a second regenerator material flow pipe, another end of the second regenerator
material flow pipe being coupled to the second storage space, wherein

the first storage space includes a first working gas channel through which the working gas flows, the working gas being not
in direct fluid communication with an inside of the first storage space, and

the second storage space includes a second working gas channel through which the working gas flows, the working gas being
not in direct fluid communication with an inside of the second storage space,

the first storage space is disposed in a region on a high-temperature side, and accommodates the regenerator material whose
pressure is P1 during an operation of the helium-cooling type regenerator,

the second storage space is disposed in a region on a low-temperature side, and accommodates the regenerator material whose
pressure is P2, which is less than P1, during the operation of the helium-cooling type regenerator, the second channel being not in direct fluid communication
with the first channel,

a specific heat of the regenerator material accommodated in the first storage space at the pressure P2 is less than that of the regenerator material at the pressure P1, and

a specific heat of the regenerator material accommodated in the second storage space at the pressure P1 is less than that of the regenerator material at the pressure P2.

US Pat. No. 9,390,826

ENERGY DEGRADER AND CHARGED PARTICLE BEAM IRRADIATION SYSTEM EQUIPPED THEREWITH

Sumitomo Heavy Industries...

1. An energy degrader that attenuates the energy of a charged particle beam, the degrader comprising:
a plurality of attenuating members that are different from each other in thickness in a traveling direction of the charged
particle beam, respectively, and are different from each other in the amount of energy attenuation of the charged particle
beam according to thickness; and

a drive unit that drives the attenuating members so that the attenuating members are arranged on a path of the charged particle
beam,

wherein at least an attenuating member with a largest thickness among the plurality of attenuating members is formed from
a material having a higher transmittance than a transmittance of the charged particle beam through a material that forms an
attenuating member with a smallest thickness.

US Pat. No. 9,431,852

POWER SUPPLY DEVICE

Sumitomo Heavy Industries...

1. A power supply device comprising: an input terminal to which an electric power is supplied from a commercial power source;
an output terminal connected to an electric load; an electric power transmission circuit which is connected between the input
terminal and the output terminal; a power storage device which is connected to the electric power transmission circuit and
is charged by the electric power supplied from the input terminal;
a metal-air battery which is connected to the electric power transmission circuit and is maintained in a standby state where
a material of an electrolytic solution is separated from a negative electrode active material of the metal-air battery; a
tank accumulating a material of the electrolytic solution separated from the negative electrode active material, the tank
being connected to the metal-air battery via a valve; and a controller which controls the valve to supply the material of
the electrolytic solution accumulated in the tank into the metal-air battery when a normal power supply from the commercial
power source is stopped,

wherein the metal-air battery is connected to the electric power transmission circuit via a switching element, and wherein
the controller switches on the switching element when the controller detects that the voltage across the terminals of the
metal-air battery reaches the rated open circuit voltage after supplying the material of the electrolytic solution into the
metal-air battery.

US Pat. No. 9,415,325

CRYOPUMP, METHOD OF REGENERATING CRYOPUMP, AND CONTROL DEVICE FOR CRYOPUMP

Sumitomo Heavy Industries...

13. A method of regenerating a cryopump, the method comprising:
controlling a cooling process of a cryopanel comprising a first panel and a second panel for vacuum pumping based on a stage
temperature measured by a first stage temperature sensor directly mounted on the first stage and being capable of measuring
a first cryogenic temperature, wherein the first panel and the second panel are cooled to the first stage cryogenic temperature
and a second stage cryogenic temperature lower than the first stage cryogenic temperature, respectively;

controlling a heating process of the cryopanel for a regeneration of the cryopump based at least on a panel temperature measured
by a panel temperature sensor being capable of measuring a room temperature and incapable of measuring the first and second
stage cryogenic temperatures; and

determining completion of the heating process based exclusively on the panel temperature measured by the panel temperature
sensor, wherein

a common control unit communicably connects the panel temperature sensor and the first stage temperature sensor.

US Pat. No. 9,441,345

HYBRID EXCAVATOR AND METHOD OF CONTROLLING HYBRID EXCAVATOR

SUMITOMO HEAVY INDUSTRIES...

1. A hybrid excavator comprising:
a lower running body;
an upper turning body that is positioned on the lower running body;
a boom including one end that is rotatably attached to the upper turning body;
an engine that is positioned at the upper turning body;
a motor generator that is positioned at the upper turning body and is configured to perform an assist operation for the engine
and an electric power generating operation using the engine;

a motor generator control part that is configured to control the motor generator in response to a switching control signal
supplied from a control unit;

a first electrical energy storage device that is positioned at the upper turning body;
a second electrical energy storage device that is positioned at the upper turning body and is electrically connected to the
motor generator control part;

a charge/discharge control part that is positioned at the upper turning body and is configured to control a charge/discharge
operation between the first electrical energy storage device and the second electrical energy storage device in response to
an externally supplied control command signal;

a motor that is positioned at the upper turning body and is electrically connected to the second electrical energy storage
device, the motor being configured to perform a regeneration operation for generating electric energy from mechanical energy
and store the electric energy generated by the regeneration operation in the second electrical energy storage device; and

the control unit that is configured to supply a control signal to at least one of the motor generator control part and the
charge/discharge control part;

wherein the control unit is configured to set a second electrical energy storage target value for the second electrical energy
storage device to a higher value than a first electrical energy storage target value for the first electrical energy storage
device during the regeneration operation performed by the motor, and

wherein, during a period in which the motor performs a power running operation, the control unit sets the second electrical
energy storage target value for the second electrical energy storage device to a higher value than a previous electrical energy
storage target value for the second electrical energy storage device that is set up before the motor performs the power running
operation.

US Pat. No. 9,425,023

ION GENERATOR AND THERMAL ELECTRON EMITTER

Sumitomo Heavy Industries...

1. An ion generator, comprising:
an arc chamber;
a cathode that extends outward from the inside of the arc chamber in an axial direction and that emits a thermal electron
into the arc chamber;

a thermal reflector with a cylindrical shape provided around the cathode in a radial direction and extending in the axial
direction; and

a narrow structure configured to narrow a width in the radial direction of a gap between the cathode and the thermal reflector
at a predetermined position in the axial direction.

US Pat. No. 9,488,391

CRYOGENIC REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A cryogenic refrigerator, comprising:
a regenerator filled with a regenerator material;
a compressor connected to a first pipe for feeding a refrigerant gas of a first pressure to the regenerator, and connected
to a second pipe for collecting the refrigerant gas of a second pressure lower than the first pressure from the regenerator;

a third pipe having a first end connected to a connection of the first pipe and the second pipe and a second end connected
to a high-temperature end of the regenerator;

a buffer tank configured to store the refrigerant gas;
a first opening and closing valve provided in the first pipe;
a second opening and closing valve provided in the second pipe;
a first valve provided in a first connecting pipe extending from the buffer tank to bypass the first opening and closing valve
and the second opening and closing valve to connect to the third pipe;

a second valve provided in a second connecting pipe extending from the buffer tank to connect to the first pipe; and
a third valve provided in a third connecting pipe extending from the buffer tank to connect to the second pipe,
wherein the third valve is opened at a first time and remains opened until a second time at which the third valve is closed,
the first opening and closing valve remains open from the first time to the second time, and each of the first valve and the
second valve remains closed from the first time to the second time.

US Pat. No. 9,269,541

HIGH ENERGY ION IMPLANTER, BEAM CURRENT ADJUSTER, AND BEAM CURRENT ADJUSTMENT METHOD

Sumitomo Heavy Industries...

1. A high energy ion implanter comprising:
a high energy multistage linear acceleration unit;
a beamline component arranged upstream or downstream of the high energy multistage linear acceleration unit to form a focus
point of an ion beam; and

a variable aperture device disposed at the focus point or a vicinity thereof to adjust a beam width of the ion beam in a direction
perpendicular to a focusing direction of the ion beam at the focus point in order to control an implanting beam current.

US Pat. No. 9,379,030

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

Sumitomo Heavy Industries...

1. An ion implantation method of transporting ions generated by an ion source to a wafer and implanting the ions into the
wafer by irradiating an ion beam on the wafer, the method comprising
during the ion implantation into the wafer, using a plurality of detection units which can detect an event having a possibility
of discharge and determining a state of the ion beam based on existence of detected event having a possibility of discharge
and a degree of influence of the event on the ion beam.

US Pat. No. 9,453,662

CRYOGENIC REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A cryogenic refrigerator comprising:
a first stage displacer;
a first stage cylinder configured to form a first expansion space between the first stage cylinder and the first stage displacer;
a second stage displacer connected to the first stage displacer; and
a second stage cylinder configured to form a second expansion space between the second stage cylinder and the second stage
displacer,

wherein the second stage displacer includes
a helical groove,
a first flow resistor,
a buffer portion, and
a clearance sealing portion,
which are formed on an outer peripheral surface of the second stage displacer so as to be arranged from a side of the second
expansion space toward a side of the first stage displacer in an order of the helical groove, the buffer portion, and the
clearance sealing portion,

wherein the helical groove is formed so as to helically extend from the side of the second expansion space toward the side
of the first stage displacer,

wherein the first flow resistor communicates with the helical groove directly at an end of the helical groove and also communicates
with the buffer portion directly at an end of the buffer portion,

wherein the buffer portion includes an annular recess that is depressed from the clearance sealing portion of the second stage
displacer in a radial direction of the second stage displacer and communicates with a side of the first stage displacer in
the first flow resistor, and the buffer portion is separated from the helical groove and communicates with the helical groove
through the first flow resistor, and

wherein the clearance sealing portion exists between the first expansion space and the buffer portion in a longitudinal axis
direction of the second stage displacer.

US Pat. No. 9,117,630

INSULATION STRUCTURE OF HIGH VOLTAGE ELECTRODES FOR ION IMPLANTATION APPARATUS

Sumitomo Heavy Industries...

1. An insulation structure of high voltage electrodes for an ion implantation apparatus, the insulation structure comprising:
two conductor portions that are electrodes; and
an insulator provided between the two conductor portions,
wherein the two conductor portions are individually connected to the insulator,
wherein the insulator has an exposed surface to a vacuum space,
wherein each of the two conductor portions includes a conductor body having a joint region having contact with the insulator,
an exposed region to the vacuum space, and a boundary zone lying between the joint region and the exposed region,

wherein at least one of the two conductor portions has at least one heat-resistant conductor element disposed on the conductor
body, and

wherein the heat-resistant conductor element is provided on at least part of the boundary zone in such a manner as to be adjacent
to the exposed surface of the insulator, and the heat-resistant conductor element is formed of a conductive material whose
melting point is higher than that of the conductor portion.

US Pat. No. 9,502,759

ANTENNA COVER AND PLASMA GENERATING DEVICE USING SAME

Sumitomo Heavy Industries...

1. An antenna cover for covering a surface of an antenna provided in a plasma chamber and exciting an electric field with
a high frequency to an inner portion of the plasma chamber,
wherein the thickness of the antenna cover in at least one direction orthogonal to the surface of the antenna is dependent
on a position on the surface, such that space dependency of an electric potential on an external surface of the antenna cover
decreases, the thickness of the antenna cover being a dimension between an internal surface of the antenna cover facing to
the surface of the antenna and the external surface of the antenna cover.

US Pat. No. 9,355,847

HIGH-ENERGY ION IMPLANTER

Sumitomo Heavy Industries...

1. A high-energy ion implanter that accelerates an ion beam extracted from an ion source, transports the ion beam to a wafer
along a beamline, and implants the ion beam into the wafer, the high-energy ion implanter comprising:
a beam generation unit that includes an ion source and a magnetic field type mass analyzer;
a radio frequency multi-stage linear acceleration unit that accelerates the ion beam so as to generate a high-energy ion beam;
a deflection unit that includes a magnetic field type energy analysis device for filtering ions by a momentum while changing
the direction of the high-energy ion beam toward the wafer;

a beam transportation line unit that transports the deflected high-energy ion beam to the wafer; and
a substrate processing/supplying unit that uniformly implants the transported high-energy ion beam into the wafer,
wherein the beam transportation line unit includes a high-energy beam scanner and an electric field type beam collimator for
high-energy,

wherein the high-energy ion beam emitted from the deflection unit is scanned by the beam scanner and collimated by the electric
field type beam collimator and is implanted into the wafer, and

wherein an electric field type final energy filter that deflects the high-energy scan beam in the vertical direction by an
electric field is inserted between the electric field type beam collimator and the wafer, in addition to the magnetic field
type mass analyzer and the magnetic field type energy analysis device that operate as momentum filters, and the radio frequency
multi-stage linear acceleration unit that operates as a velocity filter.

US Pat. No. 9,208,996

ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD

Sumitomo Heavy Industries...

1. An ion implantation apparatus comprising:
an ion source for generating ions and extracting the ions as an ion beam;
an implantation processing chamber for implanting the ions into a workpiece;
a beamline device for providing a beamline to transport the ion beam from the ion source to the implantation processing chamber;
and

a controller comprising a plurality of implantation setting configurations including a first implantation setting configuration
suitable for transport of a low energy/high current beam for high-dose implantation into the workpiece, and a second implantation
setting configuration suitable for transport of a high energy/low current beam for low-dose implantation into the workpiece,
the controller selects one of the plurality of implantation setting configurations according to an implantation condition
and controls the ion implantation apparatus under the selected implantation setting configuration, wherein

the beamline device comprises a beam scanning device configured to provide scanning of the ion beam to supply the ion beam
having a beam irradiation region exceeding a width of the workpiece in the implantation processing chamber,

the implantation processing chamber includes a mechanical scanning device configured to mechanically scan the workpiece with
respect to the beam irradiation region,

the beamline device is configured such that a same beam center trajectory being a reference in the beamline is provided from
the ion source to the implantation processing chamber in the first implantation setting configuration and the second implantation
setting configuration,

the first implantation setting configuration includes a setting that determines a combination of control of the beam scanning
device to scan the ion beam in a beam scan direction perpendicular to the beam center trajectory and control of the mechanical
scanning device to mechanically scan the workpiece in a mechanical scan direction perpendicular to the beam center trajectory
and the beam scan direction, and

the second implantation setting configuration includes the setting that determines the combination of control of the beam
scanning device to scan the ion beam in the beam scan direction and control of the mechanical scanning device to mechanically
scan the workpiece in the mechanical scan direction.

US Pat. No. 9,343,262

ION IMPLANTATION APPARATUS, BEAM PARALLELIZING APPARATUS, AND ION IMPLANTATION METHOD

Sumitomo Heavy Industries...

1. An ion implantation apparatus comprising:
a beam parallelizing unit comprising an acceleration lens, and a deceleration lens disposed adjacent to the acceleration lens
in an ion beam transportation direction; and

a power supply unit configured to operate the beam parallelizing unit under one of a plurality of energy settings, wherein
the plurality of energy settings includes a first energy setting suitable for transport of a low energy ion beam, and a second
energy setting suitable for transport of a high energy ion beam,

the power supply unit is configured to generate a potential difference in at least the acceleration lens under the second
energy setting and to generate a potential difference in at least the deceleration lens under the first energy setting, and

a curvature of the deceleration lens is smaller than a curvature of the acceleration lens.

US Pat. No. 9,564,289

ION IMPLANTER AND METHOD OF CONTROLLING THE SAME

Sumitomo Heavy Industries...

1. An ion implanter comprising:
a high-voltage power supply;
a control unit that generates a command signal controlling an output voltage of the high-voltage power supply;
an electrode unit to which the output voltage is applied; and
a measurement unit that measures an actual voltage applied to the electrode unit,
wherein
the control unit includes:
a first generation section that generates a first command signal for allowing the high-voltage power supply to output a target
voltage;

a second generation section that generates a second command signal for complementing the first command signal so that the
actual voltage measured by the measurement unit becomes the target voltage or a voltage close to the target voltage; and

a command section that brings to the high-voltage power supply a synthetic command signal which is produced by synthesizing
the first command signal and the second command signal, wherein

each of the first generation section and the second generation section includes a D/A (Digital to Analog) converter that converts
a digital command value into an analog command signal, and wherein

the command section brings to the high-voltage power supply the synthetic command signal which is produced by synthesizing
the first command signal obtained by D/A-converting a first command value corresponding to the target voltage and the second
command signal obtained by D/A-converting a second command value corresponding to a voltage value for complementing the actual
voltage into the target voltage or the voltage close to the target voltage.

US Pat. No. 9,373,481

HIGH-ENERGY ION IMPLANTER, BEAM COLLIMATOR, AND BEAM COLLIMATION METHOD

Sumitomo Heavy Industries...

1. A beam collimator of an ion implanter, comprising:
a plurality of acceleration and/or deceleration lens units that are arranged along a reference trajectory so that a beam collimated
to the reference trajectory comes out from an exit of the beam collimator; and

a vacuum container that surrounds the plurality of lens units,
wherein each of the plurality of lens units forms a bow-shaped curved gap defined by at least two electrode sections and is
formed such that an angle of a beam traveling direction with respect to the reference trajectory is changed by an electric
field generated in the bow-shaped curved gap,

wherein an electrode section on one side of one lens unit of the plurality of lens units and an electrode section on the other
side of a lens unit adjacent to the lens unit are formed to have the same potential, and

wherein a vacant space is provided between one lens unit of the plurality of lens units and a lens unit adjacent to the lens
unit, the vacant space being directed in a direction that perpendicularly intersects a beam collimation plane on the reference
trajectory, and an inner field containing the reference trajectory communicates, through the vacant space, with an outer field
formed between the vacuum container and the plurality of lens units.

US Pat. No. 9,208,991

ION IMPLANTATION APPARATUS

Sumitomo Heavy Industries...

1. An ion implantation apparatus including a scanning unit, the scanning unit comprising:
a scanning electrode device that allows a deflecting electric field to act on an ion beam incident along a reference trajectory
and scans the ion beam in a horizontal direction perpendicular to the reference trajectory, and

a downstream electrode device disposed downstream of the scanning electrode device and provided with openings through which
the ion beam scanned in the horizontal direction passes,

wherein the scanning electrode device includes a pair of scanning electrodes disposed to face each other in the horizontal
direction with the reference trajectory interposed therebetween, and

the downstream electrode device includes an electrode body configured such that, with respect to an opening width in a vertical
direction perpendicular to both the reference trajectory and the horizontal direction and/or an opening thickness in a direction
along the reference trajectory, the opening width and/or the opening thickness in a central portion in which the reference
trajectory is disposed is different from the opening width and/or the opening thickness in the vicinity of a position facing
a downstream end of the scanning electrode.

US Pat. No. 9,466,467

ION IMPLANTATION APPARATUS

Sumitomo Heavy Industries...

1. An ion implantation apparatus comprising:
a plurality of units for accelerating an ion beam generated in an ion source; and
a plurality of units for adjusting a scan beam and implanting ions into a wafer, wherein
a horizontal U-shaped loop-back type beamline having opposite long straight portions includes the plurality of units for adjusting
the scan beam in a long straight portion to have a length substantially identical to those of the ion source and the plurality
of units for accelerating the ion beam.

US Pat. No. 9,390,889

ION IMPLANTER AND METHOD OF ION BEAM TUNING

Sumitomo Heavy Industries...

1. An ion implanter comprising:
a radio frequency linear accelerator that accelerates supplied ions in accordance with an acceleration parameter;
an energy analysis magnet that is arranged downstream of the radio frequency linear accelerator;
an energy analysis slit assembly that is arranged downstream of the energy analysis magnet;
a beam measurement unit that measures a beam current amount at a downstream of the energy analysis slit assembly; and
a controller that determines the acceleration parameter for a predetermined implantation condition,
wherein the acceleration parameter is determined so that at least a part of the supplied ions is accelerated to have target
energy, and so that the beam current amount measured by the beam measurement unit is equivalent to a target beam current amount,

wherein the energy analysis slit assembly is configured to enable switching between a standard slit opening used for implantation
processing performed under the predetermined implantation condition and a high-precision slit opening having higher energy
precision than the standard slit opening and used to tune the acceleration parameter.

US Pat. No. 9,564,292

ION BEAM MEASURING DEVICE AND METHOD OF MEASURING ION BEAM

Sumitomo Heavy Industries...

1. An ion beam measuring device comprising:
a mask comprising a single plate-shaped member defining an xy plane that is perpendicular to an ion beam traveling direction,
the single plate-shaped member comprising a plurality of apertures configured to shape an original ion beam into a measuring
ion beam comprising at least one first y beam part and at least one second y beam part each elongated in a y direction that
is perpendicular to the ion beam traveling direction and at least one x beam part elongated in an x direction that is perpendicular
to the ion beam traveling direction and the y direction, the plurality of apertures including at least one first y slit and
at least one second y slit elongated in the y direction and shaping the at least one first y beam part and the at least one
second y beam part, respectively, and at least one x slit elongated in the x direction and shaping the at least one x beam
part, the at least one first and second y slits and the at least one x slit formed in the xy plane of the single plate-shaped
member, the mask located at a retreat position away from the original ion beam during ion implantation onto a substrate and
located at a measurement position to generate the measuring ion beam;

a detection unit configured to detect x-direction positions of the first and second y beam parts and a y-direction position
of the at least one x beam part, the detection unit comprising a moving detector arranged downstream of the mask in the ion
beam traveling direction and that is movable in at least the x direction so as to traverse the measuring ion beam, the moving
detector configured to detect the x-direction positions of the at least one first and second y beam parts, and a fixed detector
arranged downstream of the moving detector in the ion beam traveling direction, the fixed detector comprising an array of
detection elements arranged in the y direction and configured to detect the y-direction position of the at least one x beam
part based on a y-direction position at which the at least one x beam part arrives on the array of detection elements; and

a beam angle calculating unit that is configured to calculate an x-direction beam angle using the x-direction positions and
a y-direction beam angle using the y-direction position, wherein

the original ion beam is a scanned ion beam scanned over a scanning range extending in the x direction,
the at least one first y slit is located at a first end part of an irradiated region of the single plate-shaped member on
which the scanned ion beam is incident, the at least one second y slit is located at a second opposite end part of the irradiated
region, and the at least one x slit is located between the at least one first y slit and the at least one second y slit,

the at least one first y slit, the at least one second y slit, and the at least one x slit are arranged along the x direction
within the irradiated region of the single plate-shaped member.

US Pat. No. 9,412,561

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

Sumitomo Heavy Industries...

1. An ion implantation method for implanting ions into a wafer by scanning an ion beam in a reciprocating manner while reciprocating
the wafer in a direction perpendicular to a beam scanning direction, the ion implantation method comprising:
scanning the ion beam by outputting a reference control waveform to a beam scanner;
measuring an ion irradiation amount distribution of the ion beam in the beam scanning direction, wherein the ion beam is scanned
based on the reference control waveform;

generating a correction control waveform by using the measured ion irradiation amount distribution; and
irradiating the ion beam to the wafer by outputting the generated correction control waveform to the beam scanner, wherein
the ion beam is scanned based on the correction control waveform,

wherein the reference control waveform is a control waveform for scanning the ion beam so that a scanning speed distribution
indicating a change value of each beam position in time in the beam scanning direction at a wafer position becomes a first
scanning speed distribution and a scanning period becomes a first scanning period,

wherein the ion irradiation amount distribution indicates the distribution of the total ion irradiation amount of each beam
position in the beam scanning direction at the wafer position when scanning the ion beam over the wafer a predetermined number
of times in a reciprocating manner,

wherein the correction control waveform is a control waveform for scanning the ion beam so that the scanning speed distribution
becomes a second scanning speed distribution and a scanning period becomes a second scanning period,

wherein the second scanning speed distribution is a scanning speed distribution for scanning the ion beam so that the ion
irradiation amount distribution becomes a target distribution,

wherein the second scanning period is a scanning period that is adjusted so that the ion irradiation amount distribution per
unit time of the ion beam scanned by the second scanning speed distribution becomes a target value, and

wherein the generating the correction control waveform includes:
calculating the second scanning speed distribution by using the first scanning speed distribution and the measured ion irradiation
amount distribution; and

calculating the second scanning period by using the calculated second scanning speed distribution.

US Pat. No. 9,318,298

ION GENERATOR AND ION GENERATING METHOD

Sumitomo Heavy Industries...

1. An ion generator comprising:
an arc chamber that is at least partially made up of a material containing carbon;
a thermal electron emitter configured to emit thermal electrons into the arc chamber; and
a gas introducer configured to introduce a source gas and a compound gas into the arc chamber, wherein
the source gas to be introduced into the arc chamber contains a halide gas,
the compound gas to be introduced into the arc chamber contains a compound having carbon atoms and hydrogen atoms, and
the compound gas is hydrocarbon.

US Pat. No. 9,236,222

ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD

Sumitomo Heavy Industries...

1. An ion implantation apparatus comprising:
a beam scanning unit that has a scan origin in a central part of the beam scanning unit on a central axis of an incident ion
beam; and

a beam parallelizing unit arranged downstream of the beam scanning unit, the beam parallelizing unit that has a focal point
of a parallelizing lens at the scan origin,

wherein the ion implantation apparatus is configured such that a focal position of the incident ion beam into the beam scanning
unit is located upstream of the scan origin along the central axis of the incident ion beam, and

wherein the focal position of the incident ion beam toward the beam scanning unit is adjusted to be at a position upstream
of the scan origin along the central axis of the incident ion beam in such a manner that a divergence phenomenon caused by
a space charge effect in an exiting ion beam from the beam parallelizing unit is compensated.

US Pat. No. 9,576,771

HIGH ENERGY ION IMPLANTER, BEAM CURRENT ADJUSTER, AND BEAM CURRENT ADJUSTMENT METHOD

Sumitomo Heavy Industries...

1. A beam current adjuster for an ion implanter comprising:
a variable aperture device disposed at a focus point of an ion beam or a vicinity thereof to adjust a beam width of the ion
beam in a direction perpendicular to a focusing direction of the ion beam at the focus point in order to control an implanting
beam current.

US Pat. No. 9,281,160

INSULATION STRUCTURE AND INSULATION METHOD

Sumitomo Heavy Industries...

1. An insulation structure provided among a plurality of electrodes for extraction of an ion beam from a plasma generating
section, the plurality of electrodes comprising a first electrode and a second electrode to which different potential from
that of the first electrode is applied, the insulation structure comprising:
an insulation member comprising a first part connected to the first electrode and a second part connected to the second electrode
and configured to support the first electrode to the second electrode, the first part having a first circular end surface
on a side of the first electrode, the second part having a second circular end surface on a side of the second electrode,
the insulation member having a cylindrical side surface that connects the first end surface to the second end surface, the
cylindrical side surface having a recess formed thereon and positioned between the first end surface and the second end surface;

a first protection member surrounding at least a part of the first part to protect the first part from contamination particles;
and

a second protection member surrounding at least a part of the second part to protect the second part from contamination particles,
wherein

at least one of the first part and the second part is made of a machinable ceramic or a porous ceramic;
the first protection member is a first cover having a first cover end,
the second protection member is a second cover having a second contact portion and a second stepped side wall, the second
contact portion contacting the second part and sandwiched between the second part and the second electrode, the second stepped
side wall extending from the second contact portion toward the first electrode to form a pathway of the contamination particles
between the first cover and the second stepped side wall,

the second stepped side wall comprises a thin wall portion, a thick wall portion, and a step of the stepped side wall formed
between the thin wall portion and the thick wall portion, the thin wall portion surrounding the first cover end, the thick
wall portion extending from an outer circumferential portion of the second contact portion to the thin wall portion and terminating
at the step of the stepped side wall,

an exit of the pathway is formed between the first cover end and the step, the exit opposed to the recess.

US Pat. No. 9,208,983

ION GENERATION METHOD AND ION SOURCE

Sumitomo Heavy Industries...

1. An ion generation method using a direct current discharge ion source provided with an arc chamber formed of a high melting
point material, comprising:
generating ions by causing molecules of a source gas to collide with thermoelectrons in the arc chamber and inducing plasma
discharge;

extracting ions generated in the arc chamber from an opening;
causing radicals generated in generating ions to react with a liner in contact with an inner wall of the arc chamber and provided
to cover the inner wall of the arc chamber at least partially,

wherein the liner is formed of a material more reactive to radicals generated as the source gas is dissociated than the material
of the arc chamber, and

the arc chamber is provided, in a part of the arc chamber inner wall opposite to the opening, with a first exposed area not
covered by the liner, and provided, in a neighborhood of the opening, a second exposed area of the inner wall not covered
by the liner,

the liner is provided, in a part of the inner wall formed with the opening, with a lined part covering a neighborhood of the
second exposed area, and

the lined part is disposed between a plasma generated in the arc chamber and the inner wall formed with the opening.

US Pat. No. 9,139,978

SHOVEL

SUMITOMO HEAVY INDUSTRIES...

1. A shovel, comprising:
a turning drive unit,
the turning drive unit including
a turning electric motor;
a turning speed reducer configured to transmit a rotational driving force of the turning electric motor to a turnable body;
a brake unit configured to maintain the turnable body in a state where turning of the turnable body is stopped; and
a case forming a space in which the turning speed reducer and the brake unit are lubricated with lubricant oil and accommodated,
wherein a recess is formed in a part of the case that forms a bottom surface of the space.

US Pat. No. 9,390,890

HIGH-ENERGY ION IMPLANTER

Sumitomo Heavy Industries...

1. A high-energy ion implanter that accelerates an ion beam extracted from an ion source, transports the ion beam to a wafer
along a beamline, and implants the ion beam into the wafer, the high-energy ion implanter comprising:
a beam generation unit that includes an ion source and a mass analyzer;
a high-energy multi-stage linear acceleration unit that accelerates the ion beam so as to generate a high-energy ion beam;
a high-energy beam deflection unit that changes the direction of the high-energy ion beam toward the wafer;
a beam transportation unit that transports the deflected high-energy ion beam to the wafer; and
a substrate processing/supplying unit that uniformly implants the transported high-energy ion beam into the wafer,
wherein the beam transportation unit includes a beam shaper, a high-energy beam scanner, a high-energy electric field type
beam collimator, and a high-energy electric field type final energy filter,

wherein the high-energy ion beam emitted from the deflection unit is scanned and collimated by the beam scanner and the electric
field type beam collimator, mixed ions which are different in any one of a mass, an ion charge state, and energy are removed
by the high-energy electric field type final energy filter, and the resultant ions are implanted into the wafer, and

wherein the beam scanner is configured as an electric field type beam scanner that is operated in a finely adjustable triangular
wave.

US Pat. No. 9,108,516

WORKING MACHINE

SUMITOMO HEAVY INDUSTRIES...

1. A hybrid type construction machine comprising:
a running mechanism;
an upper rotation body which is rotatably disposed on the running mechanism;
a working motor which is driven by an operator's operation;
a first inverter circuit one end of which is connected to a terminal of the working motor;
a DC voltage converter one end of which is connected to the other end of the first inverter circuit, the DC voltage converter
includes a reactor;

an electrical storage device which is connected to the other end of the DC voltage converter; and
a first cooling liquid circulating system which includes a first heat exchanger and cools the reactor.

US Pat. No. 9,502,210

ION IMPLANTER, ION IMPLANTATION METHOD, AND BEAM MEASUREMENT APPARATUS

Sumitomo Heavy Industries...

1. An ion implanter comprising:
a beam deflector that deflects an ion beam incident through a previous stage beam path in a y direction by action of either
or both of an electric field and a magnetic field and emits the beam to pass through a subsequent stage beam path extending
in a z direction toward a wafer;

a beam filter slit that is disposed on the subsequent stage beam path between the beam deflector and the wafer, partially
shields the beam traveling through the subsequent stage beam path toward the wafer, and allows passage of a beam component
toward the wafer, the beam component having a predetermined trajectory among beam components of the beam passing through the
subsequent stage beam path;

a dose cup that is disposed between the beam deflector and the beam filter slit and measures a part of the beam exiting from
the beam deflector; and

a trajectory limiting mechanism that is disposed between the beam deflector and the dose cup and prevents a first beam component
having a first trajectory deviated from the predetermined trajectory, among beam components of the beam that exits from the
beam deflector and is directed toward the dose cup, from being incident to a measurement region of the dose cup,

wherein the trajectory limiting mechanism includes a first mask member comprising one or more first openings and a second
mask member comprising one or more second openings, the first mask member and the second mask member are disposed to face
each other in the z direction and prevent a second beam component having a second trajectory other than a third trajectory
capable of passing through both the first openings and the second openings from being incident to the measurement region of
the dose cup.

US Pat. No. 9,336,992

ION IMPLANTATION APPARATUS

Sumitomo Heavy Industries...

1. An ion implantation apparatus comprising:
a lens electrode unit that includes a plurality of electrode sections for parallelizing an ion beam; and
a vacuum unit that houses the lens electrode unit in a vacuum environment,
wherein the vacuum unit includes:
a first vacuum container having a first conductive container wall;
a second vacuum container having a second conductive container wall; and
an insulating container wall that connects the first vacuum container to the second vacuum container such that the first vacuum
container and the second vacuum container communicate with each other and the first conductive container wall is insulated
from the second conductive container wall,

wherein the ion implantation apparatus further comprises an insulating member that insulates at least one electrode section
among the plurality of the electrode sections from at least one of the first conductive container wall and the second conductive
container wall, and

wherein the insulating member is housed in the vacuum environment together with the lens electrode unit.

US Pat. No. 9,999,844

COLD TRAP

SUMITOMO HEAVY INDUSTRIES...

14. A cold trap provided between a vacuum chamber and a vacuum pump for the vacuum chamber, the vacuum chamber connected to the vacuum pump via an axially extending exhaust passage from an exhaust port of the vacuum chamber to an intake port of the vacuum pump, the cold trap comprising:a single stage refrigerator;
a cold panel comprising a cylindrical cold panel base axially extending along the axially extending exhaust passage and thermally coupled to the single stage refrigerator such that the cylindrical cold panel base is cryogenically cooled, the cylindrical cold panel base surrounding a center open cylindrical space forming part of the axially extending exhaust passage and allowing a gas evacuation flow from the exhaust port of the vacuum chamber to the intake port of the vacuum pump through the center open cylindrical space; and
a cold panel chamber comprising a cylindrical body part surrounding the cold panel and extending along the cylindrical cold panel base without physical contact with the cold panel and an outlet flange protruding radially outward from an axial end of the cylindrical body part which is closer to the vacuum pump,
wherein the cold panel comprises an expansion provided outside the cold panel chamber and the expansion is located in the vacuum chamber,
wherein the cylindrical cold panel base comprises a cylindrical extension that axially extends into the vacuum chamber, and the expansion is provided radially outward from the cylindrical extension,
wherein the expansion is mounted to the cylindrical cold panel base via an L-shaped support member having an L-shaped cross section,
wherein the cylindrical cold panel base and the expansion are mounted on a first surface of the L-shaped support member and a cooling stage of the single stage refrigerator is mounted to a second surface of the L-shaped support member, the second surface being opposite to the first surface.

US Pat. No. 9,293,295

ION IMPLANTATION APPARATUS, FINAL ENERGY FILTER, AND ION IMPLANTATION METHOD

Sumitomo Heavy Industries...

1. An ion implantation apparatus comprising:
an ion implantation processing chamber adapted to irradiate a workpiece with an ion beam having an intended energy;
a beamline exit arranged upstream of the ion implantation processing chamber; and
a final energy filter arranged between the beamline exit and the workpiece,
the final energy filter comprising:
a first adjustment electrode portion that adjusts a beam shape of the ion beam, the first adjustment electrode portion being
arranged downstream of the beamline exit;

an intermediate electrode portion that deflects the ion beam, the intermediate electrode portion being arranged downstream
of the first adjustment electrode portion;

a second adjustment electrode portion that adjusts the beam shape of the ion beam, the second adjustment electrode portion
being arranged downstream of the intermediate electrode portion; and

a power supply unit that applies voltages separately to the first adjustment electrode portion, the intermediate electrode
portion and the second adjustment electrode portion, respectively, in a manner such that one of deceleration, acceleration
and iso-energetic transportation of the ion beam is carried out between the first adjustment electrode portion and the intermediate
electrode portion, and such that one of deceleration, acceleration and iso-energetic transportation of the ion beam is carried
out between the intermediate electrode portion and the second adjustment electrode portion,

wherein the intermediate electrode portion comprises:
a deflection electrode portion;
an upstream auxiliary electrode portion arranged between the first adjustment electrode portion and the deflection electrode
portion; and

a downstream auxiliary electrode portion arranged between the deflection electrode portion and the second adjustment electrode
portion,

wherein the power supply unit applies voltages to the upstream auxiliary electrode portion, the deflection electrode portion
and the downstream auxiliary electrode portion, respectively, such that a first energy range of the ion beam in a first region
between the upstream auxiliary electrode portion and the deflection electrode portion is approximately equal to a second energy
range of the ion beam in a second region between the deflection electrode portion and the downstream auxiliary electrode portion.

US Pat. No. 9,331,545

ROTATION APPARATUS INCLUDING MOTOR AND SPEED REDUCER

SUMITOMO HEAVY INDUSTRIES...

1. A rotation apparatus including a motor and a speed reducer,
wherein the speed reducer includes a casing, an internal gear that is integrated with the casing, a planetary gear that is
internally engaged with the internal gear, and a carrier body that is supported by the casing via a bearing,

wherein the motor and the speed reducer are connected with each other via an adapter,
wherein the adapter includes a motor-fixed surface that is fixed to the motor, a carrier-fixed surface that is fixed to the
carrier body, and an externally fixed surface that is not parallel with the carrier-fixed surface and is fixed to an external
member,

wherein a driven member is connected to the casing,
wherein the casing and the driven member rotate integrally with each other,
wherein the driven member, the speed reducer, and the externally fixed surface are overlapped with each other when viewed
from a radial direction of the speed reducer, and

wherein the driven member is rotated within a range of 180 degrees.

US Pat. No. 9,382,691

HYBRID WORK MACHINE AND METHOD OF CONTROLLING SAME

SUMITOMO HEAVY INDUSTRIES...

1. A hybrid work machine, comprising:
a turning electric motor configured to turn an upper-part turning body;
a hydraulic actuator; and
a controller including
a processor; and
a memory storing a program that, when executed by the processor, causes the controller to control turning in a state of an
independent turning operation in which the turning electric motor operates with the hydraulic actuator being held stationary
and in a state of a combined turning operation in which the turning electric motor and the hydraulic actuator operate together,

wherein the controller is caused to detect a transition from the state of the combined turning operation to the state of the
independent turning operation, and in response to detecting the transition, limit an output power of the turning electric
motor in the state of the independent turning operation after the transition to a value smaller than an output power of the
turning electric motor in the state of the independent turning operation that is not after the transition.

US Pat. No. 9,220,923

ACCELERATED PARTICLE IRRADIATION EQUIPMENT

SUMITOMO HEAVY INDUSTRIES...

1. Particle radiation therapy equipment comprising:
a particle accelerator configured to generate accelerated particles;
a rotating gantry having a rotating unit and an irradiation unit, the rotating unit is rotatable about a rotation axis, the
irradiation unit is disposed on the rotating unit and irradiates the accelerated particles;

a guide line configured to guide the accelerated particles generated by the particle accelerator to the rotating gantry; and
a building having a main building portion and a sub-building portion disposed adjacent to the main building portion in a lateral
direction, both the main building portion and the sub-building portion have a multi-story structure with a plurality of stories
continuing in a vertical direction with respect to each other, wherein the main building portion has a wall portion which
is thicker than that of the sub-building portion,

wherein the main building portion has an accelerator chamber and a gantry chamber, the particle accelerator is installed in
the accelerator chamber and the rotating gantry is installed in the gantry chamber, the main building portion having the guide
line installed therein,

wherein the gantry chamber is installed on at least one of upper and lower floors of a floor on which the accelerator chamber
is installed, and

wherein the sub-building portion includes a power source chamber, and a power-supply equipment is disposed in the power source
chamber.

US Pat. No. 9,090,016

INJECTION MOLDING MACHINE

SUMITOMO HEAVY INDUSTRIES...

1. An injection molding machine, comprising:
a first friction member;
a second friction member, the first and second friction members being connected to move relative to each other;
a screw coupled to one of the first friction member and the second friction member;
a base;
a plasticizing motor coupled to the other of the first friction member and the second friction member, the plasticizing motor
configured to rotate the screw, the plasticizing motor not being movable relative to the base;

an expandable/retractable member provided in a periphery of the first and second friction members and including first and
second end parts;

a first attachment member attached to the first end part;
a second attachment member attached to the second end part, one of the first and second attachment members being fixed to
the base, the other of the first and second attachment members being movable with respect to the base along an axial direction
of the screw; and

an injection motor configured to move the screw with respect to the base by way of the one of the first and second friction
members coupled to the screw, the injection motor being fixed to the other of the first and second attachment members movable
with respect to the base along the axial direction of the screw, the injection motor being configured to move together with
the other of the first and second attachment members movable with respect to the base along the axial direction of the screw,

wherein a lubricating oil is fed to an area between first and second friction members,
wherein a position of the second attachment member relative to the first attachment member is displaced in cooperation with
a position of the second friction member relative to the first friction member,

wherein the expandable/retractable member is configured to form a reservoir space that stores the lubricating oil in the periphery
of the first and second friction members,

wherein the expandable/retractable member is configured to expand/retract in correspondence with an interval between the first
and second attachment members.

US Pat. No. 9,520,265

ION IMPLANTATION APPARATUS

Sumitomo Heavy Industries...

1. An ion implantation apparatus comprising:
a three-stage quadrupole lens system that is used to adjust beam focusing and defocusing, the three-stage quadrupole lens
system being placed in a beam transport unit casing,

wherein the three-stage quadrupole lens system is constructed of three quadrupole lenses, linearly arranged, having an identical
central axis,

wherein the three-stage quadrupole lens system is formed such that lens bore diameters increase in stages, and lens lengths
of the three quadrupole lenses are set separately,

wherein the three-stage quadrupole lens system is configured such that a beam transport of an ion beam along a beamline in
the beam transport unit casing is achieved, the beam transport being such that a diameter of the ion beam entering the three-stage
quadrupole lens system is increased in a vertical direction and/or a horizontal direction toward a downstream side of the
beamline and the ion beam exits from the three-stage quadrupole lens system, and

wherein a power supply unit of the three-stage quadrupole lens system includes:
a separate power supply, configured to control a first quadrupole lens independently of a second quadrupole lens and a third
quadrupole lens, connected between the first quadrupole lens and a reference potential of the beam transport unit casing,

a common power supply, configured commonly for the second and third quadrupole lenses, connected between the second and third
quadrupole lenses and the reference potential of the beam transport unit casing,

wherein the ion implantation apparatus further comprises a controller configured to control the power supply unit, and comprising
a plurality of beam transport setting configurations including:

a defocusing beam transport setting configuration configured such that the ion beam exiting from the three-stage quadrupole
lens system is focused in a first direction and defocused in a second direction perpendicular to the first direction, and

a focusing beam transport setting configuration configured such that the ion beam exiting from the three-stage quadrupole
lens system is focused in the first direction and focused in the second direction,

wherein the controller is further configured to select one of the plurality of beam transport setting configurations according
to a state of the ion beam, and to control the power supply unit according to the selected beam transport setting configuration,
and

wherein the defocusing beam transport setting configuration comprises a first on-off and/or voltage setting configured such
that the separate power supply applies a voltage to the first quadrupole lens only, and the focusing beam transport setting
comprising a second on-off and/or voltage setting configured such that the separate power supply and the common power supply
apply voltages to the first, second, and third quadrupole lenses.

US Pat. No. 9,134,048

REGENERATIVE REFRIGERATOR AND PARTITIONING MEMBER

SUMITOMO HEAVY INDUSTRIES...

1. A regenerative refrigerator, comprising:
a cylinder configured to cause a refrigerant gas to expand;
a regenerator containing a regenerator material and configured to accumulate, in the regenerator material, cold heat generated
in the cylinder with expansion of the refrigerant gas; and

a partitioning member provided in the regenerator and partitioning off the regenerator material,
the partitioning member including
a layered body including a filter member and a reinforcing member stacked in multiple layers, the filter member being configured
to prevent passage of the regenerator material and to allow passage of the refrigerant gas, the reinforcing member being configured
to reinforce the filter member; and

a ring member including
a body part that has a center opening formed therein and includes an outer circumferential surface fitting with an inner cylindrical
surface of the regenerator; and

a claw part provided on the body part on one side thereof in a stacking direction of the layered body,
wherein the body part is a single unit including
a placement part on which the layered body is placed to close the center opening; and
a surrounding part that extends from the placement part and surrounds an outer circumferential surface of the layered body
placed on the placement part without a peripheral edge portion of the layered body being exposed on an outer circumferential
surface of the partitioning member, the surrounding part having an outer circumferential surface fitting with the inner cylindrical
surface of the regenerator,

wherein the claw part and the body part including the placement part form one single unit, and
wherein the peripheral edge portion of the layered body is held tight from first and second opposite sides of the layered
body in the stacking direction thereof by the claw part and the placement part.

US Pat. No. 9,666,413

ION IMPLANTATION APPARATUS AND CONTROL METHOD FOR ION IMPLANTATION APPARATUS

SUMITOMO HEAVY INDUSTRIES...

1. An ion implantation apparatus comprising:
a vacuum processing chamber in which an ion implantation process for a wafer is performed by irradiating an ion beam on the
wafer;

one or more load lock chambers that are used for bringing the wafer into the vacuum processing chamber and taking out the
wafer from the vacuum processing chamber;

an intermediate conveyance chamber that is disposed to be adjacent to both the vacuum processing chamber and the load lock
chamber;

an intermediate conveyance mechanism that is disposed in the intermediate conveyance chamber and performs wafer conveyance
between the load lock chamber and the intermediate conveyance chamber and wafer conveyance between the intermediate conveyance
chamber and the vacuum processing chamber;

a load lock chamber-intermediate conveyance chamber communication mechanism that includes a load lock chamber-intermediate
conveyance chamber communication port for communication between the load lock chamber and the intermediate conveyance chamber
and a gate valve capable of sealing the load lock chamber-intermediate conveyance chamber communication port;

an intermediate conveyance chamber-vacuum processing chamber communication mechanism that includes an intermediate conveyance
chamber-vacuum processing chamber communication port for communication between the intermediate conveyance chamber and the
vacuum processing chamber and a movable shielding plate capable of shielding a part or the whole of the intermediate conveyance
chamber-vacuum processing chamber communication port;

a beam stopper disposed at a position in the vacuum processing chamber such that, in a case where the wafer is not present
in a beam trajectory of the ion beam, the ion beam is incident onto the beam stopper;

a first evacuation device connected to the vacuum processing chamber at a position different from the intermediate conveyance
chamber-vacuum processing chamber communication port; and

a beamline device that is disposed upstream of the vacuum processing chamber and that guides an ion beam irradiated on the
wafer to the vacuum processing chamber,

wherein the load chamber-intermediate conveyance chamber communication port and the intermediate conveyance chamber-vacuum
processing chamber communication port are disposed for carrying the wafer through the communication ports,

wherein the intermediate conveyance chamber is adjacent to the vacuum processing chamber in a direction in which the vacuum
processing chamber and the beamline device are aligned, and

wherein the intermediate conveyance chamber-vacuum processing chamber communication port is disposed on an upper side of the
beam stopper so as to deviate from the beam trajectory.

US Pat. No. 9,227,352

INJECTION MOLDING MACHINE

SUMITOMO HEAVY INDUSTRIES...

1. An injection molding machine comprising:
an ejector unit configured to be disposed at a platen supporting a mold and eject a molding product from the mold,
wherein the ejector unit includes
a toggle support disposed at the platen supporting the mold;
a slide base configured to move relative to the toggle support;
a toggle mechanism configured to be disposed between the toggle support and the slide base;
a driving source configured to operate the toggle mechanism;
an ejection member movable in conjunction with the slide base; and
a transmission mechanism to convert rotational motion generated by an electric motor as the driving source into linear motion
to transmit to the toggle mechanism.

US Pat. No. 9,216,648

WHEEL DRIVING DEVICE

SUMITOMO HEAVY INDUSTRIES...

1. A wheel driving device comprising an injection passage member of a medium injected into a wheel, the wheel driving device
configured to drive the wheel by output rotation of a reduction device disposed on an inside in a radial direction of the
wheel,
wherein the reduction device includes an output member connected to the wheel, and a pair of bearings supporting the output
member,

wherein in the pair of bearings, the bearing on a side opposite to a vehicle body has a smaller outer diameter than that of
the bearing on a vehicle body side,

wherein the injection passage member is disposed on an outside in a diameter direction of the bearing on the side opposite
to the vehicle body,

wherein the bearing on the side opposite to the vehicle body and the injection passage member are overlapped when they are
viewed from a radial direction, and

wherein the bearing on the side opposite to the vehicle body is smaller than the bearing on the vehicle body side in a contact
angle.

US Pat. No. 9,659,749

BEAM EXTRACTION SLIT STRUCTURE AND ION SOURCE

SUMITOMO HEAVY INDUSTRIES...

1. A beam extraction slit structure of an ion source plasma chamber adjacent to an extraction electrode, the extraction electrode
positioned across a gap from an elongated slit of the beam extraction slit structure in a beam extraction direction, the elongated
slit arranged along a slit longitudinal direction perpendicular to the beam extraction direction, the beam extraction slit
structure comprising:
a plasma chamber interior surface that is, in operation, in contact with a plasma;
a plasma chamber exterior surface that faces the extraction electrode; and
an elongated slit surface that extends from the interior surface to the exterior surface in the beam extraction direction
to define the elongated slit, the elongated slit surface including a plasma meniscus fixing part formed in a center of the
elongated slit in the slit longitudinal direction to fixingly maintain a plasma meniscus of the plasma and a plasma meniscus
non-fixing part formed in an end of the elongated slit in the slit longitudinal direction to movably maintain the plasma meniscus
of the plasma in the beam extraction direction.

US Pat. No. 9,252,641

POWER TRANSMISSION DEVICE

SUMITOMO HEAVY INDUSTRIES...

1. A power transmission device comprising:
a motor including a rotor having a first axial side, a second axial side opposite the first axial side, a permanent magnet
embedded therein and a stator, and configured to generate a rotational force;

a reducer configured to transmit the rotational force of the motor; and
a wet brake mechanism provided on the first axial side of the rotor and configured to brake the rotation of the motor,
wherein spaces accommodating the motor, the reducer, and the wet brake mechanism communicate with each other so that lubricant
oil can flow through the spaces, and

wherein a leakage magnetic flux at a second axial end face on the second axial side of the rotor is greater than a leakage
magnetic flux at a first axial end face on the first axial side of the rotor having the wet brake mechanism.

US Pat. No. 9,217,776

BATTERY INSPECTION APPARATUS

SUMITOMO HEAVY INDUSTRIES...

1. A battery inspection apparatus for use in a factory comprising:
a battery inspection table that is installable in a room of the factory, the battery inspection table including a plurality
of inspection units each for inspecting a rechargeable battery and a moving mechanism provided in the inspection table to
cause a relative movement between the inspection units and the battery;

an automatic conveyance system that is installable in the room of the factory to convey the battery to and from the moving
mechanism of the battery inspection table; and

a controller that is installable in another or the same room of the factory and provided separately from the battery inspection
table, the controller configured to control the battery inspection table, wherein

each of the inspection units includes: a contactor for inspection configured to contact a corresponding battery by the relative
movement; and a measurement circuit that is connected to the contactor and configured to generate an analog measured signal
by measuring at least one of a current, voltage, and temperature, based on an input from the contactor, and wherein

the battery inspection table has at least one communication unit mounted therein, the communication unit being configured
to convert the analog measured signal generated by each of the inspection units into a digital signal to output to a common
digital communication line, and the digital communication line connects the communication units and the controller together.

US Pat. No. 9,322,886

ANALYZER

SUMITOMO HEAVY INDUSTRIES...

1. An analyzer, comprising:
a magnetic moment association unit operative to associate a particle in a particle system defined in a virtual space with
a magnetic moment;

a numerical operation unit operative to perform numerical operation according to a governing equation that governs a motion
of each particle in the particle system and that is described by using the spherical symmetry of each particle, the particle
system including the particle which is associated with the magnetic moment by the magnetic moment association unit; and

a magnetic physical quantity calculation unit operative to calculate a magnetic physical quantity with regard to the particle
system using the results of the numerical operation performed by the numerical operation unit;

wherein the particle system defined in a virtual space is obtained by discretizing a magnetic continuum to be analyzed by
particles; and

wherein the numerical operation unit is operative to perform the numerical operation according to the governing equation by
using a demagnetizing coefficient of a spherical magnetic body.

US Pat. No. 9,440,165

CRYOPUMP AND METHOD FOR REGENERATING THE CRYOPUMP

Sumitomo Heavy Industries...

1. A cryopump comprising:
a cryopanel having an adsorption region for adsorbing gas molecules;
a cryopump housing arranged to enclose the cryopanel;
a rough valve configured to connect the cryopump housing to a roughing pump;
a pressure sensor configured to measure an internal pressure in the cryopump housing;
a control unit configured to control a stopped period of the pressure sensor and regeneration of the cryopanel;
wherein the stopped period comprises a period during which no current flows through a filament of the pressure sensor;
wherein the control unit is further configured to set the stopped period for an initial stage of the regeneration and causes
the rough valve to open for rough evacuation of the cryopump housing at least once during the stopped period;

a temperature sensor configured to measure a temperature of the cryopanel,
wherein the control unit executes a heating control of the cryopanel, in the initial stage, toward a target temperature higher
than a temperature at which adsorbed as molecules are released from the adsorption region,

wherein the control unit executes the rough evacuation, during the heating control, when a temperature measured by the temperature
sensor exceeds the temperature at which adsorbed gas molecules are released,

wherein the stopped period begins immediately before a start of the regeneration and ends after a rough evacuation has been
completed, and

wherein the rough evacuation is completed by closing the rough valve.

US Pat. No. 9,388,880

SIMPLE PLANETARY REDUCTION GEAR

Sumitomo Heavy Industries...

1. A simple planetary reduction gear comprising:
a motor; and
a simple planetary mechanism including a sun gear which is connected to a motor shaft of the motor, a planetary gear which
is supported by a carrier, and an internal gear with which the planetary gear internally meshes,

wherein the simple planetary reduction gear is used in a vertically installed state,
wherein the sun gear includes a shaft portion which protrudes to a load side coaxially with a shaft center of the sun gear,
wherein the shaft portion is supported by a bearing which is disposed between an outer circumference of the shaft portion
and an inner circumference of the carrier,

wherein the internal gear is integrated with a casing of the simple planetary reduction mechanism,
wherein an air vent port provided in the casing and an air vent passage which causes the air vent port and an upper space
of the simple planetary reduction mechanism to communicate with each other are provided,

wherein the casing is divided into at least a first member and a second member, and
wherein the air vent passage is not directly opened to the upper space of the simple planetary reduction mechanism and communicates
with the upper space of the simple planetary reduction mechanism via a gap between the first member and the second member.

US Pat. No. 9,318,768

SHOVEL

SUMITOMO HEAVY INDUSTRIES...

1. A shovel comprising:
a lower traveling body;
an upper rotating body rotatably attached to the lower traveling body; and
an electricity storage module mounted on the upper rotating body,
wherein the electricity storage module includes a plurality of electricity storage cells each having at least a pair of electrodes
led out from edges of a plate-like portion in a first direction,

wherein the electricity storage cells are stacked in a thickness direction of the plate-like portions, and are connected in
series by bringing the electrodes of the electricity storage cells adjacent to each other in a stack direction into contact
with each other,

wherein the electrodes of each of the electricity storage cells are attached to the plate-like portion at a position deviated
closer to a dorsal surface, which is one surface, than the central position of the plate-like portion in the thickness direction,

wherein the electricity storage cells adjacent to each other are arranged in the stack direction of the electricity storage
cells in a posture where the dorsal surfaces face each other or in a posture where ventral surfaces opposite the dorsal surfaces
face each other, and

wherein the electrodes that electrically connect the two electricity storage cells of which the dorsal surfaces face each
other are in contact with each other at mutually facing surfaces of the electrodes.

US Pat. No. 9,325,222

LINEAR MOTOR COOLING STRUCTURE

SUMITOMO HEAVY INDUSTRIES...

1. A linear motor cooling structure for cooling a coil constituting a driving section of a linear motor, comprising:
a flat plate cooling section which forms a flow path for cooling water for cooling the coil inside between a plurality of
flat plate members by overlapping the plurality of flat plate members,

wherein a space is formed between the plurality of flat plate members by joining a flat plate surface of a first flat plate
member to a surface on a side of a second flat plate member having a concave part so as to cover the concave part; and

a plurality of flow paths for the cooling water formed in the space,
wherein the flat plate cooling section includes an inflow opening for inflow of the cooling water and an outflow opening for
outflow of the cooling water, which are respectively provided at both ends thereof,

wherein the plurality of flow paths are separated via a partition portion with respect to adjacent flow paths, and the flat
plate cooling section has a plurality of the inflow openings and a plurality of the outflow openings, with respect to each
of the flow path, wherein the concave part extends from the plurality of inflow openings to the plurality of outflow openings,

wherein the plurality of inflow openings and the plurality of outflow openings have a width in a vertical direction that is
smaller than the width in the vertical direction of the concave part of the second flat plate, and

wherein the flat plate cooling section comes into close contact with the coil.

US Pat. No. 9,377,098

POWER TRANSMISSION DEVICE AND MANUFACTURING METHOD THEREOF

SUMITOMO HEAVY INDUSTRIES...

1. A power transmission device comprising:
a gear speed reduction mechanism which includes an input shaft, an input pinion provided on the input shaft, a rotary shaft
other than the input shaft, and a gear incorporated to the rotary shaft, wherein the gear is integral to the rotary shaft
or is fixedly attached to the rotary shaft; and

a casing which accommodates the gear speed reduction mechanism,
wherein the casing is made of resin and includes a casing body which includes an incorporating opening for incorporating the
gear and a cover which closes the incorporating opening,

wherein the casing body includes an input side opening with the opening being a size that the input pinion can be inserted
but the gear cannot be inserted, and

wherein the rotary shaft is supported by a bearing which is supported by the casing body, and the bearing of the rotary shaft
is not formed on the cover,

wherein a recess is formed in an inner end side of the incorporating opening, and the cover also closes the recess,
wherein a ring-like stiffened member made of metal is disposed in the recess,
wherein the input side opening and the incorporating opening are provided on opposite surfaces of the casing body respectively,
wherein a recess is formed in the cover, and a portion of the gear enters the recess, and
wherein the ring-like stiffened member is in contact with the cover.

US Pat. No. 9,837,248

ION IMPLANTATION APPARATUS AND METHOD OF CONTROLLING ION IMPLANTATION APPARATUS

SUMITOMO HEAVY INDUSTRIES...

1. An ion implantation apparatus comprising:
an interruption member that interrupts an ion beam in the middle of a beam line;
a plasma shower device that is provided at the downstream side of the interruption member in the beam line; and
a control unit that causes the interruption member to interrupt the ion beam during an ignition start period of the plasma
shower device such that the ion beam is interrupted before a vacuum degree is degraded in the vicinity of the plasma shower
device.

US Pat. No. 9,088,027

POWER STORAGE MODULE, MANUFACTURING METHOD THEREOF, AND WORKING MACHINE

SUMITOMO HEAVY INDUSTRIES...

1. A power storage module comprising:
a plurality of cell units which are stacked; and
a pressurizing mechanism which applies a compressive force in a stacked direction to a stacked structure of the cell units,
wherein each of the cell units includes:
a power storage cell, which includes a pair of electrode tabs; and
a frame body which supports the power storage cell,
wherein the frame body includes a positioning portion and a screwing portion, the positioning portion restraining a relative
position with respect to a direction perpendicular to the stacked direction of the frame bodies adjacent in the stacked direction,
the screwing portion being formed on a surface of an outer circumference side of the frame body,

wherein the positioning portion includes a structure which positions the frame bodies with respect to the direction perpendicular
to the stacked direction and leaves a margin in a direction in which the frame bodies are closer in the stacked direction
in a state where the compressive force is applied to the stacked structure due to pressurization through the pressurizing
mechanism, and

wherein the electrode tab of the power storage cell and the electrode tab of the adjacent power storage cell are laminated
with each other and fixed to the frame body at the screwing portion.

US Pat. No. 9,260,250

GEAR MOTOR HAVING AN ANTIROTATION MEMBER

SUMITOMO HEAVY INDUSTRIES...

1. A gear motor comprising:
a motor;
a decelerator;
an output shaft of the decelerator coupled to a driven shaft of a driven machine; and
an antirotation member for preventing rotation of the gear motor around the driven shaft,
wherein the antirotation member is located at a position offset from the center of the output shaft of the decelerator at
which it is possible to limit rotation of the gear motor, and the antirotation member includes a first elastic member on a
side facing the gear motor,

wherein the decelerator is configured to provide perpendicular deceleration,
wherein the first elastic member faces the motor,
wherein the antirotation member includes a first antirotation plate disposed on the rotational trajectory of the motor around
the driven shaft, and the first elastic member is sandwiched between the first antirotation plate and the motor.

US Pat. No. 9,905,397

ION IMPLANTATION APPARATUS AND SCANNING WAVEFORM PREPARATION METHOD

SUMITOMO HEAVY INDUSTRIES...

1. An ion implantation apparatus comprising:
a beam scanner that provides reciprocating beam scanning in a beam scanning direction in accordance with a scanning waveform;
a mechanical scanner that reciprocates a substrate in a mechanical scanning direction;
a controller that controls the beam scanner and the mechanical scanner such that a target two-dimensional non-uniform dose
amount distribution is provided on a surface of the substrate; and

a beam current measurer that measures a beam current intensity distribution in the beam scanning direction at a downstream
of the beam scanner,

wherein the controller includes:
a target setting unit that converts the target two-dimensional non-uniform dose amount distribution into a plurality of target
dose amount distributions each of which is a dose amount distribution in the beam scanning direction and which are formed
in different positions from each other in the mechanical scanning direction; and

a beam scanner driving unit that obtains scanning waveforms corresponding to the plurality of target dose amount distributions
from an implantation scanning waveform database, selects one of the obtained scanning waveforms in accordance with a position
of the substrate in the mechanical scanning direction, and drives the beam scanner with use of the selected scanning waveform,

wherein the plurality of target dose amount distributions include at least one target non-uniform dose amount distribution,
and

wherein the controller further includes a scanning waveform preparing unit that determines whether or not a measured beam
current intensity distribution measured by the beam current measurer with use of a given scanning waveform fits the target
non-uniform dose amount distribution, and that, in a case of fitting, correlates the given scanning waveform with the target
non-uniform dose amount distribution and stores the scanning waveform into the implantation scanning waveform database.

US Pat. No. 9,085,445

WINCH BRAKING DEVICE

Hitachi Sumitomo Heavy In...

1. A winch braking device, comprising:
a brake that is configured to brake a winch drum;
a brake pedal disposed at a vehicle body so as to allow a foot operation to be performed thereat;
a reaction force-imparting element that imparts a reaction force to the brake pedal;
a rotation link that rotates by interlocking with the foot operation at the brake pedal;
a brake valve linked to the rotation link, that applies a secondary pressure to the brake in response to the foot operation
at the brake pedal, and that comprises a valve spring; and

a tension spring, with one end thereof attached to the vehicle body at a predetermined position and another end thereof attached
to the rotation link, that applies a force to the brake pedal along a direction opposite a direction of the foot operation,
wherein:

the winch braking device is configured so that as the foot operation is performed at the brake pedal, the tension spring extends
and a shortest distance between a rotational center of the rotation link and a central axis of the tension spring becomes
smaller;

the winch braking device is configured so that uniformity is achieved in a total torque representing a sum of a brake valve
reaction torque occurring as a reaction force attributable to the valve spring of the brake valve, which corresponds to the
foot operation at the brake pedal, is applied to the rotation link, and a tension spring reaction torque occurring as a reaction
force attributable to the tension spring, which corresponds to the foot operation at the brake pedal, is applied to the rotation
link, by canceling out change characteristics of the brake valve reaction torque with change characteristics of the tension
spring reaction torque; and

a brake pedal force is determined by a sum of a brake reaction force attributable to the reaction force-imparting element
and a brake reaction force corresponding to the total torque.

US Pat. No. 9,255,364

IMAGE GENERATING APPARATUS FOR PAVING MACHINE AND OPERATION SUPPORT SYSTEM FOR PAVING MACHINE

SUMITOMO HEAVY INDUSTRIES...

1. An image generating apparatus for a paving machine, the image generating apparatus generating an output image based on
input images captured by a plurality of image capturing parts attached to the paving machine, the image generating apparatus
comprising:
a coordinates correlating part configured to correlate coordinates in a space model disposed around the paving machine with
coordinates in input image planes in which the input images are positioned; and

an output image generating part configured to generate the output image by correlating values of the coordinates in the input
image planes with values of coordinates in an output image plane in which the output image is positioned, via the coordinates
in the space model,

wherein the space model includes a first plane area parallel to a road surface and a second plane area that intersects the
road surface, and

wherein the second plane area is set at a front end of the paving machine in a traveling direction of the paving machine.

US Pat. No. 9,366,459

CRYOGENIC REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A cryogenic refrigerator comprising:
a compressor having a return end and a suction end that selectively connects to an expansion space;
a housing having an assist space that communicates to the return end;
a cylinder having one end connected to the housing and another end connected to the expansion space;
a displacer that undergoes a reciprocating motion inside the cylinder, and tolerates flow of a working gas to and from the
expansion space via a gas channel provided inside the displacer; and

a drive shaft that extends in an axial direction and is accommodated within the housing and drives the displacer,
wherein the drive shaft includes a first shaft part that extends in the axial direction and is sealed and supported by a first
seal member that is formed by a slipper seal, and a second shaft part that extends in the axial direction and is sealed and
supported by a second seal member, the first shaft part having an end opposing the housing to form the assist space, the second
shaft part having an end connecting to the displacer, and

wherein a first cross sectional area of the first shaft part passing through the first seal member and a second cross sectional
area of the second shaft part passing through the second seal member are mutually different.

US Pat. No. 9,984,856

ION IMPLANTATION APPARATUS

SUMITOMO HEAVY INDUSTRIES...

1. An ion implantation apparatus configured to perform a plurality of ion implantation processes having different implantation conditions to a same wafer successively, the ion implantation apparatus comprising:an energy adjusting mechanism that enables adjustment of implantation energy of an ion beam;
a beam scanner that causes the ion beam to scan in a reciprocating manner in a predetermined scanning direction;
a measuring instrument that measures a beam current density distribution in the scanning direction of the ion beam that scans in the reciprocating manner;
a platen movement device that holds a wafer so that the ion beam that scans in the reciprocating manner is irradiated to a wafer surface to be processed; and
a control device that determines a scanning parameter of the beam scanner based on a measurement result of the measuring instrument so that the beam current density distribution corresponds to a target value set in an implantation condition, and that performs each of the ion implantation processes, wherein
the platen movement device includes a reciprocating movement mechanism that causes the wafer to reciprocate in a reciprocating movement direction perpendicular to the scanning direction, a twist angle adjustment mechanism that adjusts a twist angle between an alignment mark provided at an outer circumferential portion of the wafer and a reference position by rotating the wafer around a normal line of the wafer surface to be processed, and a tilt angle adjustment mechanism that adjusts a tilt angle between a traveling direction of the ion beam toward the wafer surface to be processed and the normal line of the wafer surface to be processed, wherein
the plurality of ion implantation processes are: (a) provided with respective implantation conditions so that twist angles of the wafer differ from each other; (b) configured so that the ion beam that scans in the reciprocating manner is irradiated to the wafer surface to be processed that moves in the reciprocating movement direction; and (c) provided with the respective implantation conditions so that a target value of the beam current density distribution of the ion beam that is irradiated to the wafer surface to be processed is variable in accordance with a position of the wafer in the reciprocating movement direction, wherein,
before performing the plurality of ion implantation processes to the same wafer successively, the control device executes a setup process in which a plurality of scanning parameters corresponding to a plurality of target values of the beam current density distributions set as the respective implantation conditions of the plurality of ion implantation processes are determined collectively, wherein
the control device includes a setting unit that receives setting of the respective implantation conditions of the plurality of ion implantation processes, a determination unit that determines the plurality of scanning parameters in accordance with the respective implantation conditions set in the setting unit, a storage unit that stores the plurality of scanning parameters determined by the determination unit, and an execution unit that executes the plurality of ion implantation processes by controlling the beam scanner in accordance with the plurality of scanning parameters stored in the storage unit, wherein
the determination unit collectively determines in the setup process the plurality of scanning parameters based on measurement results of the measuring instrument and causes the plurality of scanning parameters determined to be stored in the storage unit, and wherein,
after the plurality of scanning parameters are collectively determined, the execution unit executes the plurality of ion implantation processes to the same wafer successively in accordance with the plurality of scanning parameters stored in the storage unit.

US Pat. No. 9,404,486

CRYOPUMP, CRYOPANEL STRUCTURE, AND VACUUM EVACUATION METHOD

Sumitomo Heavy Industries...

1. A cryopump comprising:
a radiation shield comprising a shield front end that defines a shield opening, a shield bottom portion that faces the shield
opening, and a shield side portion that extends from the shield front end to the shield bottom portion; and

a cryopanel assembly configured to be cooled to a temperature that is lower than that of the radiation shield, the assembly
comprising a plurality of cryopanels arranged along a direction toward the shield bottom portion from the shield opening,

wherein the plurality of cryopanels comprises:
a first cryopanel comprising a first inner end portion and a first outer end portion that is directed to the shield side portion;
a second cryopanel comprising a second inner end portion and a second outer end portion that is directed to the shield side
portion,

wherein a distance from the shield opening to the second inner end portion is longer than a distance from the shield opening
to the first inner end portion,

wherein a distance from the shield opening to the second outer end portion is longer than a distance from the shield opening
to the first outer end portion, and

wherein the distance from the shield opening to the second outer end portion is shorter than the distance from the shield
opening to the first inner end portion,

wherein each of the plurality of cryopanels comprises an inclined area that is inclined such that the inclined area is away
from the shield opening at a site close to a central axis of the radiation shield and is close to the shield opening at a
site far from the central axis, and

wherein at least half of a width of the cryopanel in a radial direction from the central axis corresponds to the inclined
area.

US Pat. No. 9,108,352

INJECTION MOLDING MACHINE

SUMITOMO HEAVY INDUSTRIES...

1. An injection molding machine, comprising:
a cylinder that feeds a molding material;
a screw that is rotatably and advanceably/retractably provided in the cylinder;
a plasticizing motor that rotates the screw;
a rotation transmission part that is provided in a rear side of the screw in an axial direction of the screw and configured
to transmit rotation of the plasticizing motor to the screw, wherein the rotation transmission part includes first and second
transmission members provided in a passage where the rotation of the plasticizing motor is transmitted to the screw, the first
transmission member being provided toward the plasticizing motor, and the second transmission member being provided toward
the screw, wherein the first and second transmission members are connected to move relative to each other;

a base;
a movable member that advances/retracts together with the second transmission member with respect to the base;
a fixing member fixed to the base and including an insertion hole throughwhich the first transmission member is inserted;
and

an injection motor that moves the movable member with respect to the base and moves the screw inside the cylinder,
wherein the injection motor is fixed to the movable member,
wherein the injection motor is configured to advance/retract together with the movable member, and
wherein the injection motor is inserted into a recess part formed in the fixing member when the movable member is retracted.

US Pat. No. 10,121,666

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

SUMITOMO HEAVY INDUSTRIES...

1. An ion implantation method for scanning an ion beam reciprocally in an x direction and moving a wafer reciprocally in a y direction to implant ions into the wafer, the method comprising:irradiating a first wafer arranged to meet a predetermined plane channeling condition with the ion beam and measuring resistance of the first wafer irradiated with the ion beam;
irradiating a second wafer arranged to meet a predetermined axial channeling condition with the ion beam and measuring resistance of the second wafer irradiated with the ion beam; and adjusting an implant angle distribution of the ion beam relative to the wafers in the x direction and in the y direction by using results of measuring the resistance of the first and second wafers,
wherein the implant angle distribution is adjusted independently in the x direction and in the y direction by using two or more lens devices for converging or diverging the ion beam by applying at least one of an electric field and a magnetic field.

US Pat. No. 9,279,233

SHOVEL

SUMITOMO HEAVY INDUSTRIES...

1. A shovel, comprising:
a turning drive unit,
the turning drive unit including
a turning electric motor;
a turning speed reducer configured to transmit a rotational driving force of the turning electric motor to a turnable body;
a brake unit configured to maintain the turnable body in a state where turning of the turnable body is stopped;
a case forming a space in which the turning speed reducer and the brake unit are lubricated with lubricant oil and accommodated;
a collar fitted around and in contact with a circumferential surface of a first portion of an output shaft of the turning
speed reducer so as to rotate with the output shaft, the collar covering said first portion and a second portion of the output
shaft, the second portion facing the case across the collar and extending from said first portion so as to gradually decrease
in diameter toward an end of the output shaft;

a sealing member provided between the collar and the case, the sealing member hermetically sealing the lubricant oil inside
the space;

an additional turning speed reducer configured to transmit the rotational driving force of the turning electric motor to the
turnable body, the additional turning speed reducer being connected to a third portion of the output shaft, the third portion
having a spline formed thereon and extending from the second portion toward the end of the output shaft; and

an additional case provided separately from said case, the additional case forming an additional space in which the additional
turning speed reducer is lubricated and accommodated.

US Pat. No. 9,376,785

SHOVEL, AND METHOD FOR CONTROLLING SHOVEL

SUMITOMO HEAVY INDUSTRIES...

1. A shovel, comprising:
a lower traveling body;
an upper rotating body provided on the lower traveling body;
an electrical energy storage device provided on the upper rotating body;
a converter connected to the electrical energy storage device;
a status detector that detects a status value representing a status of the electrical energy storage device; and
a controller that controls the converter to perform charge or discharge control of the electrical energy storage device at
the time of starting up the shovel,

wherein
the controller applies a current to the electrical energy storage device and the converter at the time of starting up the
shovel, calculates the status value after having applied the current, compares the detected status value with a predetermined
value, and controls the converter based on a comparison result to restrict an output of the electrical energy storage device,

the status value is a value of an internal resistance of the electrical energy storage device that is calculated based on
a current value or a voltage value of the electrical energy storage device, the current value and the voltage value being
detected by the status detector when the current is applied to the electrical energy storage device and the converter at the
time of starting up the shovel,

the controller restricts the output of the electrical energy storage device such that a charge/discharge current of the electrical
energy storage device becomes lower when the calculated value of the internal resistance becomes higher, and such that the
voltage value does not exceed an upper limit voltage and does not fall below a lower limit voltage, and

the controller continues to restrict the output of the electrical energy storage device until the calculated value of the
internal resistance becomes the predetermined value.

US Pat. No. 10,030,304

ION IMPLANTATION APPARATUS AND METHOD OF CLEANING ION IMPLANTATION APPARATUS

SUMITOMO HEAVY INDUSTRIES...

1. An ion implantation apparatus in which a fluorine compound gas is used as a source gas of an ion source, comprising:a vacuum chamber into which the source gas is introduced;
an introduction passage connected to the vacuum chamber and configured to introduce into the vacuum chamber a cleaning gas containing a component that reacts with a fluorine compound deposited inside the vacuum chamber and generates a reactant gas;
a delivery device connected to the introduction passage and configured to forcibly introduce the cleaning gas into the introduction passage;
a first valve inserted into the introduction passage and configured to adjust an amount of gas flow in the introduction passage;
an exhausting passage connected to the vacuum chamber and configured to forcibly exhaust the reactant gas from the vacuum chamber along with the cleaning gas;
a second valve inserted into the exhausting passage and configured to adjust an amount of gas flow in the exhausting passage; and
a controller configured to control the amount of gas flow by the first and second valves and to control a pressure in the vacuum chamber, in accordance with an operation of the delivery device, wherein
the cleaning gas is an ambient air including moisture, and
the delivery device includes at least one of a positive pressure pump or a fan configured to pressurize the cleaning gas to an atmospheric pressure or higher and to deliver the compressed cleaning gas to the introduction passage.

US Pat. No. 9,984,851

ION IMPLANTER, MAGNETIC FIELD MEASUREMENT DEVICE, AND ION IMPLANTATION METHOD

SUMITOMO HEAVY INDUSTRIES...

1. An ion implanter comprising:a beamline unit comprising an ion source and a processing chamber for processing a workpiece, the beamline unit configured to transport an ion beam from the ion source to the workpiece; and
a control unit configured to control the beamline unit,
wherein the beamline unit comprises a deflecting electromagnet provided between the ion source and the processing chamber,
wherein the deflecting electromagnet comprises:
a pair of electromagnets facing each other across an ion beam orbit so as to form a deflecting magnetic field for deflecting the ion beam,
a magnetic field detection element provided between the pair of electromagnets and configured to output a measurement output in response to the deflecting magnetic field, and
a nuclear magnetic resonance probe provided between the pair of electromagnets and configured to generate an NMR output,
wherein the control unit comprises:
a magnetic field measurement unit configured to measure the deflecting magnetic field in accordance with a known correspondence between the deflecting magnetic field and the measurement output,
a magnetic field determination unit configured to determine the deflecting magnetic field from the NMR output,
a magnetic field detection element calibration unit configured to determine whether a condition to start calibration is met and configured to update the known correspondence by using the deflecting magnetic field determined from the NMR output and a new measurement output of the magnetic field detection element corresponding to the determined deflecting magnetic field, and
a storage configured to store a calibration data representing the known correspondence,
wherein the magnetic field detection element calibration unit is configured such that, if the condition to start calibration is not met, the calibration data is not updated and remains stored in the storage and such that, if the condition to start calibration is met, the calibration data is updated.

US Pat. No. 9,210,793

CHARGED PARTICLE BEAM RADIATION CONTROL DEVICE AND CHARGED PARTICLE BEAM RADIATION METHOD

NATIONAL CANCER CENTER, ...

1. A charged particle beam radiation device that radiates a charged particle beam, the charged particle beam radiation device
comprising:
an ion source configured to generate charged particles,
an accelerator configured to accelerate the charged particles by applying an acceleration voltage to the charged particles
generated by the ion source from an acceleration electrode, and

a controller configured to control the acceleration voltage,
wherein the controller includes a set acceleration voltage controller configured to select a non-radiation state of the charged
particle beam by setting the acceleration voltage of the charged particle beam to a reference acceleration voltage and changing
the acceleration voltage to a set acceleration voltage larger or smaller than the reference acceleration voltage, the charged
particles emitted from the ion source collide with a center electrode provided inside the accelerator during the non-radiation
state, and the non-radiation state of the charged particle beam is selected without using an ON-or-OFF control of an arc discharge
of the ion source.

US Pat. No. 9,210,794

CYCLOTRON

SUMITOMO HEAVY INDUSTRIES...

1. A cyclotron, comprising:
a hollow yoke including first and second yoke portions facing each other and a side yoke portion connecting the first and
second yoke portions to each other;

first and second poles provided in the yoke so as to face each other;
a coil disposed so as to surround the first and second poles;
a D electrode provided between the first and second poles;
a power source configured to supply electric power to the coil;
a pole temperature detector configured to detect a temperature of at least one of the first and second poles;
a yoke temperature detector configured to detect a temperature of the side yoke portion; and
a control unit configured to control supply of electric power to the coil by the power source on the basis of detection results
of the pole temperature detector and the yoke temperature detector.

US Pat. No. 9,212,468

EXCAVATOR

SUMITOMO HEAVY INDUSTRIES...

1. An excavator comprising:
an arm including an attachment;
a boom to which the arm is attached;
an upper turning body to which the boom is attached;
an engine arranged at the upper turning body;
an electrical energy storage unit including an electrical energy storage device that accumulates electric power generated
by a generator and an electric circuit that controls a charge/discharge operation of the electrical energy storage device;

a voltage detection part that is arranged between the electrical energy storage device and the generator and is configured
to measure a voltage of the electrical energy storage device;

a current detection part that measures a current flowing through the electrical energy storage device;
an abnormality detection part that detects an abnormality of the electrical energy storage unit;
a switching element that controls the charge/discharge operation of the electrical energy storage device; and
a breaker that interrupts a power supply line between the switching element and the electrical energy storage device;wherein the abnormality detection part includes
an electrical energy storage state estimation part that obtains an estimation value of an electrical energy storage state
of the electrical energy storage device based on a voltage detection value obtained by the voltage detection part and a current
detection value obtained by the current detection part; and

an abnormality determination part that makes an abnormality determination based on the estimation value obtained by the electrical
energy storage state estimation part;

wherein the abnormality detection part controls the switching element and the breaker based on an abnormality determination
result of the abnormality determination part; and

wherein when an amount of change in a charge state of the electrical energy storage device is less than a first threshold
value, the abnormality determination part stops operation of the switching element and controls the breaker to interrupt the
power supply line.

US Pat. No. 9,127,441

INDUSTRIAL MACHINE

SUMITOMO HEAVY INDUSTRIES...

1. An industrial machine comprising a power converter,
wherein the power converter includes:
at least one power module;
a capacitor; and
a bus bar provided between any two among a load to be driven, the power module, and the capacitor,
wherein the bus bar includes:
a first plate;
a second plate;
a first spacer configured to support respective corresponding first ends of the first plate and the second plate with a predetermined
distance therebetween and to electrically connect the respective first ends of the first plate and the second plate with each
other; and

a second spacer configured to support respective corresponding second ends of the first plate and the second plate with a
predetermined distance therebetween and to electrically connect the respective second ends of the first plate and the second
plate with each other.

US Pat. No. 9,622,334

CYCLOTRON AND SUPERCONDUCTIVE ELECTROMAGNET

Sumitomo Heavy Industries...

1. A cyclotron comprising:
a pole;
a superconductive coil wound so as to cover an outer periphery of the pole;
a coil support that supports the superconductive coil;
a cooling part that cools the superconductive coil;
a first support that is connected to the coil support and is capable of adjusting a position of the coil support in a direction
of a winding central axis of the superconductive coil; and

a second support that is connected to the coil support and is capable of adjusting the position of the coil support in an
orthogonal direction orthogonal to the direction of the winding central axis of the superconductive coil,

wherein the second support has a link mechanism that is displaceable in each of the direction of the winding central axis
and the orthogonal direction.

US Pat. No. 9,145,287

MOTOR DRIVE APPARATUS FOR ELECTRIC FORKLIFT AND ELECTRIC FORKLIFT ADOPTING THE SAME

Sumitomo Heavy Industries...

1. A motor drive apparatus of an electric forklift which is mounted on the electric forklift and controls a first traveling
motor and a second traveling motor, respectively transmitting power to a left drive wheel and a right drive wheel of the electric
forklift based on a speed command value showing a target speed of the electric forklift, the apparatus comprising:
a first torque command value generation unit and a second torque command value generation unit that are respectively provided
in the first traveling motor and the second traveling motor, each of which generates a torque command value indicating torque
of the corresponding traveling motor in response to a gap between a speed command value of the corresponding traveling motor
and a speed detection value that is a current speed of the corresponding traveling motor; and

a first slip detector and a second slip detector that are respectively provided in the first traveling motor and the second
traveling motor, each of which generates a slip ratio estimation value showing a slip state of the corresponding drive wheel
based on the speed detection value of the corresponding traveling motor and the torque command value of the corresponding
traveling motor,

wherein each of the first slip detector and the second slip detector includes a first arithmetic unit which generates an inertial
force estimation value proportional to a differential value of the speed detection value of the corresponding traveling motor
and a second arithmetic unit which generates the slip ratio estimation value in response to a relationship between the corresponding
inertial force estimation value and the torque command value of the corresponding traveling motor.

US Pat. No. 9,689,593

COMPRESSOR AND OIL AMOUNT MANAGEMENT SYSTEM FOR COMPRESSOR

SUMITOMO HEAVY INDUSTRIES...

1. A compressor that compresses a coolant gas comprising: at least one refrigerator pipe that connects to a refrigerator and
through which the coolant gas is supplied to or returned from the refrigerator; a compression capsule that compresses the
coolant gas and cools compression heat generated by compressing the coolant gas, using oil; an oil separator that separates
and stores the oil contained in the coolant gas compressed by the compression capsule; an oil return pipe that returns the
oil stored in the oil separator to the compression capsule, a determination device comprising a calculator that calculates
an indicator indicating an amount of oil in the compressor and a determination unit that determines a state of circulation
of oil in the compressor based on the calculated indicator; a capsule oil level gauge that measures an oil level in the compression
capsule and transmits the measured oil level in the compression capsule to the calculator; and a separator oil level gauge
that measures an oil level in the oil separator and transmits the measured oil level in the oil separator to the calculator,
wherein the calculator calculates the indicator based on the oil level in the compression capsule measured and transmitted
by the capsule oil level gauge and the oil level in the oil separator measured and transmitted by the separator oil level
gauge, and wherein the determination device comprises: a storage that stores a capsule oil level table that maps the oil level
in the compression capsule to an amount of oil in the compression capsule and a separator oil amount table that maps the oil
level in the oil separator to an amount of oil in the oil separator, and a hardware processor configured to: control a capsule
oil amount obtaining unit to obtain the measured oil level in the compression capsule from the capsule oil level gauge, refer
to the capsule oil level table stored in the storage, and obtain an amount of oil in the compression capsule based on the
measured oil level in the compression capsule and the capsule oil amount table; control a separator oil amount obtaining unit
to obtain the measured oil level in the oil separator from the separator oil level gauge, refer to the separator oil amount
table stored in the storage, and obtain an amount of oil in the oil separator based on the measured oil level in the oil separator
and the separator oil amount table; and control a total amount obtaining unit to obtain a total amount of oil in the compressor
based on the amount of oil in the compression capsule obtained by the capsule oil amount obtaining unit and the amount of
oil in the oil separator obtained by the separator oil amount obtaining unit.

US Pat. No. 9,568,569

DEVICE FOR DETECTING QUENCH IN SUPERCONDUCTING COIL

Sumitomo Heavy Industries...

1. A device for detecting a quench in a superconducting coil comprising:
a first superconducting coil and a second superconducting coil that are connected in series,
an intermediate tap that is provided between the first superconducting coil and the second superconducting coil, and
a detector configured to measure a first voltage of the first superconducting coil, to measure a second voltage of the second
superconducting coil, and to determine the presence or absence of the occurrence of a quench on the basis of a deviation between
the first voltage and the second voltage, and on the basis of a stored threshold value,

wherein the first superconducting coil and the second superconducting coil have the same shape,
wherein a first axis of the first superconducting coil and a second axis of the second superconducting coil are arranged at
the same position and in the same direction, and a position of the first superconducting coil and a position of the second
superconducting coil in the direction of the first and second axes are the same, and

wherein a length of a winding wire of the first superconducting coil and a length of a winding wire of the second superconducting
coil are equal to each other.

US Pat. No. 9,382,949

SHAFT COUPLING STRUCTURE

SUMITOMO HEAVY INDUSTRIES...

1. A shaft coupling structure comprising:
a first shaft; and
a second shaft which is coupled with the first shaft by a combination of a key coupling and a clamp coupling,
wherein the first shaft has a cylindrical portion into which the second shaft is inserted, a first slit which is formed in
an axial direction in the cylindrical portion, and a second slit which is formed in the axial direction in the cylindrical
portion, the second slit being formed apart from the first slit in a circumferential direction,

the shaft coupling structure further comprising:
a clamping fastener which is mounted on a portion of an outer circumference of the first slit and the second slit; and
a key disposed within one of the first slit and the second slit,
wherein a circumferential width of the first slit and a circumferential width of the second slit are constant in a full range
in a radial direction,

wherein the first shaft has a small-diameter portion and a large-diameter portion, and the first slit and the second slit
are formed across both of the small-diameter portion and the large-diameter portion in the full range of the radial direction,

wherein a spacer is arranged between the clamping fastener and the large-diameter portion,
wherein a step portion between the small-diameter portion and the large-diameter portion has a spacer contact portion for
locating the spacer, and

wherein the spacer is in contact with the spacer contact portion.

US Pat. No. 9,203,261

EXCAVATOR

SUMITOMO HEAVY INDUSTRIES...

1. An excavator comprising:
an electric load;
an electrical energy storage part that supplies stored electric power to the electric load; and
a control unit that controls an amount of charge to the electrical energy storage part so that a state of charge of the electrical
energy storage part is between an upper limit value and a lower limit value,

wherein the control unit controls the amount of charge to the electrical energy storage part based on a changing trend of
a plurality of detection values of the state of charge, the plurality of detection values being obtained over a predetermined
time period, and

wherein when a predetermined number of the plurality of detection values are consecutively determined to be greater than respective
preceding detection values of the state of charge or when a predetermined number of the plurality of detection values are
consecutively retained at the upper limit value, the control unit determines that the amount of charge is excessive and decreases
a limit value for the amount of charge.

US Pat. No. 9,431,952

CONSTRUCTION MACHINE AND METHOD OF CONTROLLING TURNING ELECTRIC MOTOR

SUMITOMO HEAVY INDUSTRIES...

1. A construction machine, comprising:
a lower-part traveling body;
an upper-part turning body mounted on the lower-part traveling body through a turning mechanism configured to turn the upper-part
turning body horizontally relative to the lower-part traveling body;

a turning electric motor configured to drive the turning mechanism; and
a control unit configured to control driving of the turning electric motor,
wherein the control unit includes
a processor; and
a memory storing a program that, when executed by the processor, causes the control unit to cause an output torque of the
turning electric motor to selectively continue after a turning speed of the upper-part turning body becomes zero, based on
a direction in which the upper-part turning body has turned, and a magnitude of the output torque or a direction of the output
torque of the turning electric motor, when the turning speed of the upper-part turning body becomes zero because of deceleration
of the upper-part turning body,

wherein the control unit causes the output torque of the turning electric motor to be zero or reduced when an absolute value
of the output torque of the turning electric motor, when the turning speed of the upper-part turning body becomes zero, is
less than a predetermined value, in a case where a turn of the upper-part turning body is stopped with the construction machine
being placed on level ground or in a case where an upward turn of the upper-part turning body is quickly stopped with the
construction machine being placed on a slope.

US Pat. No. 9,067,586

HYBRID WORKING MACHINE

SUMITOMO HEAVY INDUSTRIES...

1. A hybrid working machine, comprising:
an engine fed with fuel;
a motor generator connected to the engine and driven by an inverter to assist the engine and to generate electric power;
a variable displacement hydraulic pump mechanically connected to the engine and configured to be driven to rotate by the engine;
and

a control part configured to control the engine and the variable displacement hydraulic pump,
wherein the control part is configured to
estimate a hydraulic load of the variable displacement hydraulic pump based on a discharge pressure, a control current and
a rotation speed of the variable displacement hydraulic pump,

calculate a target discharge flow rate of the variable displacement hydraulic pump based on the estimated hydraulic load,
calculate a rotation speed command for the engine based on the calculated target discharge flow rate of the variable displacement
hydraulic pump and a tilt angle ratio of the variable displacement hydraulic pump, the tilt angle ratio being 90% to 100%
of a maximum value of the tilt angle ratio,

control a rotation speed of the engine based on the calculated rotation speed command for the engine, and
determine an output of the motor generator based on the calculated rotation speed command for the engine.

US Pat. No. 9,340,115

SHOVEL

SUMITOMO HEAVY INDUSTRIES...

1. A shovel comprising:
a power storage module; and
an electric motor driven by electric power stored in the power storage module,
wherein the power storage module includes a plurality of cell units stacked to form a stacked structure,
wherein each of the cell units includes
a power storage cell including a pair of electrode tabs; and
a frame body configured to support the power storage cell,
wherein the frame body surrounds the power storage cell when viewed with a line of sight parallel to a stacking direction
of the stacked structure,

wherein each of the frame bodies includes a screw-locking portion formed on a surface facing laterally and outwardly from
the stacked structure, a top surface facing a first direction parallel to the stacking direction and a bottom surface facing
a second direction opposite to the first direction,

wherein the plurality of power storage cells are electrically connected by screw-locking the electrode tabs of the power storage
cells to the screw-locking portions, the electrode tab extending from the inside of the frame body to the screw-locking portion
passing above the top surface, and

wherein a margin in directions in which the frame bodies approach each other in the stacking direction remains between the
top surface and the bottom surface facing each other of the frame bodies adjacent to each other.

US Pat. No. 10,283,422

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

SUMITOMO HEAVY INDUSTRIES...

1. An ion implantation method using an ion implantation apparatus including a high-energy multistage linear acceleration unit, the high-energy multistage linear acceleration unit including a plurality of stages of high-frequency resonators and operating in accordance with a high-frequency parameter determining voltage amplitudes, frequencies, and phases of the high-frequency resonators in each stage, the method comprising:measuring a beam energy of an ion beam that is generated by the high-energy multistage linear acceleration unit operating in accordance with a tentative high-frequency parameter;
adjusting a value of the high-frequency parameter based on the measured beam energy in order to acquire a target beam energy; and
performing ion implantation by using the ion beam generated by the high-energy multistage linear acceleration unit operating in accordance with the adjusted high-frequency parameter,
wherein the tentative high-frequency parameter is determined in such a manner that a value different from the value of the high-frequency parameter for achieving a maximum acceleration in design is provided to the high-frequency resonator in a part of the plurality of stages of the high-frequency resonators including at least a most downstream stage, and
the adjusting includes changing at least one of the voltage amplitude and the phase set for the high-frequency resonator in the part including the at least most downstream stage.

US Pat. No. 10,283,326

ION GENERATOR AND METHOD OF CONTROLLING ION GENERATOR

SUMITOMO HEAVY INDUSTRIES...

1. An ion generator comprising:a plasma chamber that includes a plasma chamber inner wall to be exposed to a plasma;
a gas supply unit that is configured to supply the plasma chamber with a source gas;
a plasma excitation source that is configured to excite the source gas supplied to the plasma chamber into a plasma state;
an ion source control unit that is configured to control the gas supply unit and the plasma excitation source in accordance with a current ion source condition and a new ion source condition to be employed subsequent to the current ion source condition;
a retention time obtaining unit that is configured to obtain a retention time for the current ion source condition; and
a pre-treatment condition setting unit that is configured to set a pre-treatment condition defining a pre-treatment for forming on the plasma chamber inner wall a surface layer region suitable for the new ion source condition, the pre-treatment condition being set based on the current ion source condition, the retention time, and the new ion source condition, wherein
the ion source control unit is configured to control the gas supply unit and the plasma excitation source in accordance with the pre-treatment condition when the current ion source condition is changed to the new ion source condition.

US Pat. No. 9,233,643

IMAGE GENERATION DEVICE AND OPERATION SUPPORT SYSTEM

SUMITOMO HEAVY INDUSTRIES...

1. An image generation device that generates an output image based on at least three input images obtained by taking images
by at least three image-taking parts mounted to a body to be operated, which includes a turning body rotatable around a turning
axis, and having different optical axis directions, the image generation device comprising:
a coordinates correspondence part implemented by a hardware control part and configured to cause coordinates of an XYZ coordinate
system on a columnar space model arranged to surround said body to be operated to correspond to coordinates on at least three
input image planes on which said at least three input images are positioned, respectively; and

an output image generation part implemented by the hardware control part and configured to generate said output image by causing
values of the coordinates on said at least three input image planes to correspond to values of the coordinates on an output
image plane on which said output image is positioned through coordinates on said columnar space model,

wherein said columnar space model is a combination of a plurality of cylindrical space model parts each having a reference
axis,

each of said plurality of cylindrical space model parts corresponds to one of pairs of adjacent image-taking parts from among
said at least three image-taking parts,

each reference axis of said plurality of cylindrical space model parts is arranged at a single point where components of optical
axes of the image-taking parts included in the one of the pairs of image-taking parts intersect, the components being obtained
by projecting the optical axes on an XY coordinate plane of the XYZ coordinate system, the XY coordinate plane being perpendicular
to the turning axis, and

each of said plurality of cylindrical space model parts has a corresponding predetermined radius on the XY coordinate plane
around the corresponding reference axis,

wherein the reference axes respectively of said plurality of cylindrical space model parts are located at different positions
on the XY coordinate plane,

wherein each predetermined radius is different.

US Pat. No. 9,632,320

LASER IRRADIATION DEVICE

SUMITOMO HEAVY INDUSTRIES...

1. A laser irradiation device comprising:
a semiconductor laser oscillator having laser diodes arranged two-dimensionally in fast-axis and slow-axis directions; and
a homogenizer to which a laser beam emitted from the semiconductor laser oscillator is incident, and which is configured to
condense the laser beam onto a long-length incident region at a surface to be irradiated,

wherein the homogenizer divides the laser beam into a plurality of beams with respect to a short-axis direction of the incident
region, and superimposes the plurality of divided beams on the surface to be irradiated to cause the superimposed beams to
be incident on the incident region, and

the slow-axis direction of the semiconductor laser oscillator is inclined with respect to a long-axis direction of the incident
region,

wherein at an incident position to the homogenizer, a profile of the laser beam shows a maximum value periodically at a pitch
P with respect to the fast-axis direction, and when a dimension of a cross-section of the laser beam at the incident position
to the homogenizer in the long-axis direction is denoted by L, and an inclined angle between the slow-axis direction of the
semiconductor laser oscillator and the long-axis direction is denoted by ?, the inclined angle ? is in a range of 0.5 times
to 1.5 times sin?1(P/L).

US Pat. No. 9,841,212

CRYOGENIC REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A cryogenic refrigerator comprising:
a displacer comprising an axially extending displacer sidewall and a displacer bottom arranged at an end of the axially extending
displacer sidewall, the axially extending displacer sidewall and the displacer bottom in combination surrounding a displacer
internal space in which refrigerant gas flows, the axially extending displacer sidewall comprising a displacer sidewall gas
outlet formed through the displacer sidewall to guide the refrigerant gas from or into the displacer internal space;

a cylinder that houses the displacer to enable the displacer to perform axial reciprocating movement along an axial direction
of the cylinder; and

a cooling stage connected to the cylinder to surround the displacer bottom such that an expansion space of the refrigerant
gas is formed between the displacer bottom and the cooling stage; wherein

the expansion space is at a maximum volume when the displacer is at a top dead center of the axial reciprocating movement
and the expansion space is at a minimum volume when the displacer is at a bottom dead center of the axial reciprocating movement,

when the displacer is at the top dead center of the axial reciprocating movement, a first flow path is formed between the
displacer and the cooling stage to fluidly couple the displacer sidewall gas outlet to the expansion space, the first flow
path having a first flow path resistance between the displacer and the expansion space,

when the displacer is at the bottom dead center of the axial reciprocating movement, a second flow path is formed between
the displacer and the cooling stage to fluidly couple the displacer sidewall gas outlet to the expansion space, the second
flow path having a second flow path resistance between the displacer and the expansion space,

the second flow path resistance is lower than the first flow path resistance.

US Pat. No. 9,944,502

CYLINDER RETRACTION SYSTEM, BOOM DEVICE AND CRAWLER CRANE

Hitachi Sumitomo Heavy In...

1. A crawler crane comprising a traveling lower superstructure, a revolving upper superstructure rotatably disposed upon the traveling lower superstructure and a boom of which base end portion is pivotably attached to the revolving upper superstructure, the traveling lower superstructure having a car body linked to the revolving upper superstructure, a pair of crawlers detachably mounted on both sides of the car body, each of the pair of crawlers configured so as to include a crawler side frame and a crawler belt wrapped around the crawler side frame, wherein the crawler side frame is detachable to and from the car body for the crawler crane itself, comprising:a hydraulic cylinder swingably suspended on a ventral surface side of the boom, and having a rod extended and contracted by hydraulic oil, and equipped with a mounting fixture attached at a front end of the rod for suspending the crawler side frame;
a cylinder retraction system including a pair of guide plates set apart from each other over a predetermined distance on two opposite sides of the rod, each of which base end side rotatably supported on the ventral surface side of the boom, and configured so that front edges of the pair of guide plates being rotated between a retraction portion closer to the ventral surface side of the boom and an operating position over a greater distance from the ventral surface side of the boom; wherein
a through hole is formed at the mounting fixture, a round bar shaped guide pin or a shackle for suspending the crawler side frame is selectively attached to the through hole;
when the hydraulic cylinder has been disposed in vertical direction in a condition in which the round bar shaped guide pin has been inserted through the through hole to assume an operating attitude, and the hydraulic cylinder has been made to contract in a condition in which the pair of the guide plates have been set in the operating positions, then the round bar shaped guide pin is guided via the pair of guide plates, and the hydraulic cylinder assumes the retracted attitude in which the hydraulic cylinder are disposed along the ventral surface side of the boom;
when the hydraulic cylinder has assumed the retracted attitude in a condition in which the round bar shaped guide pin has been inserted through the through hole, and the hydraulic cylinder has been made to extend in the condition in which the pair of the guide plates have been set in the operating positions, then the round bar shaped guide pin is guided via the pair of guide plates, and the hydraulic cylinder assumes the operating attitude; and
when the hydraulic cylinder has assumed the operating attitude, and the round bar shaped guide pin or the shackle has been attached to the mounting fixture, the crawler side frame is made suspensible.

US Pat. No. 9,457,436

METHOD OF MANUFACTURING A CRYOGENIC REGENERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A method of manufacturing a cryogenic regenerator, comprising:
replacing air within a helium gas sealing tube having a front end portion and a rear end portion that are open by supplying
helium gas through the front end portion and exhausting the air from the rear end portion before sealing the rear end portion;

sealing the rear end portion of the helium gas sealing tube after replacing the air;
cooling the helium gas sealing tube after sealing the rear end portion and filling additional helium gas into the cooled helium
gas sealing tube through the front end portion from a helium gas supplying unit;

sealing the front end portion of the helium gas sealing tube after the helium gas sealing tube is filled with the additional
helium gas; and

fabricating a helium gas sealing tube wound structure by winding the helium gas sealing tube into a coil structure around
a core material,

wherein the helium gas sealing tube is a metallic tube,
wherein the step of sealing the rear end portion of the helium gas sealing tube includes crushing and hermetically sealing
the rear end portion of the helium gas sealing tube, and

wherein the step of sealing the front end portion of the helium gas sealing tube includes crushing and hermetically sealing
the front end portion of the helium gas sealing tube.

US Pat. No. 9,366,332

POWER TRANSMISSION DEVICE

Sumitomo Heavy Industries...

1. A power transmission device comprising:
a casing;
a first shaft; and
a second shaft,
wherein the first shaft comprises a protruding portion which protrudes from the casing,
a fan is provided at the protruding portion,
a fan cover configured to cover the fan comprises a base end section and an extending portion which extends toward a bearing
supporting portion of the second shaft along a side surface of the casing, and

the extending portion is a separate member from the base end section, is connected at a joining portion to the base end section
in a cantilever state, and is inclined toward the bearing supporting portion side from the fan side such that a distance defined
perpendicularly from an axial center of the fan to the extending portion distant from the joining portion is smaller than
a distance defined perpendicularly from the axial center to the extending portion proximate to the joining portion.

US Pat. No. 10,217,607

ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD

SUMITOMO HEAVY INDUSTRIES...

1. An ion implantation apparatus comprising:a beam scanner that provides a reciprocating beam scan in a beam scan direction in accordance with a scan waveform;
a mechanical scanner that causes a wafer to reciprocate in a mechanical scan direction; and
a control device that controls the beam scanner and the mechanical scanner to realize a target two-dimensional dose amount distribution on a surface of the wafer,
wherein the control device includes
a scan frequency adjusting unit that determines a frequency of the scan waveform in accordance with the target two-dimensional dose amount distribution, and
a beam scanner driving unit that drives the beam scanner by using the scan waveform having the frequency determined by the scan frequency adjusting unit,
wherein an upper limit change rate that is an upper limit value of a change in time of the scan waveform available for driving is determined in the beam scanner driving unit, and
wherein the scan frequency adjusting unit determines the frequency of the scan waveform to be less than or equal to an upper limit scan frequency that is the frequency of the scan waveform in a case that a maximum change rate of the scan waveform for realizing the target two-dimensional dose amount distribution is adjusted to match the upper limit change rate.

US Pat. No. 9,068,564

CRYOPUMP AND METHOD OF MONITORING CRYOPUMP

Sumitomo Heavy Industries...

1. A cryopump for pumping gas from a vacuum chamber in a vacuum apparatus performing vacuum processing, the vacuum apparatus
provided with a vacuum apparatus controller for executing the vacuum processing, the cryopump comprising:
a first stage cryopanel;
a first temperature sensor that measures a temperature of the first stage cryopanel;
a second stage cryopanel cooled to a lower temperature than the first stage cryopanel in conjunction with the temperature
of the first stage cryopanel;

a second temperature sensor that measures the temperature of the second stage cryopanel; and
a cryopump controller configured to perform a cool-down step in which the second stage cryopanel is cooled to a temperature
less than 20K and a subsequent normal pumping operation of the cryopump after completion of the cool-down step, the normal
pumping operation including controlling the first stage cryopanel to have a target temperature,

wherein the cryopump controller is provided apart from the vacuum apparatus controller and communicatably connected with the
vacuum apparatus controller,

wherein the vacuum apparatus controller sets a maximum cryogenic temperature of the second stage cryopanel for the vacuum
processing, and the cryopump controller sets an alert temperature that is irrespective of the measured temperature of the
second stage cryopanel based on the maximum cryogenic temperature,

wherein the cryopump controller performs, while controlling the first stage cryopanel to have the target temperature during
the subsequent normal pumping operation:

a first determination in which the cryopump controller compares the measured temperature of the second stage cryopanel with
the alert temperature and determines whether the measured temperature of the second stage cryopanel is higher than or equal
to the alert temperature set to be lower than the maximum cryogenic temperature of the second stage cryopanel set in the vacuum
apparatus, wherein the alert temperature is less than 20K; and

a second determination in which it is determined whether the second stage cryopanel is continuously being heated, for a preset
period of time or longer, to a temperature within a temperature range set on condition that the alert temperature is a maximum,

wherein, when it is determined that the measured temperature of the second stage cryopanel is higher or equal to the alert
temperature in the first determination, the cryopump controller allows the normal pumping operation to continue.

US Pat. No. 9,062,743

SHOVEL

SUMITOMO HEAVY INDUSTRIES...

1. A shovel, comprising:
a turning drive unit,
the turning drive unit including
a turning electric motor;
a turning speed reducer configured to transmit a rotational driving force of the turning electric motor to a turnable body;
and

a brake unit configured to maintain the turnable body in a state where turning of the turnable body is stopped,
wherein the turning speed reducer includes a planetary speed reducer including a planetary carrier,
wherein the planetary carrier includes
an output shaft part that forms an output shaft; and
a carrier part that holds a planetary gear in such a manner as to allow rotation of the planetary gear,
wherein the output shaft part and the carrier part are fastened by a fastening member,
wherein the brake unit includes a brake disk configured to rotate with the output shaft part,
wherein the output shaft part includes a radially extending disk portion, and
wherein the disk portion includes a disk holding portion at an outer radial end of the disk portion, the disk holding portion
holding the brake disk.

US Pat. No. 10,249,477

ION IMPLANTER AND ION IMPLANTATION METHOD

SUMITOMO HEAVY INDUSTRIES...

1. An ion implanter, comprising:a plasma shower device configured to supply electrons to an ion beam with which a wafer is irradiated,
wherein the plasma shower device includes
a plasma generating chamber provided with an extraction opening from which the electrons supplied to the ion beam are extracted,
a first electrode which is provided with an opening communicating with the extraction opening and to which a first voltage is applied with respect to an electric potential of the plasma generating chamber,
a second electrode which is disposed at a position facing the first electrode in a state where the ion beam is interposed between the first electrode and the second electrode and to which a second voltage is applied with respect to the electric potential of the plasma generating chamber, and
a controller configured to independently control the first voltage and the second voltage to switch operation modes of the plasma shower device.

US Pat. No. 9,552,933

STORAGE MODULE AND METHOD FOR MANUFACTURING STORAGE MODULE

SUMITOMO HEAVY INDUSTRIES...

1. A storage module comprising
a plurality of frame bodies; and
a plurality of electric storage cells that are respectively accommodated inside the plurality of frame bodies,
wherein at least one electric storage cell includes a pair of electrode tabs,
wherein at least one frame body includes
an electrode tab arrangement portion in which the electrode tabs are arranged on a first surface side of edges of the frame
body, and

an elastic portion that is provided on a second surface side opposite to the first surface side in the edges of the frame
body, and

wherein the electrode tab is interposed between the electrode tab arrangement portion and the elastic portion in a state where
the frame bodies having the electric storage cells inside thereof are stacked.

US Pat. No. 9,325,223

LINEAR MOTOR COOLING STRUCTURE

SUMITOMO HEAVY INDUSTRIES...

1. A linear motor cooling structure for cooling a coil constituting a driving section of a linear motor, comprising:
an inflow section into which cooling water flows;
an outflow section from which the cooling water flows out; and
a flat plate-shaped flat plate cooling section which includes an inflow opening for inflow of the cooling water from the inflow
section, an outflow opening for outflow of the cooling water to the outflow section, and a plurality of flow paths that makes
the cooling water which has flowed in from the inflow opening flow through an inside thereof and flow out from the outflow
opening,

wherein the flat plate cooling section comprises a structure from laminating two or more flat plate members, and a flow path
of the flat plate cooling section is formed in a space between the laminated flat plate members, the space between the flat
plate members is formed by joining a flat plate surface of a first flat plate member to a surface on a side having a concave
part of a second flat plate member so as to cover the concave part,

wherein the plurality of the flow paths of the flat plate cooling section are separated via a partition portion with respect
to adjacent flow paths, and the flat plate cooling section has a plurality of the inflow openings and a plurality of the outflow
openings, and with respect to each of the flow paths, wherein the concave part extends from the plurality of inflow openings
to the plurality of outflow openings,

wherein the plurality of inflow openings and the plurality of outflow openings have a width in a vertical direction that is
smaller than the width in the vertical direction of the concave part of the second flat plate,

wherein the inflow section, the flat plate cooling section, and the outflow section are connected, and the inflow section
and the inflow opening of the flat plate cooling section communicate with each other and also the outflow opening of the flat
plate cooling section and the outflow section communicate with each other, whereby a cooling water flow path is configured,
and

wherein the flat plate cooling section retains the coil in close contact with the coil.

US Pat. No. 9,217,593

COOLING SYSTEM AND MAINTENANCE TIMING DETERMINATION METHOD

SUMITOMO HEAVY INDUSTRIES...

1. A cooling system comprising: a refrigerator; a thermal load application unit applying a thermal load to said refrigerator;
a detector detecting, when the thermal load is applied to said refrigerator by said thermal load application unit, a change
in a physical quantity generated in said refrigerator or a refrigerator-mounting portion where said refrigerator is mounted;
and a determiner determining a maintenance timing of said refrigerator based on a return time required for the physical quantity
after the application of the thermal load to return to a predetermined physical quantity or an amount of change in the physical
quantity per a unit time when the physical quantity of the application of the thermal load returns to an initial physical
quantity.

US Pat. No. 9,344,016

STORAGE MODULE VOLTAGE EQUALIZER, STORAGE DEVICE, AND OPERATING MACHINE

Sumitomo Heavy Industries...

1. An operating machine comprising:
a lower traveling body;
an upper revolving body that is placed, in a revolvable manner, on the lower traveling body;
a slewing motor that revolves the upper revolving body; and
a storage device that supplies power to the slewing motor,
wherein the storage device includes
a plurality of storage cells that are connected in series with each other,
a housing that accommodates the storage cells,
a plurality of mounting substrates that are accommodated in the housing and are stacked on each other, and
voltage equalization circuits that are respectively connected to a pair of terminals of the storage cells and equalize an
inter-terminal voltage of the storage cells, and

wherein the plurality of voltage equalization circuits are mounted, in a distributed manner, on the plurality of mounting
substrates.

US Pat. No. 9,470,436

CRYOGENIC REFRIGERATION APPARATUS AND METHOD OF CONTROLLING CRYOGENIC REFRIGERATION APPARATUS

Sumitomo Heavy Industries...

1. A cryogenic refrigeration apparatus comprising:
a working gas source;
a plurality of refrigerators; and
a gas line configured to connect the working gas source to the plurality of refrigerators in parallel so as to circulate the
working gas between each of the plurality of refrigerators and the working gas source, wherein

the gas line comprises a control element capable of individually controlling a pressure drop of a flow of working gas in a
corresponding one of the plurality of refrigerators, and

the control element is provided in series with the corresponding refrigerator.

US Pat. No. 9,395,108

CRYOGENIC REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A cryogenic refrigerator, comprising:
a compressor that compresses a working gas;
a displacer to which the working gas compressed by the compressor is supplied;
a drive mechanism that includes a drive shaft and is configured to drive the displacer;
a motor that drives the drive mechanism;
a housing that accommodates the drive mechanism;
a valve mechanism that adjusts a pressure of the working gas supplied to the displacer;
a pipe that supplies the working gas from the compressor to the valve mechanism;
a branch pipe that branches out from the supply pipe and is connected to a space formed between the drive shaft and the housing
and

a slipper seal that is arranged between the drive shaft and the housing.

US Pat. No. 9,113,803

MAGNETOENCEPHALOGRAPHY METER FOR MEASURING NEUROMAGNETISM

Sumitomo Heavy Industries...

1. A magnetoencephalography meter which measures neuromagnetism of a head of a subject, the magnetoencephalography meter comprising:
a plurality of optical pumping magnetometers which are arranged in a helmet shape configured to cover the head of the subject,
wherein each optical pumping magnetometer comprises:
a vapor cell that is filled with alkali metal atoms and is arranged in parallel to the surface of the head of the subject
such that a local z-axis of each optical pumping magnetometer is perpendicular to a surface of the head of the subject,

a laser light emission unit that is configured to emit a laser light in a ?z direction parallel to the local z-axis toward
the head of the subject and to cause the laser light to enter the vapor cell,

a reflection unit that is configured to reflect the laser light passed through the vapor cell in a +z direction parallel to
the local z-axis away from the head of the subject, and

a polarization change detection unit that is configured to receive the laser light reflected by the reflection unit and to
detect a change in polarization of the laser light.

US Pat. No. 9,378,924

CHARGED PARTICLE BEAM TREATMENT APPARATUS

SUMITOMO HEAVY INDUSTRIES...

1. A charged particle beam treatment apparatus comprising:
a cyclotron configured to accelerate charged particles while turning the charged particles along a predetermined orbital plane;
an irradiation portion configured to irradiate an irradiation object with a charged particle beam while scanning the charged
particle beam emitted from the cyclotron;

a measurement portion configured to measure a dose of the charged particle beam emitted from the cyclotron; and
a control portion configured to control an operation of the cyclotron,
wherein the cyclotron has a pair of chopper electrodes which can switch ON/OFF of the charged particle beam from the cyclotron
by changing an orbit of the charged particles that pass through the orbit, and a power source configured to apply a voltage
to the pair of chopper electrodes, and

wherein the control portion controls a size of a voltage in at least any one of the pair of chopper electrodes, such that
the dose of the charged particle beam measured by the measurement portion is reduced when the dose measured by the measurement
portion surpasses a target value.

US Pat. No. 9,322,271

CRYOGENIC REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A cryogenic refrigerator comprising:
a compressor compressing a refrigerant gas;
a displacer reciprocally moving between an upper dead end and a lower dead end, and containing a regenerative material;
a cylinder containing the reciprocally moving displacer;
a scotch yoke mechanism causing the displacer to reciprocate based on rotation of a motor:
a rotary valve selectively connecting the cylinder to a supply side or a discharge side of the compressor; and
an elastic unit which accumulates a force by the refrigerant gas acting on the displacer as an elastic force when the displacer
approaches the upper dead end or the lower dead end, and which releases the accumulated elastic force as a force which cancels
a force by the refrigerant gas acting on the displacer when the displacer departs from the upper dead end or the lower dead
end.

US Pat. No. 9,117,960

ION IMPLANTATION METHOD, CARRIER, AND ION IMPLANTATION DEVICE

Sumitomo Heavy Industries...

5. An ion implantation device for implanting ions in a substrate for a solar cell, comprising:
a table on which a carrier configured to carry the substrate from an atmosphere into a process chamber of the ion implantation
is mounted, the carrier including:

a tray configured to accommodate the substrate;
a mask configured to be moved between a first position covering a partial area on a surface of the substrate and a second
position distanced from the surface of the substrate, while the mask is being aligned relative to the substrate; and

a joining mechanism configured to join the mask and the tray so that the mask is moveable between the first position and the
second position;

an ion implantation source configured to implant ions on the substrate accommodated in the carrier;
a vacuum device configured to evacuate a processing chamber in which the ion implantation source is provided;
a transport unit configured to transport the carrier from the table to the processing chamber; and
a moving mechanism configured to move the mask in the carrier between the first position and the second position in the evacuated
processing chamber.

US Pat. No. 9,083,214

MOTOR

SUMITOMO HEAVY INDUSTRIES...

1. A motor comprising:
a rotor including an output shaft;
a stator provided with a coil wound around the stator; and
a casing configured to accommodate the rotor and the stator and contain a coolant liquid therein,
wherein skews are formed in at least one of the rotor and the stator,
wherein a hollow portion extending an axial direction is formed in the output shaft, and
wherein the hollow portion includes an opening that opens in the casing at an end surface of the output shaft where a liquid
surface of the coolant liquid is relatively higher due to rotation of the rotor and that communicates with the casing near
an end opposite to the end surface.

US Pat. No. 9,061,143

CHARGED PARTICLE BEAM IRRADIATION SYSTEM AND CHARGED PARTICLE BEAM IRRADIATION PLANNING METHOD

SUMITOMO HEAVY INDUSTRIES...

1. A charged particle beam irradiation system comprising:
an irradiation unit configured to irradiate an irradiation target with a charged particle beam;
a radiation resistance state measuring section configured to measure a radiation resistance state of the irradiation target;
a region dividing section configured to divide the irradiation target into a plurality of radiation resistance regions based
on a measurement result of the radiation resistance state measuring section;

a radiation dose computing section configured to compute a planned value of a radiation dose of the charged particle beam
for each of the plurality of radiation resistance regions divided by the region dividing section; and

an irradiation planning section configured to create an irradiation plan of the charged particle beam with respect to the
irradiation target based on a computation result of the radiation dose computing section.

US Pat. No. 9,887,611

LINEAR MOTOR

SUMITOMO HEAVY INDUSTRIES...

1. A linear motor comprising:
a mover, the mover being movable along a first axis;
a stator;
a pair of back yokes provided in one of either the mover or the stator, inner lateral surfaces of the back yokes opposing
each other along a second axis perpendicular to the first axis, wherein the other of either the mover or the stator is sandwiched
between the pair of back yokes;

a plurality of field magnets arranged on the inner lateral surfaces of the back yokes, along the first axis;
a magnetic member magnetically coupling the pair of back yokes endwise; and
a plurality of auxiliary magnets each being provided either inside the magnetic member or in contact with the magnetic member,
wherein

one of said plurality of auxiliary magnets is disposed in contact with an end lateral surface of one of the pair of back yokes,
and

another of said plurality of auxiliary magnets is disposed in contact with an end lateral surface of the other of the pair
of back yokes.

US Pat. No. 9,151,019

HYBRID TYPE CONSTRUCTION MACHINE

SUMITOMO HEAVY INDUSTRIES...

1. A hybrid-type construction machine comprising
an engine;
an electric power accumulator;
first and second pumps;
an electric motor which drives the first pump; and
a plural actuators which are driven by the first and second pumps,
wherein the first and second pumps are arranged such that the first pump controls at least one of the actuators independently
from the second pump and the second pump controls at least another one of the actuators independently from the first pump,

the first pump is electrically driven by the electric motor with electric power from the electric power accumulator, and
the second pump is directly coupled to the engine,
the first and second pumps are connected to a common control valve, and
at least two of the actuators are coupled to each of the first and second pumps via the common control valve.

US Pat. No. 9,127,864

REGENERATIVE REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A regenerative refrigerator comprising a regenerative material and a regenerator disposed in a flow passage of working
gas generating a cold thermal mass, the regenerator being loaded with the regenerative material to accumulate cold thermal
energy from the cold thermal mass in the working gas,
wherein the regenerative material is a sintered body made of a fiber material, and a diameter of the fiber material disposed
at a low-temperature end of the regenerator is smaller than a diameter of the fiber material disposed at a high-temperature
end of the regenerator,

wherein the regenerator includes a single cylindrical main body into which the regenerative material is inserted, and
wherein the single cylindrical main body has a constant diameter.

US Pat. No. 9,881,412

IMAGE GENERATION DEVICE AND OPERATION SUPPORT SYSTEM

SUMITOMO HEAVY INDUSTRIES...

1. An image generation device configured to generate a planar output image based on an input image of a surrounding area of
a movable object, the input image being acquired with an image-taking device attached to a turnable body of the movable object,
the image generation device comprising:
a memory; and
a processor coupled to the memory, and configured to
convert a rear-view image and a side-view image into the planar output image,
wherein the planar output image has a shape of a circular sector of a first circle, and includes an image of the movable object
at a center of the first circle, and

wherein the processor is further configured to generate a frame image and display the frame image on a periphery of the planar
output image on a display screen, the frame image containing information.

US Pat. No. 9,836,938

SHOVEL HAVING AUDIO OUTPUT DEVICE INSTALLED IN CAB

SUMITOMO HEAVY INDUSTRIES...

1. A shovel, comprising:
a traveling body;
a turning body mounted on the traveling body;
an attachment attached to a front part of the turning body;
a cab mounted on the turning body and located on the left side of the attachment;
a side camera;
a back camera;
a display part configured to concurrently display an output image showing situations at the side and back of the turning body;
a determining part configured to determine presence or absence of an object at the side and/or back of the turning body; and
an audio output device installed in the cab,
wherein, when an object is present at the side of the turning body, the audio output device emits a sound from the side of
the cab toward an operator seat, and

wherein, when an object is present at the back of the turning body, the audio output device emits a sound from the back of
the cab toward the operator seat.

US Pat. No. 9,657,970

CRYOGENIC REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A cryogenic refrigerator, comprising:
a compressor;
an expansion space in which a high-pressure working gas discharged from a discharge side of the compressor is caused to expand;
and

a valve including
a first member including a first channel connecting to the discharge side of the compressor; and
a second member including a second channel connecting to the expansion space,
wherein the first member and the second member are configured to rotate relative to and in contact with each other to connect
or disconnect the first channel and the second channel,

wherein, in a plane in which the first member and the second member are in contact, a first distance that is a distance of
closest approach between the first channel and a valve circumference defined by a circumference of one of the first member
and the second member having a smaller diameter is greater than a second distance that is a distance of closest approach between
the second channel and the valve circumference, and

wherein, letting the first distance be t1 and letting a diameter of the valve circumference be L, a ratio of the first distance to the diameter of the valve circumference,
(t1/L), satisfies 0.07?(t1/L)?0.16.

US Pat. No. 9,580,885

SWING OPERATING MACHINE AND METHOD OF CONTROLLING SWING OPERATING MACHINE

SUMITOMO HEAVY INDUSTRIES...

2. A rotation type working machine comprising:
an attachment mounted so as to be able to rotate with respect to a base body;
a rotation mechanism which rotates the attachment;
a control device which controls the rotation mechanism; and
an entering object detection device which detects a position of an entering object entered into a work area,
wherein the control device controls a rotation operation of the attachment based on a first physical amount related to at
least one of a current angular velocity of the attachment and a current moment of inertia of the attachment, and the position
of the entering object detected by the entering object detection device, and

wherein the control device
stores the relationship between an upper limit of a supervised angle and the first physical amount therein,
compares an angular interval which is an angle between a current orientation of the attachment with a rotation center of the
attachment as a base point and an orientation of the entering object detected by the entering object detection device with
the upper limit of the supervised angle, and

stops a rotation of the attachment in a case where the angular interval is smaller than the upper limit of the supervised
angle.

US Pat. No. 9,574,329

SHOVEL AND METHOD OF CONTROLLING SHOVEL

SUMITOMO HEAVY INDUSTRIES...

1. A shovel, comprising:
a plurality of hydraulic actuators driven by using hydraulic oil and including a first hydraulic actuator and a second hydraulic
actuator, the first hydraulic actuator and the second hydraulic actuator being driven by causing the hydraulic oil to flow
thereinto and therefrom;

a first pressure detector configured to detect a first pressure of the hydraulic oil flowing out of the first hydraulic actuator;
a second pressure detector configured to detect a second pressure of the hydraulic oil in the second hydraulic actuator;
a main pump;
a hydraulic pump-motor configured to function as a hydraulic motor by using the hydraulic oil flowing out of the first hydraulic
actuator upon detecting that the first pressure detected by the first pressure detector is higher than or equal to a predetermined
threshold pressure that is higher than the second pressure detected by the second pressure detector, and configured to function
as a hydraulic pump upon detecting that the first pressure is lower than the predetermined threshold pressure;

a control valve configured to control a flow of the hydraulic oil in the plurality of hydraulic actuators;
a first oil passage to connect the main pump with the second hydraulic actuator through the control valve; and
a second oil passage to connect the hydraulic pump-motor with the second hydraulic actuator, the second oil passage meeting
the first oil passage between the control valve and the second actuator,

wherein the hydraulic pump-motor suctions the hydraulic oil flowing out of the first hydraulic actuator and discharges the
hydraulic oil to the second hydraulic actuator.

US Pat. No. 9,346,204

INJECTION MOLDING MACHINE AND INJECTION MOLDING METHOD

SUMITOMO HEAVY INDUSTRIES...

1. An injection molding machine, comprising:
a gas feeding mechanism configured to feed gas to a cavity formed between a first mold plate and a second mold plate in a
clamped state;

an injection apparatus configured to inject a foamable resin into the cavity having an inside pressure thereof increased to
be higher than an atmospheric pressure by the gas feeding mechanism; and

a gas releasing mechanism configured to release the gas inside the cavity to an atmosphere through a gap formed between an
inner wall surface of a through hole formed through one of the first mold plate and the second mold plate and an outer circumferential
surface of a mold member inserted into the through hole, during or after the injection of the foamable resin by the injection
apparatus, the gas releasing mechanism including an opening and closing mechanism configured to open and close the gap,

wherein the opening and closing mechanism includes:
a hydro pneumatic cylinder configured to extend and retract relative to the one of the first mold plate and the second mold
plate;

a seal plate connected to the hydro pneumatic cylinder; and
a sealing member provided between the seal plate and the one of the first mold plate and the second mold plate,
wherein the sealing member moves toward the one of the first mold plate and the second mold plate to close the gap when the
retracted hydro pneumatic cylinder extends to move the seal plate toward the one of the first mold plate and the second mold
plate, and the sealing member moves away from the one of the first mold plate and the second mold plate to open the gap when
the extended hydro pneumatic cylinder retracts to move the seal plate away from the one of the first mold plate and the second
mold plate.

US Pat. No. 9,182,156

CRYOGENIC REFRIGERATOR, CRYOPUMP AND DISPLACER

SUMITOMO HEAVY INDUSTRIES...

1. A two-stage GM cryogenic refrigerator comprising:
a displacer cylinder extending from a low-temperature end to a high-temperature end;
a displacer including the displacer cylinder and a resin;
a motor configured to drive the displacer, the motor being configured to be rotatable forward in cooling and backward in increasing
a temperature; and

the resin provided on an outer circumferential surface of the displacer cylinder to entirely cover the displacer cylinder
from the low-temperature end to the high-temperature end, a thickness of the resin being thinner on the high-temperature end
than on the low-temperature end, a total diameter of the displacer obtained by adding the resin to the displacer cylinder
having a same diameter from the low-temperature end to the high-temperature end.

US Pat. No. 9,157,668

DOUBLE INLET TYPE PULSE TUBE REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A method of controlling a double inlet type pulse tube refrigerator including
a regenerator having a high temperature end and a low temperature end;
a pulse tube having a high temperature end and a low temperature end, the low temperature end being connected to the low temperature
end of the regenerator;

a compressor having a high pressure supplying side and low pressure receiving side for a coolant, wherein
the high pressure supplying side is connected to the high temperature end of the regenerator via a coolant supplying path
having a first opening and closing valve, and

the low pressure receiving side is connected to the high temperature end of the regenerator via a coolant receiving path having
a second opening and closing valve;

a bypass pipe having a double inlet valve, the bypass pipe being configured to connect the high temperature end of the pulse
tube and the high temperature end of the regenerator;

a buffer tank connected to the high temperature end of the pulse tube via a first pipe having a first flow path resistance
member; and

a second pipe extending from the buffer tank or the first pipe and having a second flow path resistance member, which includes
a fluid amount control valve and a third opening and closing valve, the second flow path resistance member of the second pipe
being connected with the coolant receiving path at a point existing between the low pressure receiving side of the compressor
and the second opening and closing valve, the method comprising:

causing a gas flowing out of the high temperature end of the pulse tube to pass through both the fluid amount control valve
and the third opening and closing valve to the point existing between the low pressure receiving side of the compressor and
the second opening and closing valve in the coolant receiving path;

opening and closing the third opening and closing valve in association with an opening state of or a closing state of the
first opening and closing valve;

opening the second opening and closing valve and closing the first opening and closing valve at a first time point;
during a first period maintaining the second opening and closing valve in an opened state and the first and third opening
and closing valves in closed states so as to flow a gas from the low temperature end of the pulse tube through the regenerator
and the opened second opening and closing valve to the low pressure receiving side of the compressor, and to flow the gas
from the high temperature end of the pulse tube through the bypass pipe and the opened second opening and closing valve to
the low pressure receiving side of the compressor;

subsequently maintaining the second opening and closing valve in an opened state and opening the third opening and closing
valve at a second time point;

during a second period maintaining the second and third opening and closing valves in opened states and the first opening
and closing valve in a closed state so as to additionally flow the gas from the buffer tank through the second pipe and the
opened third opening and closing valve to the low pressure receiving side of the compressor;

closing the third opening and closing valve at a third time point; and
during a third period maintaining the second opening and closing valve in an opened state and the first and third opening
and closing valves in closed states;

wherein the first period is on and after the first time point and before the second time point;
wherein the second period is on and after the second time point and before a third time point and immediately after the first
period; and

wherein the third period is on and after the third time point and immediately after the second period.

US Pat. No. 9,480,934

CRYOPUMP SYSTEM, AND METHOD OF OPERATING THE SAME, AND COMPRESSOR UNIT

Sumitomo Heavy Industries...

1. A cryopump system comprising:
a cryopump comprising a cryopanel, a temperature sensor that measures a temperature of the cryopanel, a refrigerator that
cools the cryopanel, a high pressure gas inlet that receives a working gas into the refrigerator, and a low pressure gas outlet
that discharges the working gas from the refrigerator, the cryopump configured to perform a preparatory operation including
a cooldown from a room temperature to a cryogenic temperature and to perform a vacuum pumping operation at the cryogenic temperature;

a compressor unit comprising a compressor of the working gas, a low pressure gas inlet that receives the working gas into
the compressor, and a high pressure gas outlet that discharges the working gas from the compressor;

a gas line comprising a high pressure line connecting the high pressure gas outlet and the high pressure gas inlet and a low
pressure line connecting the low pressure gas outlet and the low pressure gas inlet;

a gas volume adjuster comprising a buffer tank, a gas replenishing channel that allows the working gas in the buffer tank
to flow into the low pressure line, a gas collecting channel that allows the working gas in the high pressure line to flow
into the buffer tank, and a channel selector comprising at least one control valve configured to select either the gas replenishing
channel or the gas collecting channel; and

a control device comprising
a cryopump controller configured to decide a current operation state of the cryopump and to receive a temperature information
representing the temperature measured by the temperature sensor and

a compressor controller configured to control the compressor such that a differential pressure between the high pressure line
and the low pressure line agrees with a given target value of the differential pressure, the given target value being used
both in the cooldown and in the vacuum pumping operation, and communicably coupled to the cryopump controller to receive an
input information from the cryopump controller representing at least one of the current operation state of the cryopump and
the measured temperature, the compressor controller configured to control the at least one control valve to select the gas
replenishing channel if the current operation state is the vacuum pumping operation or if the measured temperature is lower
than a first threshold temperature and to select the gas collecting channel if the current operation state is the cooldown
or if the measured temperature is higher than a second threshold temperature such that a quantity of the working gas in the
gas line during the cooldown is reduced in comparison with that during the vacuum pumping operation.

US Pat. No. 9,407,124

MOTOR FRAME WITH HANGING FEATURES AND BOLTS

Sumitomo Heavy Industries...

1. A motor frame, comprising:
a motor frame body; and
a leg member that is a separate member from the motor frame body,
wherein the motor frame body includes four side surfaces defining the outer circumference of the motor frame body,
wherein the four side surfaces include a terminal box mounting surface on which a terminal box is provided, a first side surface,
and a second side surface located on respective sides of the terminal box mounting surface,

wherein the motor frame body includes first built-up portions, on which two or more bolt holes can be formed, provided on
the first side surface and second built-up portions, on which two or more bolt holes can be formed, provided on the second
side surface,

wherein the first built-up portions are configured such that any of a hanging bolt or the leg member can be fastened to the
first built-up portions,

wherein the second built-up portions are configured such that any of the hanging bolt or the leg member can be fastened to
the second built-up portions, and

wherein the motor frame is configured to take a state in which the hanging bolt is fastened to the first built-up portions
and the leg member is fastened to the second built-up portions, or a state in which the leg member is fastened to the first
built-up portions and the hanging bolt is fastened to the second built-up portions.

US Pat. No. 9,046,091

CRYOPUMP

Sumitomo Heavy Industries...

1. A cryopump comprising: a second-stage cryopanel; a radiation shield extending along a radiation shield axis and including
a hollow tube-shaped wall extending along and about the radiation shield axis to surround the radiation shield axis and a
bottom wall extending radially outwardly from the radiation shield axis at one end of the hollow tube-shaped wall and terminating
at the hollow tube-shaped wall to form a container space, the hollow tube-shaped wall comprising a rim portion disposed opposite
the bottom wall to define a radiation shield opening into the container space, the radiation shield opening and the container
space being sized to receive the second-stage cryopanel with the second-stage cryopanel in contact with the bottom wall and
disposed below the rim portion; and a first-stage cryopanel that is cooled to a temperature higher than that of the second-stage
cryopanel and provided in the shield opening, which includes a first panel extending radially outwardly from the radiation
shield axis and terminating at and directly contacting the rim portion of the hollow tube-shaped wall and provided with first
openings extending through the first panel, and a second panel extending radially outwardly from the radiation shield axis
and terminating at and directly contacting the rim portion of the hollow tube-shaped wall and provided with second openings
extending through the second panel and disposed adjacent to yet disposed apart from the first panel in a parallel relationship,
wherein the first openings facially oppose only the second panel without any one of the first openings facially opposing,
in whole or in part, any one of the second openings and the second openings facially oppose only the first panel without any
one of the second openings facially opposing, in whole or in part, any one of the first openings to thereby form a first offset
arrangement of the first openings relative to the second openings and a second offset arrangement of the second openings relative
to the first openings.

US Pat. No. 10,403,472

ION IMPLANTATION APPARATUS AND MEASUREMENT DEVICE

SUMITOMO HEAVY INDUSTRIES...

16. A measurement device that measures an angle distribution of an ion beam, the device comprising:a slit through which the ion beam is incident; and
a plurality of electrode bodies which are provided at positions away from the slit in a beam traveling direction, and each of which includes a beam measurement surface that is a region which is exposed to the ion beam having passed through the slit,
wherein the plurality of electrode bodies are disposed such that
the beam measurement surfaces of the electrode bodies are arranged in order in a width direction of the slit and the beam measurement surfaces adjacent to each other in the width direction of the slit deviate from each other in the beam traveling direction; and
wherein the plurality of electrode bodies are disposed such that the beam measurement surfaces of the electrode bodies are arranged in a V shape or an inverted V shape when viewed in a cross section defined by the beam traveling direction and the width direction of the slit.

US Pat. No. 9,574,798

U-SHAPED PULSE-TUBE REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A U-shaped pulse-tube refrigerator comprising:
a regenerative tube and a pulse-tube that are juxtaposed with each other;
a communicating path that connects a low-temperature end of the regenerative tube and a low-temperature end of the pulse-tube;
a heat exchanger that is provided at the low-temperature end of the regenerative tube; and
a flow smoothing member that is provided at a first exit of the communicating path at a side where the regenerative tube is
connected so that the flow smoothing member is located between the first exit of the communicating path and the heat exchanger.

US Pat. No. 9,481,071

GRINDING METHOD

SUMITOMO HEAVY INDUSTRIES...

1. A grinding method comprising:
(a) a step of grinding a work surface by relatively moving a grinding wheel, on an outer peripheral surface of which a helical
dressed groove having no intersection is formed, with respect to a workpiece in a first grinding direction which is tilted
with respect to a forward reference direction perpendicular to an axis of the grinding wheel, while rotating the grinding
wheel around the axis of the grinding wheel as a rotation center, in a state where the outer peripheral surface is brought
into contact with the work surface of the workpiece; and

(b) a step of grinding the work surface by relatively moving the grinding wheel with respect to the workpiece in a second
grinding direction which is tilted with respect to a backward reference direction opposite to the forward reference direction,
after the step (a),

wherein when the grinding wheel is virtually moved for grinding in the forward reference direction, an extending direction
of a virtual grinding trace formed by the dressed groove transcribed on the workpiece and the first grinding direction are
tilted in mutually opposite directions with respect to the forward reference direction, and thus an absolute value of a tilt
angle of the first grinding direction is smaller than an absolute value of a tilt angle of the extending direction of the
virtual grinding trace, and

wherein a rotation direction of a tilt from the forward reference direction to the first grinding direction and a rotation
direction of the tilt from the backward reference direction to the second grinding direction are opposite to each other.

US Pat. No. 9,466,861

BATTERY INSPECTION APPARATUS

SUMITOMO HEAVY INDUSTRIES...

1. A battery inspection apparatus for inspecting a plurality of rechargeable batteries, the apparatus comprising:
a battery supporting portion comprising a battery supporting plate capable of supporting a battery holding pallet holding
the plurality of batteries such that the batteries are horizontally arrayed in at least one line, each battery comprising
a first end surface with an electrode thereon, a second end surface opposite to the first end surface, and a side surface
connecting the first end surface and the second end surface in a battery height direction, wherein side surfaces of adjacent
batteries in the plurality of batteries spaced are apart each from other to form vertical airflow channels therebetween and
extending along the battery height direction, the battery supporting plate having airflow supply ports formed between positions
at which the adjacent batteries are supported;

a plurality of contactors, each configured to apply a voltage to one of the batteries by contacting the electrode thereof,
the contactors horizontally arrayed in a manner corresponding to an array of the plurality of batteries;

a contactor supporting portion provided to face the battery supporting portion and configured to support the plurality of
contactors, the contactor supporting portion comprising airflow exhaust ports formed corresponding to the airflow supply ports
such that the airflow supply ports, the vertical airflow channels and the airflow exhaust ports are linearly aligned, respectively;

a vertical upward airflow source fluidly coupled to the vertical airflow channels to generate a vertical upward airflow flowing
from the airflow supply ports through the vertical airflow channels to the airflow exhaust ports in order to provide a temperature
control of the batteries; and

a cover wall extending along the battery height direction and surrounding the batteries and at least part of the battery holding
pallet, wherein

the battery supporting portion comprises a source attachment plate to which the vertical upward airflow source is attached
and a side surface plate connecting the source attachment plate to the battery supporting plate, wherein the side surface
plate, the source attachment plate and the battery supporting plate in combination defines an airflow supplying compartment
such that the vertical upward airflow is received from the vertical upward airflow source and supplied to the vertical airflow
channels through the airflow supply ports, and

the vertical upward airflow source comprises at least one cross-flow fan arranged along an array direction of the plurality
of batteries to blow ambient air to the batteries.

US Pat. No. 9,206,588

SHOVEL PROVIDED WITH ELECTRIC SWIVELING APPARATUS AND METHOD OF CONTROLLING THE SAME

SUMITOMO HEAVY INDUSTRIES...

1. A shovel provided with an electric swiveling apparatus comprising:
a base;
a swiveling body that is installed on the base in a swivelable manner;
an electric motor for swiveling that swivels the swiveling body;
an inverter that supplies electric power to the electric motor for swiveling;
a control unit that transmits a control signal to the inverter to control the electric power which is supplied to the electric
motor for swiveling; and

an obstacle detector that detects obstacles around the base and transmits detected results to the control unit,
wherein the control unit determines presence or absence of the obstacle within a monitoring region on the basis of a detected
result from the obstacle detector, and

when the obstacle is not present inside the monitoring region, the control signal transmitted to the inverter is on the basis
of a second command value that is generated based on an operation amount by an operator, and

when the obstacle is present inside the monitoring region, the control signal transmitted to the inverter is on the basis
of a first command value based on a regulation velocity that is stored in advance and the control unit stops the electric
motor for swiveling.

US Pat. No. 9,200,428

SHOVEL

SUMITOMO HEAVY INDUSTRIES...

1. A shovel comprising:
a lower traveling body;
an upper rotation body rotatably attached to the lower traveling body; and
a storage battery module loaded onto the upper rotation body,
wherein the storage battery module comprises:
a stacked body having
a plurality of plate-shaped storage battery cells that are stacked in z-direction when an xyz rectangular coordinate system
is defined,

at least one heat transfer plate arranged between the storage battery cells, and
pressing plates, which are arranged at both ends of a stack structure of the storage battery cells, and apply a compressive
force in a stacking direction to the storage battery cells;

a first wall plate and a second wall plate that pinch the stacked body in the y-direction; and
a fastener component which applies a compressive force to the first wall plate and the second wall plate in a direction such
that a distance between the first wall plate and the second wall plate is narrowed upon tightening the fastener component,
and the fastener component is adapted to thermally couple the heat transfer plate to the first wall plate and the second wall
plate, and

wherein the positions of the heat transfer plates are restricted with respect to the first wall plate and the second wall
plate.

US Pat. No. 9,134,046

PULSE TUBE REFRIGERATOR AND REGENERATIVE REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A pulse tube refrigerator, comprising: a first pulse tube configured to perform adiabatic expansion of a coolant gas; a
first regenerator connected to the first pulse tube, the first regenerator being configured to store cooling generated at
the first pulse tube based on the adiabatic expansion of the coolant gas; a compressor configured to compress the coolant
gas; a first supply side valve configured to put in communication or block off communication between a supply side of the
compressor and a high temperature end of the first regenerator; a first suction side valve connected to the high temperature
end of the first regenerator via a first joint point, the first joint point being an intermediate point between the supply
side of the first supply side valve and the high temperature end of the first regenerator, the first suction side valve being
configured to put in communication or block off communication between the high temperature end of the first regenerator and
a suction side of the compressor; a first self seal joint provided between the supply side of the compressor and a suction
side of the first supply side valve; a second self seal joint provided between a supply side of the first suction side valve
and the suction side of the compressor; a third self seal joint provided between the first joint point and the high temperature
end of the first regenerator; a first buffer connected with the high temperature end of the first pulse tube; a valve unit
where the first supply side valve and the first suction side valve are mounted; a second pulse tube configured to perform
adiabatic expansion of coolant gas; a second regenerator provided between a low temperature end of the second pulse tube and
a low temperature end of the first regenerator; a third supply side valve connected to the supply side of the compressor via
a sixth joint point, the sixth joint point being an intermediate point between the suction side of the first supply side valve
and the first self seal joint, the third supply side valve being configured to put in communication or block off communication
between the high temperature end of the second pulse tube and a supply side of the compressor; a third suction side valve
connected to the suction side of the compressor via a seventh joint point, the seventh joint point being an intermediate point
between the supply side of the first suction side valve and the second self seal 30 joint, the third suction side valve being configured to put in communication or block off communication between the high
temperature end of the second pulse tube and the supply side of the compressor; and a seventh self seal joint provided between
the supply side of the third supply side valve and the high temperature end of the second pulse tube; wherein the first buffer
is mounted in the valve unit, wherein the third supply side valve and the third suction side valve are mounted in the valve
unit; wherein a second buffer connected with the high temperature end of the second pulse tube via a tenth joint point being
an intermediate point between the supply side of the third supply side valve and the seventh self seal joint; and wherein
the second buffer is mounted in the valve unit.

US Pat. No. 10,395,890

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

SUMITOMO HEAVY INDUSTRIES...

1. An ion implantation apparatus comprising:a multistage linear acceleration unit that includes a plurality of stages of high-frequency resonators disposed along a beam trajectory in design and configured to accelerate an ion beam transferred along the beam trajectory, and a plurality of stages of focusing lenses, each of which is disposed between each of the stages of the high-frequency resonators and is configured to cause the ion beam to converge in at least one of an x direction and a y direction orthogonal with respect to the beam trajectory to adjust a beam profile of the transferred ion beam in a plan view orthogonal with respect to the beam trajectory;
a first beam measuring unit that is disposed in the middle of the multistage linear acceleration unit, includes an electrode body disposed away from at least a vicinity of a center of the beam trajectory in the plan view orthogonal with respect to the beam trajectory, and is configured to allow passage of a beam portion adjacent to the center of the beam trajectory and measure a current intensity of another beam portion blocked by the electrode body outside the vicinity of the center of the beam trajectory;
a second beam measuring unit that is disposed downstream of the multistage linear acceleration unit and is configured to measure a current intensity of the ion beam exiting from the multistage linear acceleration unit; and
a control device configured to adjust a control parameter of the plurality of stages of focusing lenses based on measurement results of the first beam measuring unit and the second beam measuring unit such that the current intensity of the beam exiting from the multistage linear acceleration unit is equivalent to a target value.

US Pat. No. 9,734,413

IMAGE GENERATION APPARATUS AND PAVER OPERATION ASSISTANCE SYSTEM

SUMITOMO HEAVY INDUSTRIES...

1. An image generation apparatus, comprising:
a processor that generates an output image based on input images captured by multiple imaging units mounted on a paver including
a hopper, a tractor, and a screed,

wherein the output image includes a hopper image representing a downward view of the hopper, a left-side surrounding image
representing a downward view of a surrounding area on a left side in a movement direction of the paver, a right-side surrounding
image representing a downward view of a surrounding area on a right side in the movement direction of the paver, and an illustration
image of the tractor; and

wherein the processor arranges the hopper image, the left-side surrounding image, the right-side surrounding image, and the
illustration image such that the hopper image is disposed on an upper side of the illustration image, the left-side surrounding
image is disposed to a left of the illustration image, the right-side surrounding image is disposed to a right of the illustration
image, and the output image represents a downward view of the paver.

US Pat. No. 9,312,163

IMPURITY-DOPED LAYER FORMATION APPARATUS AND ELECTROSTATIC CHUCK PROTECTION METHOD

SUMITOMO HEAVY INDUSTRIES...

6. A vacuum processing apparatus comprising:
a process chamber configured to perform a process of forming a surface layer including a substance exhibiting volatility in
a vacuum environment on a substrate by irradiation of an ion beam including the substance onto the substrate; and

an electrostatic chuck accommodated in the process chamber and including a chuck surface for holding the substrate,
wherein a shield for the chuck surface is provided at least for a certain duration during a process suspension period in order
to suppress transfer of foreign materials including the substance from a surface of the process chamber to the chuck surface,
and the shield for the chuck surface is removed while the process is being performed,

wherein the process chamber comprises a protective member having a protective surface for shielding the chuck surface,
wherein the protective member is located outside a path of the ion beam in the process chamber,
wherein the apparatus further comprises a substrate holder configured to support the electrostatic chuck so as to hold the
substrate upright during the process, wherein the substrate holder movably supports the electrostatic chuck to or from an
evacuation position of the electrostatic chuck at which the chuck surface is in proximity to or in contact with the protective
surface,

wherein the substrate holder comprises a first driving unit that provides movement of the electrostatic chuck in a first direction
for mechanical scan of the substrate relative to the ion beam, and a second driving unit that provides movement of the electrostatic
chuck in a second direction different from the first direction, wherein the second driving unit moves the electrostatic chuck
to or from the evacuation position,

wherein the first driving unit is mounted on the second driving unit so that the first driving unit can be moved by the second
driving unit in the second direction,

wherein the protective member is located on a path of movement of the electrostatic chuck by the second driving unit, and
wherein the evacuation position of the electrostatic chuck is defined at an end of a range of movement in which the electrostatic
chuck can be moved by the second driving unit.

US Pat. No. 9,120,264

INJECTION MOLDING MACHINE

SUMITOMO HEAVY INDUSTRIES...

1. An injection molding machine comprising:
an ejector rod that is used to protrude a molding product from a mold;
a driving source that moves the ejector rod in an axial direction of the ejector rod;
a controller that controls the driving source;
a position detector that detects the position of the ejector rod; and
an operations unit that receives an input operation input by a user,
wherein, the controller sets up a current position of the ejector rod, which is detected by the position detector when the
operations unit receives a first button operation operated by the user, to be a waiting position of the ejector rod after
protruding the ejector rod or to be a protruding position of the ejector rod,

the controller sets up a value of the current position of the ejector rod to be a value of the waiting position, and
the controller calculates a deceleration position from which a setup speed of the ejector rod is decelerated while the ejector
rod moves from the protruding position to the waiting position based on the current position of the ejector rod, the current
position being detected by the position detector when the operations unit receives the first button operation by the user.

US Pat. No. 9,105,451

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

SUMITOMO HEAVY INDUSTRIES...

1. A plasma processing apparatus comprising: a plasma generator configured to generate plasma within a vacuum container;
a biasing power source configured to apply bias via a substrate holder on which a substrate to be processed within the vacuum
container is loaded;

gas supply sources configured to respectively supply processing gas and He gas as carrier gas into the vacuum container; and
a controller configured to control the plasma generator, the biasing power source, and the gas supply sources, such that a
plasma is generated with the carrier gas;

wherein the controller is configured to and maintain the generated plasma so as to clean processed substances which have adhered
to an inner wall of the vacuum container, and perform plasma continuation only with the carrier gas and without the supply
of the processing gas, after the end of processing of the substrate.

US Pat. No. 10,468,283

ION IMPLANTATION APPARATUS AND METHOD FOR PROCESSING PLURALITY OF WAFERS USING THE SAME

SUMITOMO HEAVY INDUSTRIES...

1. An ion implantation apparatus comprising:a vacuum processing chamber in which an ion implantation process is performed;
an intermediate conveyance chamber that is provided to communicate with the vacuum processing chamber;
a first load lock chamber and a second load lock chamber that are respectively provided at positions at which the first load lock chamber and the second load lock chamber face each other with interposing the intermediate conveyance chamber and communicate with the intermediate conveyance chamber;
an intermediate conveyance mechanism that is provided in the intermediate conveyance chamber and performs wafer conveyance between the vacuum processing chamber and the first load lock chamber via the intermediate conveyance chamber and wafer conveyance between the vacuum processing chamber and the second load lock chamber via the intermediate conveyance chamber;
a first conveyance mechanism that is provided at a position at which the first conveyance mechanism faces the first load lock chamber, brings a wafer into the first load lock chamber, and takes out a wafer from the first load lock chamber;
a second conveyance mechanism that is provided at a position at which the second conveyance mechanism faces the second load lock chamber, brings a wafer into the second load lock chamber, and takes out a wafer from the second load lock chamber;
an alignment device that is provided at a position between the first conveyance mechanism and the second conveyance mechanism and configured to be able to adjust a rotation position of a wafer;
a buffer device that is provided at a position between the first conveyance mechanism and the second conveyance mechanism and configured to be able to temporarily hold two or more wafers;
a load port that allows a wafer container in which a plurality of wafers that are targets of the ion implantation process are stored to be fixed at a position at which the wafer container faces the first conveyance mechanism; and
a controller that controls operations of at least the first conveyance mechanism and the second conveyance mechanism,
wherein the first conveyance mechanism has a first arm capable of holding a wafer and a second arm capable of holding a wafer,
wherein the second conveyance mechanism has a third arm capable of holding a wafer and a fourth arm capable of holding a wafer,
wherein the intermediate conveyance mechanism has a fifth arm capable of holding a wafer and a sixth arm capable of holding a wafer,
wherein, in relation to a first wafer and a second wafer of the plurality of wafers that are stored in the wafer container, conveyed in order, and become targets of the ion implantation process,
(a) the controller operates the first conveyance mechanism such that the first arm and the second arm convey the first wafer and the second wafer to the buffer device from the wafer container;
(b) the controller operates the second conveyance mechanism such that the third arm conveys the first wafer to the alignment device from the buffer device and the fourth arm takes out the second wafer from the buffer device and temporarily holds the second wafer;
(c) the controller operates the second conveyance mechanism such that the third arm takes out the first wafer subjected to alignment from the alignment device and the fourth arm brings the second wafer into the alignment device;
(d) the controller operates the second conveyance mechanism such that the third arm brings the first wafer subjected to alignment into the second load lock chamber;
(e) the controller operates the first conveyance mechanism such that the first arm conveys the second wafer subjected to alignment to the first load lock chamber from the alignment device;
(f) the controller operates the intermediate conveyance mechanism such that the fifth arm conveys the first wafer to the vacuum processing chamber from the second load lock chamber;
(g) the controller operates the intermediate conveyance mechanism such that the fifth arm conveys the second wafer to the intermediate conveyance chamber from the first load lock chamber; and
(h) the controller operates the intermediate conveyance mechanism such that the sixth arm conveys the first wafer subjected to an implantation process to the intermediate conveyance chamber from the vacuum processing chamber and the fifth arm conveys the second wafer to the vacuum processing chamber from the intermediate conveyance chamber,
wherein, in the intermediate conveyance mechanism, a wafer holder of the fifth arm is configured to be able to move in a horizontal direction in a fifth horizontal plane and a wafer holder of the sixth arm is configured to be able to move in the horizontal direction in a sixth horizontal plane that is located below the fifth horizontal plane, and
wherein the controller operates the intermediate conveyance mechanism such that a swapping operation in which the first wafer and the second wafer pass each other in a positional relationship in which the second wafer that is held by the fifth arm and moved to the vacuum processing chamber is located on an upper side and the first wafer that is held by the sixth arm and moved away from the vacuum processing chamber is located on a lower side is performed in an operation of (h).

US Pat. No. 9,810,208

CRYOPUMP AND METHOD FOR REGENERATING THE CRYOPUMP USING TWO-STAGE DISCHARGE PROCESS

SUMITOMO HEAVY INDUSTRIES...

1. A cryopump comprising:
a cryopanel;
a cryopump housing arranged to enclose the cryopanel;
a control unit configured to control evacuation of the cryopump housing and supply of a purge gas to the cryopump housing
for full regeneration of the cryopanel,

wherein the control unit is configured to perform:
a first rough-and-purge process that includes alternately performing a first rough-and-purge evacuating of the cryopump housing
and a first rough-and-purge supplying of the purge gas in a first pressure range, and

a second rough-and-purge process that includes, subsequent to the first rough-and-purge process, alternately and cyclically
repeating a second rough-and-purge evacuating of the cryopump housing to a low pressure region below the first pressure range
and a second rough-and-purge supplying of the purge gas to the cryopump housing, and

wherein the second rough-and-purge process includes making a determination at least once in the low pressure region as to
whether the second rough-and-purge process should be terminated, and a plurality of cycles of the alternately and cyclically
repeating of the second rough-and-purge evacuating of the cryopump housing and the second rough-and-purge supplying of the
purge gas to the cryopump housing are performed prior to a first-time determination as to whether the second rough-and-purge
process should be terminated.

US Pat. No. 9,791,178

CRYOGENIC REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A cryogenic refrigerator comprising:
a scotch yoke mechanism including an eccentric rotating body and a yoke plate that reciprocates by rotation of the eccentric
rotating body, the yoke plate comprising a first yoke plate side surface and a second yoke plate side surface opposite the
first yoke plate side surface, each of the first and second yoke plate side surfaces comprising a groove, the groove extending
in a direction of the yoke plate's reciprocation;

a displacer connected to the yoke plate so as to reciprocate together with the yoke plate;
a cylinder that houses the displacer and form an expansion space for refrigerant gas in a space with the displacer; and
an airtight container provided on a high-temperature side of the cylinder, and that houses the scotch yoke mechanism and receive
the refrigerant gas discharged from the expansion space,

wherein the airtight container includes a supporting unit that supports the first and second yoke plate side surfaces so as
to restrict tilting of the yoke plate around a rotary shaft of the eccentric rotating body,

wherein the supporting unit comprises a guide rail extending in the direction of the yoke plate's reciprocation and inserted
into the groove, and a plurality of balls arranged within the groove and rollably held between the groove and the guide rail
such that the yoke plate reciprocates along the guide rail,

wherein the airtight container comprises an inner wall surface arranged in slidable contact with the first and second yoke
plate side surfaces.

US Pat. No. 9,756,759

POWER TRANSMISSION APPARATUS

SUMITOMO HEAVY INDUSTRIES...

1. A power transmission apparatus that is cooled by airflow sent from a fan and includes fins provided on at least one of
side surfaces of a casing,
wherein the fins include upstream fins and downstream fins, the upstream fins are closer to the fan than the downstream fins,
an interval between the upstream fins is smaller than an interval between the downstream fins,
an inspection hole of the power transmission apparatus is provided between the upstream and downstream fins, and
a height of an upper surface of a lid body, which closes the inspection hole, is smaller than a height of an apex of the upstream
fins.

US Pat. No. 9,657,457

SHOVEL

SUMITOMO HEAVY INDUSTRIES...

1. A shovel comprising:
a base carrier;
an upper revolving body which is revolvably mounted on the carrier;
an electricity storage module; and
an electric motor which revolves the upper revolving body by receiving electric power from the electricity storage module,
wherein the electricity storage module includes
a plurality of protection plates which are stacked up in a stacked direction,
plate-shaped electricity storage cells which are interposed between the protection plates adjacent to each other,
a flow path for cooling media formed on or inside the protection plates or formed on or inside a side plate which is in contact
with the protection plates at a side surface thereof, and

a pressure structure which applies a compressive force to a stacked body constituted by the plate-shaped electricity storage
cells and the protection plates, in the stacked direction, and

wherein the protection plates include a positional restriction shape for restricting a relative position with respect to a
positional restriction direction which is perpendicular to the stacked direction,

each of the protection plates includes a first main surface that is perpendicular to the stacked direction and has a pair
of first edges parallel to a first direction, a second main surface that is perpendicular to the stacked direction and has
a pair of second edges parallel to the first direction, falling surfaces that are continued to the pair of first edges and
are parallel to the stacked direction, and rising surfaces that are continued to the pair of second edges and are parallel
to the stacked direction, and wherein

the first main surface of any one of the protection plates faces the second main surface of adjacent one of the protection
plates, the plate-shaped electricity storage cells being interposed between the first main surface and the second main surface
facing each other, and wherein

the falling surfaces of any one of the protection plates and the rising surfaces of adjacent one of the protection plates
face each other and are in contact with each other.

US Pat. No. 9,605,667

CRYOPUMP AND METHOD FOR VACUUM PUMPING NON-CONDENSABLE GAS

Sumitomo Heavy Industries...

1. A cryopump comprising:
a radiation shield comprising a shield front end that defines a shield opening, a shield bottom portion, and a shield side
portion that axially extends between the shield front end and the shield bottom portion; and

a cryopanel assembly cooled to a lower temperature than that of the radiation shield, comprising a first panel arrangement
and a plurality of second panel arrangements, the first panel arrangement comprising a plurality of flat plate adsorption
panels axially arranged between the shield opening and the shield bottom portion, each flat plate adsorption panel comprising
a back surface adsorption area provided to capture a non-condensable gas by adsorption and arranged axially above and adjacent
to a corresponding second panel arrangement, each second panel arrangement comprising a plurality of axially extending adsorption
panels circumferentially arranged below the back surface adsorption area to form a plurality of adsorption sections, each
adsorption section being exposed to the shield side portion, each axially extending adsorption panel comprising an axially
extending adsorption area being differently angled depending on an axial distance from the shield opening to the axially extending
adsorption panel, wherein

the axially extending adsorption panels extend from only a bottom of the flat plate adsorption panel and away from the shield
opening.

US Pat. No. 9,597,608

CRYOPUMP SYSTEM

Sumitomo Heavy Industries...

1. A cryopump system comprising:
a plurality of cryopumps connected to a common roughing pump in a rough line and provided with a plurality of rough valves
in the rough line, respectively; and

a controller configured to control each of the rough valves for regenerating a corresponding one of the plurality of cryopumps,
wherein a delay time is set between closing of an open one of the plurality of rough valves and opening of a closed one of
the plurality of rough valves,

wherein the controller applies the delay time uniformly upon closing of each of the rough valves.

US Pat. No. 9,186,999

SHOVEL

Sumitomo Heavy Industries...

1. A shovel comprising:
a power storage device; and
an electric motor to which electric power is supplied from the power storage device,
wherein the power storage device includes:
a housing;
a first power storage module including a plurality of laminated power storage cells stacked in a first direction, a first
terminal, and a second terminal and being housed within the housing;

a first electrode and a second electrode fixed to the housing;
a first relay current path configured to electrically connect the first terminal to the first electrode; and
a second relay current path configured to electrically connect the second terminal to the second electrode, and
wherein the first relay current path includes a distance adjustment structure configured to compensate variations in the distance
between the first electrode and the first terminal.

US Pat. No. 9,142,385

CHARGED PARTICLE BEAM TREATMENT APPARATUS AND METHOD OF ADJUSTING PATH LENGTH OF CHARGED PARTICLE BEAM

SUMITOMO HEAVY INDUSTRIES...

1. A charged particle beam treatment apparatus comprising:
an accelerator configured to emit a charged particle beam by accelerating charged particles;
an irradiation portion configured to irradiate an irradiation object with the charged particle beam through a scanning method;
a transport line configured to transport the charged particle beam emitted from the accelerator to the irradiation portion;
an energy adjusting portion configured to adjust energy of the charged particle beam;
an electromagnet which is provided in the irradiation portion or the transport line;
an electromagnet power source which is connected to the electromagnet; and
a control portion,
wherein semiconductors are connected between the electromagnet power source and the electromagnet in series, and
when adjusting a path length which is a depth to which the charged particle beam reaches when irradiating the irradiation
object with the charged particle beam by controlling the energy adjusting portion and increases a resistance of the semiconductors.

US Pat. No. 9,829,218

CRYOGENIC REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A Gifford-McMahon refrigerator comprising:
a compressor having an inlet and an outlet;
a cylinder;
a displacer provided in the cylinder, the displacer defining a room temperature chamber between a top wall of the cylinder
and a top surface of the displacer and an expansion space between a bottom wall of the cylinder and a bottom surface of the
displacer, wherein the expansion space is surrounded by a cooling stage and is configured to generate a cooling by expanding
a refrigerant gas caused by back and forth movement of the displacer;

a drive unit configured to move the displacer back and forth in the cylinder;
an inlet valve provided in a first flow passage connecting the outlet of the compressor with the room temperature chamber
and configured to be opened in supplying the refrigerant gas to the room temperature chamber; and

an exhaust valve provided in a second flow passage connecting the inlet of the compressor with the room temperature chamber
and configured to be opened in returning the refrigerant gas from the room temperature chamber to the compressor,

wherein the drive unit includes
a drive chamber to allow a driver gas for driving the displacer,
a high-pressure valve provided in a supply pipe connecting the outlet of the compressor with the drive chamber and configured
to supply the driver gas to the drive chamber by being opened, and

a low-pressure valve provided in a return pipe connecting the inlet of the compressor with the drive chamber and configured
to return the driver gas from the drive chamber to the compressor, and

wherein a first period of time when the low-pressure valve is opened is set longer than a second period of time when the high-pressure
valve is opened.

US Pat. No. 9,784,368

HYDRAULIC CONTROL APPARATUS AND METHOD

SUMITOMO HEAVY INDUSTRIES...

1. A hydraulic control apparatus that controls a hydraulic pump in a construction machine in which a hydraulic actuator is
connected to the hydraulic pump via a directional control valve of a closed center type, and in which a position of the directional
control valve is changed according to an operation amount of an operation member, the hydraulic control apparatus comprising
an electronic controller, the electronic controller being configured to:
calculate a virtual bleed opening area from a given virtual bleed opening area characteristic related to the directional control
valve, based on the operation amount of the operation member,

calculate, based on the calculated virtual bleed opening area and a discharge pressure of the hydraulic pump, a virtual negative
control pressure when a negative control system is assumed;

calculate a control command value for the hydraulic pump based on the virtual negative control pressure; and
control the hydraulic pump based on the calculated control command value.

US Pat. No. 9,518,374

SHOVEL AND SWIVELING SPEED REDUCER

SUMITOMO HEAVY INDUSTRIES...

1. A shovel comprising a swiveling motor, and a swiveling speed reducer that reduces the rotational speed of an output shaft
of the swiveling motor, wherein the swiveling speed reducer includes:
a first gear mechanism;
a first gear case configured to house the first gear mechanism;
a first oil check pipe on the first gear case;
a first communication portion configured to communicatively connect the first oil check pipe and lower space inside of the
first gear case, the first communication portion connected to a first location of the first gear case lower than the first
gear mechanism; and

a second communication portion configured to communicatively connect the first oil check pipe and upper space inside of the
first gear case, the second communication port connected to the first gear case at a second location higher than the first
location, the upper space located higher than the first gear mechanism, and

wherein the oil check pipe, the first communication portion and the second communication portion constitute a circulation
path circulating oil inside the first gear case.

US Pat. No. 9,103,332

REFRIGERATOR AND COMPRESSOR

SUMITOMO HEAVY INDUSTRIES...

1. A refrigerator comprising:
a compressor; and
an expander configured to generate coldness in a working gas supplied from the compressor;
the compressor comprising:
a compressor body;
a reciprocating member configured to compress or expand the working gas by undergoing a reciprocating movement within the
compressor body; and

a leaf spring unit configured to support the reciprocating member to undergo the reciprocating movement within the compressor
body,

wherein the leaf spring unit includes
a leaf spring having a first rim fixed to the compressor body, a first hub arranged on an inner side of the first rim and
mounted on the reciprocating member, and a resilient arm part movably supporting the first hub with respect to the first rim;
and

an auxiliary spring having a second rim fixed to the compressor body, a second hub arranged on an inner side of the second
rim and mounted on the reciprocating member, and a pair of auxiliary spring parts supported in a form of a cantilever on the
second rim and the second hub,

wherein the leaf spring is arranged between the pair of auxiliary spring parts, and the pair of auxiliary spring parts opposes
the resilient arm part, and

wherein each auxiliary spring part included in the pair of auxiliary spring parts has a length shorter than that of the resilient
arm part.

US Pat. No. 9,086,231

REGENERATIVE REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A regenerative refrigerator, comprising:
a regenerator tube including a partitioning member, the partitioning member partitioning an internal space of the regenerator
tube into a first space that is connected to a compressor and in which a refrigerant gas supplied from a discharge side of
the compressor flows and a second space connected to the discharge side of the compressor and filled with the refrigerant
gas introduced from the compressor as a regenerator material; and

a cylinder connected to the regenerator tube and configured to cause the refrigerant gas supplied via the regenerator tube
to adiabatically expand,

wherein an area of exposure of the partitioning member to the second space is greater than an area of exposure of the partitioning
member to the first space,

wherein the partitioning member includes one or more tubes causing a high-temperature side and a low-temperature side of the
regenerator tube to communicate with each other,

wherein the first space is inside the one or more tubes, and the second space is outside the one or more tubes and is prevented
from communicating with each of the high-temperature side and the low-temperature side of the regenerator tube, and

wherein the regenerator tube is configured to accumulate, in the regenerator material, cold generated in the cylinder with
the adiabatic expansion of the refrigerant gas.

US Pat. No. 10,490,389

ION IMPLANTER AND ION IMPLANTATION METHOD

SUMITOMO HEAVY INDUSTRIES...

1. An ion implanter, comprising:an ion source configured to generate an ion beam including an ion of a first nonradioactive nuclide;
a beamline configured to support an ion beam irradiated target formed of a solid material including a second nonradioactive nuclide different from the first nonradioactive nuclide; and
a controller configured to calculate at least one of an estimated radiation dosage of a radioactive ray and an estimated generation amount of a radioactive nuclide generated by a nuclear reaction between the first nonradioactive nuclide and the second nonradioactive nuclide.

US Pat. No. 10,099,905

CRANE

Hitachi Sumitomo Heavy In...

1. A crane comprising:a boom;
a jib that is attached to the boom so that the jib can be hoisted or lowered;
a front post that is swingably attached to a tip end side of the boom and linked to the jib via a linking member;
a rear post that is swingably attached to the tip end side of the boom, wherein a rope for hoisting or lowering the jib is wound between the rear post and the front post;
a post-side pendant member, with one end of the post-side pendant member being attached to a tip end of the rear post;
a boom-side pendant member, with one end of the boom-side pendant member being attached to another end of the post-side pendant member, and another end of the boom-side pendant member being attached to the boom; and
a post driving device having a link mechanism that rotates the rear post in a range including a position at which the rear post is swung down to a front post side and a position at which the rear post is swung down to a broom side, while the boom is held down in a horizontal position,
wherein the post driving device is configured to:
include an extension/retraction actuator, with one end of the extension/retraction actuator being connected to the rear post;
be designed so that the rear post rotates in a range including a position at which the rear post is arranged in parallel to the boom by retraction of the extension/retraction actuator and a position at which the rear post is arranged orthogonally to the boom by extension of the extension/retraction actuator; and
when the extension/retraction actuator is extended, the rear post is swung down to the boom side until the one end of the boom-side pendant member attached to the boom and the other end of the post-side pendant member attached to the tip end of the rear post can be attached to each other.

US Pat. No. 9,638,441

CRYOGENIC REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A cryogenic refrigerator, comprising:
a Scotch yoke mechanism including
a crank member fixed to a motor shaft of a motor, the crank member including a crank pin provided at a position eccentric
to a position at which the motor shaft is attached to the crank member;

a frame-shaped Scotch yoke defining a groove elongated in a first direction, the Scotch yoke including a first frame part
and a second frame part that are elongated in the first direction and positioned across the groove from each other; and

a bearing engaged with the crank pin and movably engaged with the groove of the Scotch yoke; and
a displacer including a regenerator, the displacer being connected to the Scotch yoke so as to be caused to reciprocate in
a cylinder with respect to a second direction perpendicular to the first direction by the Scotch yoke mechanism, so that a
refrigerant gas inside an expansion space formed in the cylinder and connected to the regenerator is expanded by the reciprocation
of the displacer to generate cold temperatures,

wherein
the first frame part is more distant from the expansion space than the second frame part, and
the second frame part includes
a convex part projecting in a direction away from the expansion space; and
a first flat part extending between the convex part and a first end of the second frame part, and a second flat part extending
between the convex part and a second end of the second frame part opposite to the first end thereof,

the convex part including
an arc-shaped portion in a center thereof;
a first flat portion extending between the arc-shaped portion and the first flat part, and inclined relative to the first
flat part; and

a second flat portion extending between the arc-shaped portion and the second flat part, and inclined relative to the second
flat part.

US Pat. No. 10,453,689

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

SUMITOMO HEAVY INDUSTRIES...

1. An ion implantation method comprising:irradiating a wafer arranged to meet a predetermined plane channeling condition with an ion beam;
measuring a predetermined characteristic on a surface of the wafer irradiated with the ion beam; and
evaluating an implant angle distribution of the ion beam by using a result of measurement of the characteristic.

US Pat. No. 10,115,595

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE

SUMITOMO HEAVY INDUSTRIES...

1. A method of manufacturing a semiconductor device comprising:ion-injecting a dopant into a semiconductor layer formed of a group III-V compound semiconductor containing nitrogen as a Group V element;
performing a first activation annealing on the semiconductor layer having the ion-injected dopant using a heat-treating furnace under temperature conditions of 700° C. to 900° C.; and
performing a second activation annealing by allowing a pulsed laser beam to be incident on the semiconductor layer after the first activation annealing is performed,
wherein annealing is performed in a nitrogen atmosphere during the performing of the second activation annealing.

US Pat. No. 10,081,928

SHOVEL AND CONTROL METHOD THEREOF

SUMITOMO HEAVY INDUSTRIES...

1. A shovel comprising:a lower travelling body;
an upper swinging body mounted on the lower travelling body;
an attachment attached to the upper swinging body;
sensors on a boom, an arm and/or a bucket, the sensors configured to detect an orientation of the attachment; and
a control device configured to control the attachment based on information relating to a current shape of a ground surface, the information being obtained based on a transition of the orientation calculated from values detected by the sensors on the boom, the arm and/or the bucket.

US Pat. No. 10,006,669

CRYOGENIC REFRIGERATOR AND COOLING METHOD

SUMITOMO HEAVY INDUSTRIES...

1. A cooling method comprising a thermal cycle for generating coldness, the cycle comprising:an intake process of inhaling an operating gas from a high-pressure source into an expansion space; and
an exhaust process of expanding the operating gas and exhausting the gas from the expansion space into a low-pressure source,
wherein the intake process comprises a process of inhaling the gas from a medium-pressure source having a medium pressure between a pressure of the high-pressure source and a pressure of the low-pressure source into the expansion space,
wherein, before the exhaust process is started, the medium-pressure source is disconnected from the expansion space and connected to the high-pressure source such that the pressure of the medium-pressure source is increased by inhaling the gas from the high-pressure source in order to reduce a differential pressure between the medium-pressure source and the expansion space.

US Pat. No. 9,765,996

REGENERATIVE REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A regenerative refrigerator of a single stage type or a multistage type comprising:
a cylinder which is provided with a cooling stage;
a displacer which is provided with a regenerator provided at the same stage as the cooling stage and disposed so as to be
able to move in an axial direction in the cylinder; and

a low temperature-side gas flow path which makes a gas expansion space between the displacer and the cooling stage communicate
with a low-temperature end of the regenerator,

wherein the cylinder is provided with a cylinder side wall extending in the axial direction from the cooling stage to a high
temperature side,

the displacer is provided with a displacer side wall extending to face the cylinder side wall in the axial direction,
the low temperature-side gas flow path is provided with a gas flow gap defined by an outer peripheral surface of the displacer
side wall and an inner peripheral surface of the cylinder side wall, and a displacer gas passage which permits a flow of gas
between the gas flow gap and the low-temperature end of the regenerator,

the gas flow gap is continuous to the gas expansion space on a low temperature side in the axial direction,
the displacer gas passage is provided in the displacer side wall and has a gap-side opening leading to the gas flow gap in
the outer peripheral surface of the displacer side wall, a regenerator-side opening leading to the low temperature end of
the regenerator in an inner peripheral surface of the displacer side wall, and a connection path connecting the gap-side opening
and the regenerator-side opening, and

in the axial direction, the gap-side opening is closer to the high temperature side than the regenerator-side opening.

US Pat. No. 9,683,763

COMPRESSOR AND COOLING SYSTEM

SUMITOMO HEAVY INDUSTRIES...

9. A compressor configured to compress gas returned from a refrigerator and supply the gas to the refrigerator, comprising:
a heat exchanger configured to discharge heat generated during compression outside the compressor;
a cooling liquid inlet port through which cooling liquid flowing from outside the compressor into the compressor passes; and
a cooling liquid outlet port through which the cooling liquid flowing out of the compressor from inside the compressor passes,
wherein the compressor is configured such that an operation mode is switchable between a first mode in which the cooling liquid
passing through the cooling liquid inlet port flows in the heat exchanger in a predetermined first direction and passes through
the cooling liquid outlet port, and a second mode in which the cooling liquid passing through the cooling liquid inlet port
flows in the heat exchanger in a second direction opposite to the first direction and passes through the cooling liquid outlet
port,

in the first mode, a first valve and a second valve allow a passage of the cooling liquid and a third valve and a fourth valve
restrict a flow of the cooling liquid, and, in the second mode, the third valve and the fourth valve allow a passage of the
cooling liquid and the first valve and the second valve restrict a flow of the cooling liquid,

the compressor further comprises a control unit configured to switch the operation mode between the first mode and the second
mode based on a result of measurement of a flow rate or a temperature of the cooling liquid, or measurements of both,

the control unit switches the operation mode from the first mode to the second mode when the flow rate of the cooling liquid
measured drops below a first predetermined threshold value, and switches the operation mode from the second mode to the first
mode when the flow rate of the cooling liquid measured exceeds a second threshold value.

US Pat. No. 9,566,453

CHARGED PARTICLE BEAM IRRADIATION APPARATUS

Sumitomo Heavy Industries...

1. A charged particle beam irradiation apparatus comprising: an accelerator which accelerates charged particles and emits
a charged particle beam;
an irradiation unit which irradiates an irradiation target with the charged particle beam;
a transport line which transports the charged particle beam emitted from the accelerator, to the irradiation unit;
an energy adjustment unit which is provided at the transport line and adjusts energy of the charged particle beam;
a plurality of electromagnets provided further toward the downstream side than the energy adjustment unit in the transport
line;

an electromagnet power source provided to correspond to each of the plurality of electromagnets; and
a control unit which controls a parameter of each electromagnet according to the energy of the charged particle beam,
wherein the electromagnet power source has a storage unit which stores the parameter of each electromagnet for each layer
which is irradiated with the charged particle beam, in the irradiation target, and

the control unit transmits a signal relating to switching of the layer to each electromagnet power source.

US Pat. No. 9,476,499

SHOVEL

SUMITOMO HEAVY INDUSTRIES...

1. A shovel comprising:
a speed reducer configured by stacking a plurality of gear speed reducers each having a sun gear, a planetary gear, an internal
gear, and a carrier member supporting the planetary gear provided in a case, in a direction of an axis of rotation of an upper
turning body; and

a movement restriction section which is provided between the sun gear of one gear speed reducer among the gear speed reducers
stacked in a plurality and another gear speed reducer stacked so as to face the sun gear and restricts movement of the sun
gear of the one gear speed reducer toward the other gear speed reducer,

wherein the movement restriction section is provided at the case.

US Pat. No. 9,194,616

CRYOGENIC REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A cryogenic refrigerator comprising:
a first stage displacer;
a first stage cylinder configured to form a first expansion space between the first stage cylinder and the first stage displacer;
a second stage displacer connected to the first stage displacer; and
a second stage cylinder configured to form a second expansion space between the second stage cylinder and the second stage
displacer,

wherein a helical groove is formed on an outer peripheral surface of the second stage displacer so as to helically extend
from a side of the second expansion space toward the first stage displacer, and includes a high temperature side helical groove
and a low temperature side helical groove, which sequentially extend in a longitudinal direction of the second stage displacer
so that the high temperature side helical groove is positioned on a side of the first expansion space and the low temperature
side helical groove is positioned on a side of the second expansion space,

wherein a cross-sectional area of the high temperature side helical groove positioned on the side of the first expansion space
is smaller than a cross-sectional area of the low temperature side helical groove positioned on the side of the second expansion
space,

wherein an upper end of the high temperature side helical groove is in fluid communication with the first expansion space,
wherein a length of the high temperature side helical groove is determined so that,
when the second stage displacer is positioned at an upper dead end of a stroke of the second stage displacer reciprocating
inside the second stage cylinder, at least a part of the high temperature side helical groove exists inside the second stage
cylinder, and

when the second stage displacer is at a lower dead end of the stroke, at least another part of the high temperature side helical
groove exists in the first expansion space.

US Pat. No. 9,180,385

COLD TRAP AND METHOD OF CONTROLLING COLD TRAP

Sumitomo Heavy Industries...

1. A cold trap comprising a plurality of individually controllable cooling units and provided in an evacuation path for connecting
a volume subject to evacuation to a vacuum pump,
wherein each cooling unit includes:
a panel unit provided in the evacuation path such that the panel is exposed; and
a refrigerator thermally coupled to the panel unit and configured to cool the panel unit, and
wherein the panel unit of each cooling unit is spaced apart from the panel unit of another cooling unit,
wherein the cold trap further comprises a cover unit thermally coupled to at least one of two adjacent panel units and configured
to cover at least a part of a gap between the two panel units.

US Pat. No. 10,030,892

CRYOGENIC REFRIGERATOR

SUMITOMO HEAVY INDUSTRIES...

1. A cryogenic refrigerator, comprising:a cylinder;
a displacer accommodated in the cylinder so as to reciprocate inside the cylinder with a gap formed between a periphery of the displacer and an interior surface of the cylinder; and
a depressed part formed on at least one of the periphery of the displacer and the interior surface of the cylinder,
wherein a ratio of a volume of the depressed part to a volume of the gap satisfies a condition of 16?Vd/Vg?54, where Vd is the volume of the depressed part and Vg is the volume of the gap, and
wherein Vd is determined from Vd=Sd×Ld, where Sd is a cross-sectional area of the depressed part and Ld is a length of the depressed part.

US Pat. No. 9,724,863

INJECTION MOLDING MACHINE

SUMITOMO HEAVY INDUSTRIES...

8. An injection molding machine comprising:
a clamping force sensor that detects a clamping force of a mold; and
a clamping force monitoring unit programmed to monitor a detected value of the clamping force sensor multiple times during
an injection process and multiple times during a pressure holding process to calculate

a first mold open distance based on a difference between a maximum value of the detected values obtained during the injection
process and the pressure holding process, and the detected value obtained at a start of the injection process; and

a second mold open distance based on a difference between the detected value obtained at an end of the pressure holding process
and the detected value obtained at the start of the injection process,

wherein
the mold open distance is a distance of a gap formed between a parting face of a stationary mold and a parting face of a movable
mold between the start of the injection process and the end of the pressure holding process;

the injection process starts when molten resin is injected into the mold and ends when a V/P switchover is triggered, and
the pressure holding process starts when the V/P switchover is completed and ends when a cooling process is initiated; and

the clamping force monitoring unit is programmed to use the calculated first mold open distance and calculated second mold
open distance to reject a molding product as having an unacceptable amount of flash.

US Pat. No. 9,550,431

WORKING MACHINE

SUMITOMO HEAVY INDUSTRIES...

1. A working machine comprising:
an electric motor configured to drive a drive target and generate electricity;
a power storage device;
a charge-discharge control circuit which is configured to control charging and discharging of the power storage device and
is connected to the electric motor; and

a controller configured to control the charge-discharge control circuit,
wherein the controller obtains a calculation value of an internal resistance of the power storage device based on a measured
value of an open circuit voltage of the power storage device, and a measured value of an inter-terminal voltage and a measured
value of a charge-discharge current when the power storage device is charged and discharged, and obtains a correction value
of the internal resistance by correcting the calculation value of the internal resistance based on the measured value of the
open circuit voltage.

US Pat. No. 9,117,627

ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD

Sumitomo Heavy Industries...

1. An ion implantation apparatus comprising:
an implantation processing chamber for implanting ions into a workpiece;
a high voltage unit comprising an ion source unit for generating the ions, and a beam transport unit provided between the
ion source unit and the implantation processing chamber; and

a high-voltage power supply system configured to apply a potential to the high voltage unit under any one of a plurality of
energy settings, wherein

the high-voltage power supply system comprises a plurality of current paths formed such that a beam current flowing into the
workpiece is returned to the ion source unit, and each of the plurality of energy settings is associated with a corresponding
one of the plurality of current paths.

US Pat. No. 10,001,117

CRYOPUMP SYSTEM, CRYOPUMP CONTROLLER, AND METHOD FOR REGENERATING THE CRYOPUMP

SUMITOMO HEAVY INDUSTRIES...

1. A cryopump system comprising:a cryopump; and
a regeneration controller that controls the cryopump in accordance with a regeneration sequence including a discharging process for discharging a condensate from the cryopump, the discharging process being continued until a discharging completion condition based on pressure in the cryopump is met, wherein
the regeneration controller includes:
a first determiner that determines in a repetitive manner whether the discharging completion condition is met;
a second determiner that determines whether the number of times of determination for the discharging completion condition or a period of time for which the discharging process continues is equal to or larger than a first threshold value; and
a temperature controller that performs preliminary cooling of the cryopump if the number of times of determination for the discharging completion condition or the period of time for which the discharging process continues is equal to or larger than the first threshold value, and wherein
the first determiner re-determines during the preliminary cooling whether the discharging completion condition is met.