US Pat. No. 9,472,347

VARIABLE VACUUM CAPACITOR

Comet AG, Flamatt (CH)

1. A variable vacuum capacitor comprising:
a vacuum enclosure,
a first variable electrode assembly comprising one or more first static electrodes and one or more first mobile electrodes,
a second variable electrode assembly comprising one or more second static electrodes and one or more second mobile electrodes,
a first electrical connection terminal for providing an electrical connection to the one or more first static capacitor electrodes,
a second electrical connection terminal for providing an electrical, connection to the one or more second static capacitor
electrodes,

displacement means for displacing the first and/or second mobile electrodes relative to the first and/or second static electrodes
respectively, along an axis of the vacuum capacitor,

wherein, in the variable vacuum capacitor,
the first and second electrode assemblies are ganged along the axis such that the first mobile electrode assembly is offset
along the axis by a gang offset distance from the second electrode assembly, and

the variable vacuum capacitor comprises mobile electrode linkage means for providing a kinematic linkage between the one or
more first mobile electrodes at a first position along the axis and the one or more second mobile electrodes at a second position
along the axis, such that a first displacement along the axis of the one or more first mobile electrodes results in a second
displacement along the axis of the one or more second mobile electrodes.

US Pat. No. 9,721,729

VACUUM VARIABLE CAPACITOR

COMET AG, Flamatt (CH)

1. A vacuum variable capacitor adjustable between a minimum capacitance value and a maximum capacitance value, the vacuum
variable capacitor comprising:
a first vacuum enclosure containing capacitor electrodes separated by a vacuum dielectric, the wall of the first vacuum enclosure
comprising a first deformable region, hereafter referred to as first bellows, for transferring mechanical movement between
a drive means and a mobile one of the capacitor electrodes inside the first vacuum enclosure,

a second enclosure, referred to hereafter as the pre-vacuum enclosure, containing a gas at a predetermined pressure, wherein
the first bellows separates the gas in the pre-vacuum enclosure from the vacuum dielectric in the first vacuum enclosure,
and
wherein the drive means is disposed outside the first and the second enclosure of the vacuum variable capacitor, the drive
means is coupled to a driven means by a magnetic coupling, and the magnetic coupling comprises a shielding to be shielded
from electromagnetic fields.

US Pat. No. 10,032,607

FREQUENCY TUNING OF A RF-GENERATOR WITHIN A PLASMA PROCESS

COMET AG, (CH)

1. A method of frequency tuning an electrical generator for supplying electrical power to a plasma, wherein the method comprises a pulsed mode, the pulse mode comprising at least a high power pulse comprising a high power level and a low power pulse comprising a low power level different to zero power, the method comprising the steps of:providing an RF-power with a high power starting frequency set comprising at least one high power starting frequency at the high power pulse with a predefined high power pulse shape;
providing an RF-power with a low power starting frequency set comprising at least one low power starting frequency at the low power pulse with a predefined low power pulse shape;
determining a reflected high power at the high power starting frequency;
tuning the high power starting frequency to a different first high power frequency if the reflected high power exceeds a high power threshold value such that the reflected high power decreases below the high power threshold value;
determining a reflected low power at the low power starting frequency;
tuning the low power starting frequency to a different first low power frequency if the reflected low power exceeds a low power threshold value such that the reflected low power decreases below the low power threshold value.

US Pat. No. 9,691,548

HIGH-VOLTAGE CAPACITOR

COMET AG, Flamatt (CH)

1. A high-voltage capacitor comprising a gas-tight enclosure, the gas-tight enclosure containing a gas dielectric and at least
two capacitor electrodes, wherein the gas-tight enclosure comprises an insulating body made entirely of polymeric material
and two end caps, wherein the polymeric material is at least one of PEEK and reinforced with reinforcement fibers, and wherein
a pressure of the gas dielectric in the gas-tight enclosure is at least 6 bar.

US Pat. No. 9,805,873

VACUUM VARIABLE CAPACITOR

COMET AG, Flamatt (CH)

1. A vacuum variable capacitor adjustable between a minimum capacitance value and a maximum capacitance value, the vacuum
variable capacitor comprising:
a first vacuum enclosure containing capacitor electrodes separated by a vacuum dielectric, the wall of the first vacuum enclosure
comprising a first deformable region, hereafter referred to as first bellows, for transferring mechanical movement between
a drive means disposed outside the first vacuum enclosure and a mobile one of the capacitor electrodes inside the first vacuum
enclosure, and

a second enclosure, referred to hereafter as the pre-vacuum enclosure, containing a gas at a predetermined pressure, lower
than atmospheric pressure, the pre-vacuum enclosure being arranged such that the first bellows separates the gas in the pre-vacuum
enclosure from the vacuum dielectric in the first vacuum enclosure,

wherein the drive means, the electrodes, and the pre-determined pressure in the pre-vacuum enclosure are configured so that
the minimum adjustment time between the minimum capacitance value and the maximum capacitance value is less than 0.1s.

US Pat. No. 10,469,038

BROADBAND MATCHING NETWORK

COMET AG, (CH)

1. A broadband matching network for coupling to an output of an amplifying device for an amplifier arrangement with a nominal operating frequency between 1 MHz and 100 MHz, more preferably between 5 MHz and 85 MHz and an output power of at least 100 W, more preferably at least 200 W and most preferably at least 250 W, wherein the broadband matching network comprises a planar transformer with a primary winding arranged on a primary side of the broadband matching network and a secondary winding arranged on a secondary side of the broadband matching network, wherein the primary winding is arranged to be electrically connected to the output of the amplifying device, wherein the broadband matching network is characterized by a center frequency and a bandwidth with a frequency range of at least +/?3%, preferably at least +/?5%, more preferably at least +/?7% around the center frequency, wherein the center frequency corresponds to the nominal operating frequency, and wherein the broadband matching network is arranged such that a series resonance frequency of the broadband matching network corresponds to the center frequency, and a first parallel resonance frequency and a second parallel resonance frequency of the broadband matching network are arranged around the series resonance frequency such that a frequency dependence of a load impedance provided by the broadband matching network is reduced.

US Pat. No. 10,925,177

HEAT DISSIPATION IN AN ELECTRONIC CIRCUIT AND METHOD

Comet AG, Flamatt (CH)

1. An electronic circuitry module, comprising:a housing comprising a base plate and one or more sidewalls connected to and extending around the base plate to form an enclosure;
at least one electronic circuit comprising at least one heat generating electronic component disposed within the enclosure and mounted on the base plate, the at least one heat generating component comprising at least one power transformer;
a cooling circuit disposed within the enclosure and including an inlet and an outlet for flow of cooling liquid therebetween; and
a potting material that conforms to the housing and substantially fills the enclosure to submerse the at least one electronic circuit and the cooling circuit,
wherein the at least one electronic circuit includes a first printed circuit board and a second printed circuit board that are stacked with respect to each other and occupy different levels, and wherein the potting material fills a space between the first printed circuit board and the second printed circuit board.

US Pat. No. 9,472,347

VARIABLE VACUUM CAPACITOR

Comet AG, Flamatt (CH)

1. A variable vacuum capacitor comprising:
a vacuum enclosure,
a first variable electrode assembly comprising one or more first static electrodes and one or more first mobile electrodes,
a second variable electrode assembly comprising one or more second static electrodes and one or more second mobile electrodes,
a first electrical connection terminal for providing an electrical connection to the one or more first static capacitor electrodes,
a second electrical connection terminal for providing an electrical, connection to the one or more second static capacitor
electrodes,

displacement means for displacing the first and/or second mobile electrodes relative to the first and/or second static electrodes
respectively, along an axis of the vacuum capacitor,

wherein, in the variable vacuum capacitor,
the first and second electrode assemblies are ganged along the axis such that the first mobile electrode assembly is offset
along the axis by a gang offset distance from the second electrode assembly, and

the variable vacuum capacitor comprises mobile electrode linkage means for providing a kinematic linkage between the one or
more first mobile electrodes at a first position along the axis and the one or more second mobile electrodes at a second position
along the axis, such that a first displacement along the axis of the one or more first mobile electrodes results in a second
displacement along the axis of the one or more second mobile electrodes.